DE69223916D1 - Optische Kodiereinrichtung - Google Patents

Optische Kodiereinrichtung

Info

Publication number
DE69223916D1
DE69223916D1 DE69223916T DE69223916T DE69223916D1 DE 69223916 D1 DE69223916 D1 DE 69223916D1 DE 69223916 T DE69223916 T DE 69223916T DE 69223916 T DE69223916 T DE 69223916T DE 69223916 D1 DE69223916 D1 DE 69223916D1
Authority
DE
Germany
Prior art keywords
coding device
optical coding
optical
coding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69223916T
Other languages
English (en)
Other versions
DE69223916T2 (de
Inventor
Koh Ishizuka
Tetsuharu Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP16701592A external-priority patent/JP3185373B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69223916D1 publication Critical patent/DE69223916D1/de
Publication of DE69223916T2 publication Critical patent/DE69223916T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE69223916T 1991-10-03 1992-10-02 Optische Kodiereinrichtung Expired - Fee Related DE69223916T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP28358291 1991-10-03
JP28358091 1991-10-03
JP28358491 1991-10-03
JP28358391 1991-10-03
JP28358191 1991-10-03
JP16701592A JP3185373B2 (ja) 1991-10-03 1992-06-02 エンコーダ

Publications (2)

Publication Number Publication Date
DE69223916D1 true DE69223916D1 (de) 1998-02-12
DE69223916T2 DE69223916T2 (de) 1998-05-28

Family

ID=27553324

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69223916T Expired - Fee Related DE69223916T2 (de) 1991-10-03 1992-10-02 Optische Kodiereinrichtung

Country Status (3)

Country Link
US (1) US5436724A (de)
EP (1) EP0539757B1 (de)
DE (1) DE69223916T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6141118A (en) * 1996-06-13 2000-10-31 Canon Kabushiki Kaisha Optical scanning device
US6919561B2 (en) * 2001-11-27 2005-07-19 Chih-Kung Lee Diffraction laser encoder apparatus
US20060145066A1 (en) * 2004-12-13 2006-07-06 Hideaki Tamiya Displacement detection apparatus, displacement gauging apparatus and fixed point detection apparatus
JP2006275654A (ja) * 2005-03-28 2006-10-12 Sony Corp 変位検出装置及び変位計測装置並びに定点検出装置
US7933023B2 (en) * 2005-05-23 2011-04-26 Mori Seiki, Co., Ltd. Displacement detection apparatus, displacement measurement apparatus and fixed point detection apparatus
CN1991297B (zh) * 2005-12-31 2010-05-05 财团法人工业技术研究院 准共光程外差干涉位移测量系统
US8041533B2 (en) * 2008-05-09 2011-10-18 Delta Design, Inc. IC device-in-pocket detection with angular mounted lasers and a camera
JP5697323B2 (ja) * 2009-10-22 2015-04-08 キヤノン株式会社 ヘテロダイン干渉計測装置
JP5618898B2 (ja) * 2010-08-31 2014-11-05 Dmg森精機株式会社 変位検出装置
DE102010063253A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
US9194818B2 (en) 2012-04-20 2015-11-24 ASTRODESIGN, Inc. Distance measurement system and optical resolution improvement apparatus
CN102937411B (zh) * 2012-11-09 2015-01-21 清华大学 一种双频光栅干涉仪位移测量系统
CN104919284B (zh) * 2013-01-15 2017-08-18 瑞尼斯豪公司 读取由周期性偏振纳米结构表示的数据的方法
US9945697B2 (en) 2013-01-15 2018-04-17 Renishaw Plc Measurement scale with periodic nanostructure
DE102013222383A1 (de) * 2013-02-06 2014-08-07 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
US9316536B2 (en) 2013-06-24 2016-04-19 ASTRODESIGN, Inc. Spatial frequency reproducing apparatus and optical distance measuring apparatus
WO2016104511A1 (ja) * 2014-12-24 2016-06-30 株式会社ニコン 計測装置及び計測方法、露光装置及び露光方法、並びにデバイス製造方法
WO2017027505A1 (en) * 2015-08-10 2017-02-16 Delta Design, Inc. Ic device-in-pocket detection with angular mounted lasers and a camera
CN113448191B (zh) * 2020-03-26 2022-11-29 上海微电子装备（集团）股份有限公司 一种对准系统及光刻机

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH659131A5 (it) * 1983-07-28 1986-12-31 Cise Spa Rivelatore di tipo interferometrico con sensore a fibra ottica.
FR2598797B1 (fr) * 1986-05-07 1990-05-11 Nippon Telegraph & Telephone Procede de mesure et/ou d'ajustement du deplacement d'un objet et appareil pour la mise en oeuvre de ce procede
JPH01206283A (ja) * 1988-02-13 1989-08-18 Brother Ind Ltd 光ヘテロダイン測定装置
US5067813A (en) * 1988-04-06 1991-11-26 Canon Kabushiki Kaisha Optical apparatus for measuring displacement of an object
JPH01167607U (de) * 1988-05-16 1989-11-24
EP0397202B1 (de) * 1989-05-12 1994-08-03 Canon Kabushiki Kaisha Kodierer
JP2683117B2 (ja) * 1989-10-31 1997-11-26 キヤノン株式会社 エンコーダー
US5182610A (en) * 1990-04-19 1993-01-26 Sortec Corporation Position detecting method and device therefor as well as aligning device

Also Published As

Publication number Publication date
EP0539757A1 (de) 1993-05-05
DE69223916T2 (de) 1998-05-28
EP0539757B1 (de) 1998-01-07
US5436724A (en) 1995-07-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee