FR2817040B1 - Systeme optique et procede de mesure interferometrique a haute cadence, et circuit d'optique intergree mis en oeuvre dans le procede - Google Patents

Systeme optique et procede de mesure interferometrique a haute cadence, et circuit d'optique intergree mis en oeuvre dans le procede

Info

Publication number
FR2817040B1
FR2817040B1 FR0015097A FR0015097A FR2817040B1 FR 2817040 B1 FR2817040 B1 FR 2817040B1 FR 0015097 A FR0015097 A FR 0015097A FR 0015097 A FR0015097 A FR 0015097A FR 2817040 B1 FR2817040 B1 FR 2817040B1
Authority
FR
France
Prior art keywords
throughput
circuit implemented
optical system
interferometric measurement
measurement method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0015097A
Other languages
English (en)
Other versions
FR2817040A1 (fr
Inventor
Philippe Nerin
Alain Courteville
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fogale Nanotech SA
Original Assignee
Nanotec Solution SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanotec Solution SAS filed Critical Nanotec Solution SAS
Priority to FR0015097A priority Critical patent/FR2817040B1/fr
Publication of FR2817040A1 publication Critical patent/FR2817040A1/fr
Application granted granted Critical
Publication of FR2817040B1 publication Critical patent/FR2817040B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0226—Fibres

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FR0015097A 2000-11-22 2000-11-22 Systeme optique et procede de mesure interferometrique a haute cadence, et circuit d'optique intergree mis en oeuvre dans le procede Expired - Lifetime FR2817040B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0015097A FR2817040B1 (fr) 2000-11-22 2000-11-22 Systeme optique et procede de mesure interferometrique a haute cadence, et circuit d'optique intergree mis en oeuvre dans le procede

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0015097A FR2817040B1 (fr) 2000-11-22 2000-11-22 Systeme optique et procede de mesure interferometrique a haute cadence, et circuit d'optique intergree mis en oeuvre dans le procede

Publications (2)

Publication Number Publication Date
FR2817040A1 FR2817040A1 (fr) 2002-05-24
FR2817040B1 true FR2817040B1 (fr) 2004-06-25

Family

ID=8856773

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0015097A Expired - Lifetime FR2817040B1 (fr) 2000-11-22 2000-11-22 Systeme optique et procede de mesure interferometrique a haute cadence, et circuit d'optique intergree mis en oeuvre dans le procede

Country Status (1)

Country Link
FR (1) FR2817040B1 (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2676808B1 (fr) * 1991-05-21 1993-08-13 Commissariat Energie Atomique Dispositif de mesure d'une caracteristique d'un objet en optique integree, par interferometrie.

Also Published As

Publication number Publication date
FR2817040A1 (fr) 2002-05-24

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Legal Events

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PLFP Fee payment

Year of fee payment: 16

PLFP Fee payment

Year of fee payment: 17

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Year of fee payment: 18

TP Transmission of property

Owner name: FOGALE NANOTECH, FR

Effective date: 20180330

PLFP Fee payment

Year of fee payment: 20