DE69218553T2 - Piezoelektrisch betätigtes Durchflussregelventil - Google Patents
Piezoelektrisch betätigtes DurchflussregelventilInfo
- Publication number
- DE69218553T2 DE69218553T2 DE69218553T DE69218553T DE69218553T2 DE 69218553 T2 DE69218553 T2 DE 69218553T2 DE 69218553 T DE69218553 T DE 69218553T DE 69218553 T DE69218553 T DE 69218553T DE 69218553 T2 DE69218553 T2 DE 69218553T2
- Authority
- DE
- Germany
- Prior art keywords
- valve
- disc
- piezoelectric
- fluid
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims abstract description 39
- 230000002093 peripheral effect Effects 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 2
- 230000007935 neutral effect Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 abstract description 3
- 239000000919 ceramic Substances 0.000 description 12
- 238000007789 sealing Methods 0.000 description 7
- 229910010293 ceramic material Inorganic materials 0.000 description 6
- 229910001374 Invar Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000003949 liquefied natural gas Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/18—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with diaphragm secured at one side only, e.g. to be laid on the seat by rolling action
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/005—Piezoelectric benders
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Fuel-Injection Apparatus (AREA)
- Flow Control (AREA)
- Magnetically Actuated Valves (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB919122739A GB9122739D0 (en) | 1991-10-25 | 1991-10-25 | System for controlling fluid flow |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69218553D1 DE69218553D1 (de) | 1997-04-30 |
| DE69218553T2 true DE69218553T2 (de) | 1997-11-27 |
Family
ID=10703565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69218553T Expired - Lifetime DE69218553T2 (de) | 1991-10-25 | 1992-10-23 | Piezoelektrisch betätigtes Durchflussregelventil |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US5354032A (cg-RX-API-DMAC10.html) |
| EP (1) | EP0544405B1 (cg-RX-API-DMAC10.html) |
| JP (1) | JP2726788B2 (cg-RX-API-DMAC10.html) |
| KR (1) | KR100202160B1 (cg-RX-API-DMAC10.html) |
| AT (1) | ATE150857T1 (cg-RX-API-DMAC10.html) |
| CA (1) | CA2081290C (cg-RX-API-DMAC10.html) |
| DE (1) | DE69218553T2 (cg-RX-API-DMAC10.html) |
| DK (1) | DK0544405T3 (cg-RX-API-DMAC10.html) |
| ES (1) | ES2101810T3 (cg-RX-API-DMAC10.html) |
| GB (1) | GB9122739D0 (cg-RX-API-DMAC10.html) |
| GR (1) | GR3023873T3 (cg-RX-API-DMAC10.html) |
| NZ (1) | NZ244873A (cg-RX-API-DMAC10.html) |
| TW (1) | TW221480B (cg-RX-API-DMAC10.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20109053U1 (de) * | 2001-05-30 | 2002-10-10 | Reich KG Regel- und Sicherheitstechnik, 35713 Eschenburg | Ventilvorrichtung und Verteilervorrichtung |
| DE202005021632U1 (de) | 2004-03-30 | 2009-03-05 | Bühner, Kurt | Mittels des inversen Piezoeffekts betätigter Antrieb |
Families Citing this family (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2690623B1 (fr) * | 1992-04-29 | 1995-01-20 | Chronotec Techsonic | Dispositif de contrôle de débit pour systèmes de perfusion. |
| GB2270735A (en) * | 1992-09-15 | 1994-03-23 | Adrian Michael Woodward | Flow control valves |
| GB2285672A (en) * | 1993-12-22 | 1995-07-19 | The Technology Partnership Ltd | Fluid flow control valve |
| US5628411A (en) * | 1994-12-01 | 1997-05-13 | Sortex Limited | Valve devices for use in sorting apparatus ejectors |
| AU4869196A (en) * | 1995-02-21 | 1996-09-11 | Applied Power Inc. | Piezo-electrically actuated valve |
| US5630440A (en) * | 1995-02-21 | 1997-05-20 | Applied Power Inc. | Piezo composite sheet actuated valve |
| US6026847A (en) * | 1995-10-11 | 2000-02-22 | Reinicke; Robert H. | Magnetostrictively actuated valve |
| US5868375A (en) * | 1995-10-11 | 1999-02-09 | Marotta Scientific Controls, Inc. | Magnetostrictively actuated valve |
| US5780958A (en) * | 1995-11-03 | 1998-07-14 | Aura Systems, Inc. | Piezoelectric vibrating device |
| DE19627038C2 (de) * | 1996-07-05 | 1998-06-04 | Honeywell Bv | Piezoelektrischer Betätiger |
| DE69710357T2 (de) * | 1996-11-21 | 2002-10-17 | Advanced Fluid Systems Ltd., London | Durchflussregelventil und dämpfer |
| ATE260512T1 (de) * | 1997-11-12 | 2004-03-15 | Deka Products Lp | Piezoelektrischer antrieb betriebsfähig in elektrolytischer flüssigkeit |
| US6019346A (en) * | 1998-03-06 | 2000-02-01 | Miller; Kenneth L. | Piezo-actuated high response valve |
| US6065688A (en) * | 1998-03-09 | 2000-05-23 | The United States Of America As Represented By The Secretary Of The Navy | Mass-flux actuator with high frequency response |
| DE19912334C2 (de) * | 1999-03-19 | 2002-07-11 | Bosch Gmbh Robert | Vorsteuereinrichtung |
| US6302495B1 (en) * | 1999-06-04 | 2001-10-16 | Ge Harris Railway Electronics, Llc | Railway car braking system including piezoelectric pilot valve and associated methods |
| US6247493B1 (en) | 2000-03-09 | 2001-06-19 | Richard C. Henderson | Miniature pulsatile flow controller |
| US6589229B1 (en) | 2000-07-31 | 2003-07-08 | Becton, Dickinson And Company | Wearable, self-contained drug infusion device |
| US7198250B2 (en) * | 2000-09-18 | 2007-04-03 | Par Technologies, Llc | Piezoelectric actuator and pump using same |
| KR100734352B1 (ko) * | 2001-05-09 | 2007-07-03 | 엘지전자 주식회사 | 인버터 시스템 |
| US20030226987A1 (en) * | 2002-06-06 | 2003-12-11 | Gallmeyer Christopher F. | Method and apparatus for seat detection and soft seating in a piezoelectric device actuated valve system |
| WO2004103478A1 (en) | 2003-05-20 | 2004-12-02 | Collins James F | Ophthalmic drug delivery system |
| US8012136B2 (en) | 2003-05-20 | 2011-09-06 | Optimyst Systems, Inc. | Ophthalmic fluid delivery device and method of operation |
| KR100519970B1 (ko) * | 2003-10-07 | 2005-10-13 | 삼성전자주식회사 | 밸브리스 마이크로 공기공급장치 |
| EP1685605B1 (en) * | 2003-11-20 | 2011-12-21 | Viking Technologies L.C. | Integral thermal compensation for an electro-mechanical actuator |
| US6988706B2 (en) * | 2003-12-17 | 2006-01-24 | General Electric Company | Piezoelectric microvalve |
| JP2006116399A (ja) | 2004-10-20 | 2006-05-11 | Citizen Electronics Co Ltd | 撓み振動型エキサイタ |
| US20060232166A1 (en) * | 2005-04-13 | 2006-10-19 | Par Technologies Llc | Stacked piezoelectric diaphragm members |
| US7618391B2 (en) * | 2005-04-20 | 2009-11-17 | Children's Medical Center Corporation | Waveform sensing and regulating fluid flow valve |
| EP1881272A1 (de) * | 2006-07-20 | 2008-01-23 | Siemens Aktiengesellschaft | Vorrichtung und Verfahren zur Versorgung eines Brenners mit einem Brennstofffluid |
| JP2008303805A (ja) * | 2007-06-08 | 2008-12-18 | Alps Electric Co Ltd | ダイヤフラムエアポンプ |
| WO2009072434A1 (ja) * | 2007-12-03 | 2009-06-11 | Murata Manufacturing Co., Ltd. | 圧電ポンプ |
| US8978757B2 (en) | 2008-07-17 | 2015-03-17 | Schlumberger Technology Corporation | Remote actuation testing tool for high pressure differential downhole environments |
| MX2011000537A (es) * | 2008-07-17 | 2011-02-22 | Schlumberger Technology Bv | Dispositivos piezoelectricos para el fondo de la perforacion. |
| ES2835886T3 (es) | 2010-07-15 | 2021-06-23 | Eyenovia Inc | Dispositivo generador de gotas |
| CA2805635A1 (en) | 2010-07-15 | 2012-01-19 | Corinthian Ophthalmic, Inc. | Method and system for performing remote treatment and monitoring |
| US9087145B2 (en) | 2010-07-15 | 2015-07-21 | Eyenovia, Inc. | Ophthalmic drug delivery |
| US10154923B2 (en) | 2010-07-15 | 2018-12-18 | Eyenovia, Inc. | Drop generating device |
| JP5960840B2 (ja) | 2011-12-12 | 2016-08-02 | アイノビア，インコーポレイティド | エジェクタ機構、エジェクタ装置及びそれらの使用方法 |
| JP5795292B2 (ja) * | 2012-09-06 | 2015-10-14 | 富士ゼロックス株式会社 | 液滴吐出装置 |
| WO2014181208A1 (en) * | 2013-05-07 | 2014-11-13 | Koninklijke Philips N.V. | Linear digital proportional piezoelectric valve |
| GB201514921D0 (en) * | 2015-08-21 | 2015-10-07 | Rolls Royce Plc | Actuator control |
| CN108138759B (zh) * | 2015-10-05 | 2020-02-21 | 株式会社村田制作所 | 流体控制装置、减压装置以及加压装置 |
| JP7227163B2 (ja) | 2017-06-10 | 2023-02-21 | アイノビア，インコーポレイティド | 流体を取扱い、目に流体を送出するための方法および装置 |
| TWI747076B (zh) * | 2019-11-08 | 2021-11-21 | 研能科技股份有限公司 | 行動裝置散熱組件 |
| WO2021119513A1 (en) | 2019-12-11 | 2021-06-17 | Eyenovia, Inc. | Systems and devices for delivering fluids to the eye and methods of use |
| CN111895176B (zh) * | 2020-07-06 | 2021-05-28 | 西安交通大学 | 一种压电式阀门及其使用方法 |
| CN115507214B (zh) * | 2021-06-22 | 2024-12-03 | 科际精密股份有限公司 | 气压调节装置及其气压调节方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3360664A (en) * | 1964-10-30 | 1967-12-26 | Gen Dynamics Corp | Electromechanical apparatus |
| US3414010A (en) * | 1965-11-01 | 1968-12-03 | Honeywell Inc | Control apparatus |
| US3752189A (en) * | 1971-09-15 | 1973-08-14 | Moog Inc | Electrical feedback servovalve |
| US4340083A (en) * | 1978-11-30 | 1982-07-20 | Carleton Controls Corporation | Deflectable beam valve |
| US4545561A (en) * | 1982-07-30 | 1985-10-08 | Mcdonnell Douglas Corporation | Piezoelectric valve operator |
| AT380934B (de) * | 1983-01-13 | 1986-07-25 | Enfo Grundlagen Forschungs Ag | Elektrisch-pneumatischer signalwandler |
| DE3320907A1 (de) * | 1983-06-09 | 1984-12-13 | Siemens AG, 1000 Berlin und 8000 München | Steuervorrichtung, insbesondere fuer heiz- und klimaanlagen in kraftfahrzeugen |
| US4535810A (en) * | 1984-03-27 | 1985-08-20 | Dynamic Valves, Inc. | Electrically controlled valves |
| DE3425290A1 (de) * | 1984-07-10 | 1986-01-16 | Atlas Fahrzeugtechnik GmbH, 5980 Werdohl | Piezokeramische ventilplatte und verfahren zu deren herstellung |
| US4617952A (en) * | 1984-07-31 | 1986-10-21 | Yamatake-Honeywell Co. Limited | Switching valve and an electro-pneumatic pressure converter utilizing the same |
| SU1355823A1 (ru) * | 1985-08-30 | 1987-11-30 | Ленинградский Политехнический Институт Им.М.И.Калинина | Электродинамический клапан |
| JPS62246667A (ja) * | 1986-04-18 | 1987-10-27 | Ube Ind Ltd | 圧電バルブ及びその駆動方法 |
| JPS6412090A (en) * | 1987-07-02 | 1989-01-17 | Inoue Japax Res | Scroll pump |
| JPH02138501A (ja) * | 1988-11-17 | 1990-05-28 | Smc Corp | ノズルフラッパ機構 |
| DE3935474A1 (de) * | 1989-06-22 | 1991-01-03 | Hoechst Ceram Tec Ag | Piezoelektrischer biegewandler und seine verwendung |
| US5100100A (en) * | 1990-09-12 | 1992-03-31 | Mks Instruments, Inc. | Fluid control and shut off valve |
-
1991
- 1991-10-25 GB GB919122739A patent/GB9122739D0/en active Pending
-
1992
- 1992-10-23 NZ NZ244873A patent/NZ244873A/en not_active IP Right Cessation
- 1992-10-23 DK DK92309762.0T patent/DK0544405T3/da active
- 1992-10-23 CA CA002081290A patent/CA2081290C/en not_active Expired - Lifetime
- 1992-10-23 EP EP92309762A patent/EP0544405B1/en not_active Expired - Lifetime
- 1992-10-23 ES ES92309762T patent/ES2101810T3/es not_active Expired - Lifetime
- 1992-10-23 DE DE69218553T patent/DE69218553T2/de not_active Expired - Lifetime
- 1992-10-23 AT AT92309762T patent/ATE150857T1/de not_active IP Right Cessation
- 1992-10-23 US US07/965,337 patent/US5354032A/en not_active Expired - Lifetime
- 1992-10-26 KR KR1019920019777A patent/KR100202160B1/ko not_active Expired - Lifetime
- 1992-10-26 JP JP4287722A patent/JP2726788B2/ja not_active Expired - Lifetime
- 1992-12-08 TW TW081109844A patent/TW221480B/zh active
-
1997
- 1997-06-24 GR GR970401516T patent/GR3023873T3/el unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20109053U1 (de) * | 2001-05-30 | 2002-10-10 | Reich KG Regel- und Sicherheitstechnik, 35713 Eschenburg | Ventilvorrichtung und Verteilervorrichtung |
| DE202005021632U1 (de) | 2004-03-30 | 2009-03-05 | Bühner, Kurt | Mittels des inversen Piezoeffekts betätigter Antrieb |
| DE102005015765B4 (de) * | 2004-03-30 | 2011-06-22 | Kurt 73635 Bühner | Mittels des inversen Piezoeffekts betätigter Antrieb |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE150857T1 (de) | 1997-04-15 |
| DE69218553D1 (de) | 1997-04-30 |
| GR3023873T3 (en) | 1997-09-30 |
| CA2081290A1 (en) | 1993-04-26 |
| JP2726788B2 (ja) | 1998-03-11 |
| ES2101810T3 (es) | 1997-07-16 |
| TW221480B (cg-RX-API-DMAC10.html) | 1994-03-01 |
| JPH05203067A (ja) | 1993-08-10 |
| KR930008355A (ko) | 1993-05-21 |
| AU645714B2 (en) | 1994-01-20 |
| AU2732992A (en) | 1993-04-29 |
| EP0544405B1 (en) | 1997-03-26 |
| NZ244873A (en) | 1995-04-27 |
| KR100202160B1 (ko) | 1999-06-15 |
| EP0544405A1 (en) | 1993-06-02 |
| US5354032A (en) | 1994-10-11 |
| CA2081290C (en) | 1999-07-20 |
| GB9122739D0 (en) | 1991-12-11 |
| DK0544405T3 (da) | 1997-10-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8328 | Change in the person/name/address of the agent |
Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN |
|
| 8328 | Change in the person/name/address of the agent |
Representative=s name: GROSSE, SCHUMACHER, KNAUER, VON HIRSCHHAUSEN, 8033 |
|
| R071 | Expiry of right |
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