DE69133142T2 - Reflektor mit passiver Temperaturkompensation - Google Patents

Reflektor mit passiver Temperaturkompensation

Info

Publication number
DE69133142T2
DE69133142T2 DE1991633142 DE69133142T DE69133142T2 DE 69133142 T2 DE69133142 T2 DE 69133142T2 DE 1991633142 DE1991633142 DE 1991633142 DE 69133142 T DE69133142 T DE 69133142T DE 69133142 T2 DE69133142 T2 DE 69133142T2
Authority
DE
Germany
Prior art keywords
temperature compensation
passive temperature
compensation reflector
reflector
passive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1991633142
Other languages
English (en)
Other versions
DE69133142D1 (de
Inventor
Aki Sasaki
Izumi Mikami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3035270A external-priority patent/JP2641331B2/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE69133142D1 publication Critical patent/DE69133142D1/de
Publication of DE69133142T2 publication Critical patent/DE69133142T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Aerials With Secondary Devices (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE1991633142 1990-08-15 1991-08-14 Reflektor mit passiver Temperaturkompensation Expired - Fee Related DE69133142T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP21551090 1990-08-15
JP32424490 1990-11-26
JP3035270A JP2641331B2 (ja) 1990-08-15 1991-02-05 反射鏡アンテナ方法

Publications (2)

Publication Number Publication Date
DE69133142D1 DE69133142D1 (de) 2002-12-12
DE69133142T2 true DE69133142T2 (de) 2003-07-24

Family

ID=27288707

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1991623098 Expired - Fee Related DE69123098T2 (de) 1990-08-15 1991-08-14 Reflektor mit passiver und aktiver Temperaturkompensation
DE1991633142 Expired - Fee Related DE69133142T2 (de) 1990-08-15 1991-08-14 Reflektor mit passiver Temperaturkompensation

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE1991623098 Expired - Fee Related DE69123098T2 (de) 1990-08-15 1991-08-14 Reflektor mit passiver und aktiver Temperaturkompensation

Country Status (2)

Country Link
EP (1) EP0471362B1 (de)
DE (2) DE69123098T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006025413B4 (de) * 2005-11-02 2012-06-21 Mitsubishi Denki K.K. Teleskopsystem

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2871918B2 (ja) * 1991-11-01 1999-03-17 三菱電機株式会社 反射鏡の生産方法
IT1254368B (it) * 1992-05-13 1995-09-14 Enea Ente Nuove Tec Procedimento e dispositivo per la produzione di specchi a geometria variabile, destinati ad essere utilizzati nei laser ad elettroni liberi e convenzionali.
FR2751760B1 (fr) * 1996-07-26 1998-09-25 Giat Ind Sa Procede pour corriger la surface d'onde d'un faisceau optique au moyen d'un miroir deformable, et miroir pour la mise en oeuvre du procede
DE10115914A1 (de) 2001-03-30 2002-10-02 Zeiss Carl Vorrichtung zur Lagerung eines optischen Elementes in einer Optik
DE10115915A1 (de) 2001-03-30 2002-10-02 Zeiss Carl Vorrichtung zur Justierung von Einrichtungen und zum Einstellen von Verstellwegen
CN106299722B (zh) * 2016-08-22 2019-01-18 西安电子科技大学 面向抛物面的大型赋形面天线主动面板调整量的快速确定方法
CN108666766B (zh) * 2018-05-11 2020-06-09 中国电子科技集团公司第五十四研究所 大口径反射面天线结构变形对电性能影响的快速计算方法
DE102022116700A1 (de) * 2022-07-05 2024-01-11 Carl Zeiss Smt Gmbh Optische Baugruppe, Projektionsbelichtungsanlage für die Halbleiterlithographie und Verfahren

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54115070A (en) * 1978-02-28 1979-09-07 Mitsubishi Electric Corp Manufacture for semiconductor element
JPS57118077A (en) * 1981-01-06 1982-07-22 Central Glass Co Ltd Manufacture of glazed ceramic substrate
US4875765A (en) * 1988-07-29 1989-10-24 Eastman Kodak Company Method for correction of distortions of a mirror

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006025413B4 (de) * 2005-11-02 2012-06-21 Mitsubishi Denki K.K. Teleskopsystem

Also Published As

Publication number Publication date
DE69123098D1 (de) 1996-12-19
EP0471362B1 (de) 1996-11-13
EP0471362A3 (en) 1992-07-01
DE69123098T2 (de) 1997-03-06
DE69133142D1 (de) 2002-12-12
EP0471362A2 (de) 1992-02-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee