DE69223789D1 - Optisches Nahfeldabtastmikroskop - Google Patents

Optisches Nahfeldabtastmikroskop

Info

Publication number
DE69223789D1
DE69223789D1 DE69223789T DE69223789T DE69223789D1 DE 69223789 D1 DE69223789 D1 DE 69223789D1 DE 69223789 T DE69223789 T DE 69223789T DE 69223789 T DE69223789 T DE 69223789T DE 69223789 D1 DE69223789 D1 DE 69223789D1
Authority
DE
Germany
Prior art keywords
sample
probe tip
lightwaves
emitted
received
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69223789T
Other languages
English (en)
Other versions
DE69223789T2 (de
Inventor
Daniel Dr Courjon
Wolfgang Dieter Dr Pohl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69223789D1 publication Critical patent/DE69223789D1/de
Publication of DE69223789T2 publication Critical patent/DE69223789T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)
DE69223789T 1992-10-22 1992-10-22 Optisches Nahfeldabtastmikroskop Expired - Fee Related DE69223789T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP92810813A EP0593835B1 (de) 1992-10-22 1992-10-22 Optisches Nahfeldabtastmikroskop

Publications (2)

Publication Number Publication Date
DE69223789D1 true DE69223789D1 (de) 1998-02-05
DE69223789T2 DE69223789T2 (de) 1998-06-25

Family

ID=8212010

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69223789T Expired - Fee Related DE69223789T2 (de) 1992-10-22 1992-10-22 Optisches Nahfeldabtastmikroskop

Country Status (5)

Country Link
US (1) US5539197A (de)
EP (1) EP0593835B1 (de)
JP (1) JP2555531B2 (de)
AT (1) ATE161636T1 (de)
DE (1) DE69223789T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100262878B1 (ko) * 1993-10-04 2000-08-01 포만 제프리 엘 근접시야 광학현미경 및 그 측정방법
ATE391289T1 (de) * 1994-05-31 2008-04-15 Kanagawa Kagaku Gijutsu Akad Optische faser und deren herstellung
US5479024A (en) * 1994-08-11 1995-12-26 The Regents Of The University Of California Method and apparatus for performing near-field optical microscopy
JP2936311B2 (ja) * 1994-09-09 1999-08-23 セイコーインスツルメンツ株式会社 液中観察機能付き走査型近視野原子間力顕微鏡
US5859364A (en) * 1995-06-05 1999-01-12 Olympus Optical Co., Ltd. Scanning probe microscope
US5625617A (en) * 1995-09-06 1997-04-29 Lucent Technologies Inc. Near-field optical apparatus with a laser having a non-uniform emission face
US5952562A (en) * 1995-11-22 1999-09-14 Olympus Optical Co., Ltd. Scanning probe microscope incorporating an optical microscope
US5796487A (en) * 1996-06-28 1998-08-18 Polaroid Corporation Dark field, photon tunneling imaging systems and methods for optical recording and retrieval
DE19741122C2 (de) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)
JP3416589B2 (ja) 1999-09-14 2003-06-16 理化学研究所 部材の先端部に金属微粒子を生成して固定する方法およびその装置ならびにプローブ
US7170842B2 (en) * 2001-02-15 2007-01-30 Hewlett-Packard Development Company, L.P. Methods for conducting current between a scanned-probe and storage medium
US7234343B2 (en) * 2004-03-08 2007-06-26 Virginia Tech Intellectual Properties, Inc. Method and apparatus for evanescent filed measuring of particle-solid separation

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3276138D1 (en) * 1982-12-27 1987-05-27 Ibm Optical near-field scanning microscope
US5202004A (en) * 1989-12-20 1993-04-13 Digital Instruments, Inc. Scanning electrochemical microscopy
US5105305A (en) * 1991-01-10 1992-04-14 At&T Bell Laboratories Near-field scanning optical microscope using a fluorescent probe

Also Published As

Publication number Publication date
DE69223789T2 (de) 1998-06-25
JP2555531B2 (ja) 1996-11-20
ATE161636T1 (de) 1998-01-15
JPH07140155A (ja) 1995-06-02
US5539197A (en) 1996-07-23
EP0593835B1 (de) 1997-12-29
EP0593835A1 (de) 1994-04-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee