DE69213396D1 - Atomare Bewegungsdetektion im Subpicosekundenbereich und Signalübertragung - Google Patents
Atomare Bewegungsdetektion im Subpicosekundenbereich und SignalübertragungInfo
- Publication number
- DE69213396D1 DE69213396D1 DE69213396T DE69213396T DE69213396D1 DE 69213396 D1 DE69213396 D1 DE 69213396D1 DE 69213396 T DE69213396 T DE 69213396T DE 69213396 T DE69213396 T DE 69213396T DE 69213396 D1 DE69213396 D1 DE 69213396D1
- Authority
- DE
- Germany
- Prior art keywords
- signal transmission
- motion detection
- atomic motion
- subpicosecond range
- subpicosecond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 title 1
- 230000008054 signal transmission Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/285—Emission microscopes
- H01J2237/2852—Auto-emission (i.e. field-emission)
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/88—Manufacture, treatment, or detection of nanostructure with arrangement, process, or apparatus for testing
- Y10S977/881—Microscopy or spectroscopy, e.g. sem, tem
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/949—Radiation emitter using nanostructure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/953—Detector using nanostructure
- Y10S977/954—Of radiant energy
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/780,655 US5151594A (en) | 1991-10-18 | 1991-10-18 | Subpicosecond atomic and molecular motion detection and signal transmission by field emission |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69213396D1 true DE69213396D1 (de) | 1996-10-10 |
Family
ID=25120244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69213396T Expired - Lifetime DE69213396D1 (de) | 1991-10-18 | 1992-10-19 | Atomare Bewegungsdetektion im Subpicosekundenbereich und Signalübertragung |
Country Status (3)
Country | Link |
---|---|
US (1) | US5151594A (de) |
EP (1) | EP0543502B1 (de) |
DE (1) | DE69213396D1 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5675531A (en) * | 1995-04-05 | 1997-10-07 | International Business Machines Corporation | Device for information storage using field emission |
US7511280B2 (en) * | 2003-10-16 | 2009-03-31 | Alis Corporation | Ion sources, systems and methods |
US7488952B2 (en) * | 2003-10-16 | 2009-02-10 | Alis Corporation | Ion sources, systems and methods |
US7557360B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US20070228287A1 (en) * | 2006-03-20 | 2007-10-04 | Alis Technology Corporation | Systems and methods for a gas field ionization source |
US7557359B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7518122B2 (en) * | 2003-10-16 | 2009-04-14 | Alis Corporation | Ion sources, systems and methods |
US9159527B2 (en) | 2003-10-16 | 2015-10-13 | Carl Zeiss Microscopy, Llc | Systems and methods for a gas field ionization source |
US7368727B2 (en) | 2003-10-16 | 2008-05-06 | Alis Technology Corporation | Atomic level ion source and method of manufacture and operation |
US7554097B2 (en) * | 2003-10-16 | 2009-06-30 | Alis Corporation | Ion sources, systems and methods |
US8110814B2 (en) | 2003-10-16 | 2012-02-07 | Alis Corporation | Ion sources, systems and methods |
US7485873B2 (en) * | 2003-10-16 | 2009-02-03 | Alis Corporation | Ion sources, systems and methods |
US7511279B2 (en) * | 2003-10-16 | 2009-03-31 | Alis Corporation | Ion sources, systems and methods |
US7601953B2 (en) | 2006-03-20 | 2009-10-13 | Alis Corporation | Systems and methods for a gas field ion microscope |
US7521693B2 (en) * | 2003-10-16 | 2009-04-21 | Alis Corporation | Ion sources, systems and methods |
US7495232B2 (en) * | 2003-10-16 | 2009-02-24 | Alis Corporation | Ion sources, systems and methods |
US7557361B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7554096B2 (en) * | 2003-10-16 | 2009-06-30 | Alis Corporation | Ion sources, systems and methods |
US7557358B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7786451B2 (en) * | 2003-10-16 | 2010-08-31 | Alis Corporation | Ion sources, systems and methods |
US7786452B2 (en) * | 2003-10-16 | 2010-08-31 | Alis Corporation | Ion sources, systems and methods |
US7504639B2 (en) * | 2003-10-16 | 2009-03-17 | Alis Corporation | Ion sources, systems and methods |
WO2007067296A2 (en) * | 2005-12-02 | 2007-06-14 | Alis Corporation | Ion sources, systems and methods |
WO2007109666A2 (en) * | 2006-03-20 | 2007-09-27 | Alis Corporation | Systems and methods for a helium ion pump |
US7804068B2 (en) * | 2006-11-15 | 2010-09-28 | Alis Corporation | Determining dopant information |
US7921465B2 (en) * | 2008-08-14 | 2011-04-05 | Texas Instruments Incorporated | Nanotip repair and characterization using field ion microscopy |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2284978A1 (fr) * | 1974-09-13 | 1976-04-09 | Commissariat Energie Atomique | Tube convertisseur d'images a balayage de fente |
-
1991
- 1991-10-18 US US07/780,655 patent/US5151594A/en not_active Expired - Fee Related
-
1992
- 1992-10-19 EP EP92309510A patent/EP0543502B1/de not_active Expired - Lifetime
- 1992-10-19 DE DE69213396T patent/DE69213396D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5151594A (en) | 1992-09-29 |
EP0543502A1 (de) | 1993-05-26 |
EP0543502B1 (de) | 1996-09-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |