DE69201726D1 - Optisch integrierte, interferometrische messvorrichtung. - Google Patents

Optisch integrierte, interferometrische messvorrichtung.

Info

Publication number
DE69201726D1
DE69201726D1 DE69201726T DE69201726T DE69201726D1 DE 69201726 D1 DE69201726 D1 DE 69201726D1 DE 69201726 T DE69201726 T DE 69201726T DE 69201726 T DE69201726 T DE 69201726T DE 69201726 D1 DE69201726 D1 DE 69201726D1
Authority
DE
Germany
Prior art keywords
measuring device
interferometric measuring
optically integrated
optically
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69201726T
Other languages
English (en)
Other versions
DE69201726T2 (de
Inventor
Pierre Gidon
Serge Valette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69201726D1 publication Critical patent/DE69201726D1/de
Application granted granted Critical
Publication of DE69201726T2 publication Critical patent/DE69201726T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0226—Fibres
    • G01J2009/023—Fibres of the integrated optical type
DE69201726T 1991-05-21 1992-05-20 Optisch integrierte, interferometrische messvorrichtung. Expired - Fee Related DE69201726T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9106100A FR2676808B1 (fr) 1991-05-21 1991-05-21 Dispositif de mesure d'une caracteristique d'un objet en optique integree, par interferometrie.
PCT/FR1992/000449 WO1992020990A1 (fr) 1991-05-21 1992-05-20 Dispositif de mesure interferometrique en optique integree

Publications (2)

Publication Number Publication Date
DE69201726D1 true DE69201726D1 (de) 1995-04-20
DE69201726T2 DE69201726T2 (de) 1995-10-19

Family

ID=9412949

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69201726T Expired - Fee Related DE69201726T2 (de) 1991-05-21 1992-05-20 Optisch integrierte, interferometrische messvorrichtung.

Country Status (6)

Country Link
EP (1) EP0585333B1 (de)
JP (1) JPH06507711A (de)
CA (1) CA2102593A1 (de)
DE (1) DE69201726T2 (de)
FR (1) FR2676808B1 (de)
WO (1) WO1992020990A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2699269B1 (fr) * 1992-12-10 1995-01-13 Merlin Gerin Dispositif de mesure interferrométrique.
FR2725788B1 (fr) * 1994-10-12 1997-01-17 Schneider Electric Sa Refractometre a fibre optique realise en optique guidee
FR2730563B1 (fr) * 1995-02-15 1997-04-04 Schneider Electric Sa Dispositif interferometrique de detection
FR2812408B1 (fr) 2000-07-27 2003-10-03 Cit Alcatel Dispositif modulaire de recombinaison interferometrique et separateur de faisceau permettant de le constituer
FR2817040B1 (fr) * 2000-11-22 2004-06-25 Nanotec Solution Systeme optique et procede de mesure interferometrique a haute cadence, et circuit d'optique intergree mis en oeuvre dans le procede
CN104535089B (zh) * 2014-12-15 2017-12-19 哈尔滨工程大学 一种具有光程可调功能的杨氏光纤白光干涉解调仪

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2613826B1 (fr) * 1987-04-07 1990-10-26 Commissariat Energie Atomique Capteur de deplacement en optique integree
FR2638847B1 (fr) * 1988-11-04 1990-12-14 Commissariat Energie Atomique Dispositif optique integre pour la mesure d'indice de refraction d'un fluide
AT392537B (de) * 1989-03-21 1991-04-25 Tabarelli Werner Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles
DE3911474A1 (de) * 1989-04-08 1990-10-25 Kerner Anna Interferometer in wellenleiter-technologie

Also Published As

Publication number Publication date
CA2102593A1 (fr) 1992-11-22
FR2676808A1 (fr) 1992-11-27
FR2676808B1 (fr) 1993-08-13
JPH06507711A (ja) 1994-09-01
WO1992020990A1 (fr) 1992-11-26
EP0585333B1 (de) 1995-03-15
EP0585333A1 (de) 1994-03-09
DE69201726T2 (de) 1995-10-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee