DE69130913T2 - Source of highly charged ions with polarizable sample and with electron cyclotron resonance - Google Patents

Source of highly charged ions with polarizable sample and with electron cyclotron resonance

Info

Publication number
DE69130913T2
DE69130913T2 DE1991630913 DE69130913T DE69130913T2 DE 69130913 T2 DE69130913 T2 DE 69130913T2 DE 1991630913 DE1991630913 DE 1991630913 DE 69130913 T DE69130913 T DE 69130913T DE 69130913 T2 DE69130913 T2 DE 69130913T2
Authority
DE
Germany
Prior art keywords
polarizable
sample
source
charged ions
cyclotron resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1991630913
Other languages
German (de)
Other versions
DE69130913D1 (en
Inventor
Paul Briand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69130913D1 publication Critical patent/DE69130913D1/en
Publication of DE69130913T2 publication Critical patent/DE69130913T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
DE1991630913 1990-10-25 1991-10-23 Source of highly charged ions with polarizable sample and with electron cyclotron resonance Expired - Fee Related DE69130913T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9013232A FR2668642B1 (en) 1990-10-25 1990-10-25 HIGHLY CHARGED ION SOURCE WITH POLARIZABLE PROBE AND ELECTRONIC CYCLOTRON RESONANCE.

Publications (2)

Publication Number Publication Date
DE69130913D1 DE69130913D1 (en) 1999-04-01
DE69130913T2 true DE69130913T2 (en) 1999-09-09

Family

ID=9401556

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991630913 Expired - Fee Related DE69130913T2 (en) 1990-10-25 1991-10-23 Source of highly charged ions with polarizable sample and with electron cyclotron resonance

Country Status (4)

Country Link
EP (1) EP0483004B1 (en)
JP (1) JPH0589792A (en)
DE (1) DE69130913T2 (en)
FR (1) FR2668642B1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4419970A1 (en) * 1994-06-08 1995-12-21 Juergen Prof Dr Andrae Highly charged ion beam generator
FR2757310B1 (en) * 1996-12-18 2006-06-02 Commissariat Energie Atomique MAGNETIC SYSTEM, ESPECIALLY FOR ECR SOURCES, ALLOWING THE CREATION OF CLOSED EQUIMODULE B SURFACES OF ANY SHAPE AND DIMENSIONS
FR2757881B1 (en) * 1996-12-31 1999-04-09 Univ Paris Curie PROCESS FOR TREATING A SURFACE OF A SEMICONDUCTOR, CORRESPONDING DEVICE AND ASSOCIATED SEMICONDUCTOR
FR2933532B1 (en) * 2008-07-02 2010-09-03 Commissariat Energie Atomique ELECTRONIC CYCLOTRON RESONANCE ION GENERATING DEVICE
RU2538764C2 (en) * 2013-01-09 2015-01-10 Федеральное государственное бюджетное учреждение "Государственный научный центр Российской Федерации-Институт Теоретической и Экспериментальной Физики" Laser-plasma high-charge ion generator

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2475798A1 (en) * 1980-02-13 1981-08-14 Commissariat Energie Atomique METHOD AND DEVICE FOR PRODUCING HIGHLY CHARGED HEAVY IONS AND AN APPLICATION USING THE METHOD
FR2580427B1 (en) * 1985-04-11 1987-05-15 Commissariat Energie Atomique SOURCE OF NEGATIVE IONS WITH ELECTRON CYCLOTRON RESONANCE

Also Published As

Publication number Publication date
FR2668642A1 (en) 1992-04-30
EP0483004A1 (en) 1992-04-29
JPH0589792A (en) 1993-04-09
DE69130913D1 (en) 1999-04-01
EP0483004B1 (en) 1999-02-24
FR2668642B1 (en) 1993-11-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee