DE69128045D1 - Vor Umwelteinflüssen geschützte integrierte optische Komponente und Verfahren zu ihrer Herstellung - Google Patents

Vor Umwelteinflüssen geschützte integrierte optische Komponente und Verfahren zu ihrer Herstellung

Info

Publication number
DE69128045D1
DE69128045D1 DE69128045T DE69128045T DE69128045D1 DE 69128045 D1 DE69128045 D1 DE 69128045D1 DE 69128045 T DE69128045 T DE 69128045T DE 69128045 T DE69128045 T DE 69128045T DE 69128045 D1 DE69128045 D1 DE 69128045D1
Authority
DE
Germany
Prior art keywords
production
optical component
integrated optical
environmental influences
component protected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69128045T
Other languages
English (en)
Other versions
DE69128045T2 (de
Inventor
Adeline Fournier
Pierre Gidon
Serge Valette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69128045D1 publication Critical patent/DE69128045D1/de
Application granted granted Critical
Publication of DE69128045T2 publication Critical patent/DE69128045T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S385/00—Optical waveguides
    • Y10S385/901—Illuminating or display apparatus

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
DE69128045T 1990-04-03 1991-04-02 Vor Umwelteinflüssen geschützte integrierte optische Komponente und Verfahren zu ihrer Herstellung Expired - Fee Related DE69128045T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9004255A FR2660440B1 (fr) 1990-04-03 1990-04-03 Composant optique integre protege contre l'environnement et son procede de fabrication.

Publications (2)

Publication Number Publication Date
DE69128045D1 true DE69128045D1 (de) 1997-12-04
DE69128045T2 DE69128045T2 (de) 1998-04-23

Family

ID=9395403

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69128045T Expired - Fee Related DE69128045T2 (de) 1990-04-03 1991-04-02 Vor Umwelteinflüssen geschützte integrierte optische Komponente und Verfahren zu ihrer Herstellung

Country Status (6)

Country Link
US (1) US5210801A (de)
EP (1) EP0451047B1 (de)
JP (1) JPH04230708A (de)
CA (1) CA2039526A1 (de)
DE (1) DE69128045T2 (de)
FR (1) FR2660440B1 (de)

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US5289308A (en) * 1991-12-20 1994-02-22 Akzo N.V. Method of making a frequency doubling structure in an optically non-linear medium
DE4200396C1 (de) * 1992-01-10 1993-02-04 Imm Institut Fuer Mikrotechnik Gmbh, 6500 Mainz, De
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US5253319A (en) * 1992-02-24 1993-10-12 Corning Incorporated Planar optical waveguides with planar optical elements
US5356722A (en) * 1992-06-10 1994-10-18 Applied Materials, Inc. Method for depositing ozone/TEOS silicon oxide films of reduced surface sensitivity
US6229945B1 (en) * 1992-06-24 2001-05-08 British Telecommunications Public Limited Company Photo induced grating in B2O3 containing glass
SG125045A1 (en) * 1992-06-24 2006-09-29 British Telecomm Optical device including refractive index modulation
DE4231113A1 (de) * 1992-09-17 1994-03-24 Bosch Gmbh Robert Integriert optische Schaltung mit einer Bragg-Struktur
US5917625A (en) * 1993-09-09 1999-06-29 Kabushiki Kaisha Toshiba High resolution optical multiplexing and demultiplexing device in optical communication system
FR2716012B1 (fr) * 1994-02-09 1996-04-12 Corning Inc Procédé et dispositif d'assemblage d'extrémités de fibres optiques disposées en nappe.
US5503902A (en) * 1994-03-02 1996-04-02 Applied Physics Research, L.P. Light control material
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US5600483A (en) * 1994-05-10 1997-02-04 Massachusetts Institute Of Technology Three-dimensional periodic dielectric structures having photonic bandgaps
US5440421A (en) * 1994-05-10 1995-08-08 Massachusetts Institute Of Technology Three-dimensional periodic dielectric structures having photonic bandgaps
US5500916A (en) * 1994-09-09 1996-03-19 At&T Corp. Method for making Bragg reflectors for waveguides
JPH10506756A (ja) * 1994-10-05 1998-06-30 マサチューセッツ インスティトゥート オブ テクノロジー 一次元周期誘導体導波路を使用する共振微小空洞
US5784400A (en) * 1995-02-28 1998-07-21 Massachusetts Institute Of Technology Resonant cavities employing two dimensionally periodic dielectric materials
US5732168A (en) * 1995-10-31 1998-03-24 Hewlett Packard Company Thermal optical switches for light
JP3929495B2 (ja) * 1996-01-18 2007-06-13 ブリティッシュ・テレコミュニケーションズ・パブリック・リミテッド・カンパニー 光感応性屈折率クラッドを備えた光導波路
FR2748328B1 (fr) * 1996-05-02 1998-07-31 Loisel Bertrand Guide optique a reseau de bragg et a coeur en silice
US5699462A (en) * 1996-06-14 1997-12-16 Hewlett-Packard Company Total internal reflection optical switches employing thermal activation
US6149974A (en) * 1997-05-05 2000-11-21 Applied Materials, Inc. Method for elimination of TEOS/ozone silicon oxide surface sensitivity
FR2765347B1 (fr) * 1997-06-26 1999-09-24 Alsthom Cge Alcatel Reflecteur de bragg en semi-conducteur et procede de fabrication
JPH11194237A (ja) * 1997-12-26 1999-07-21 Nec Corp 光導波路とその製造方法及び光導波路と受光素子の結合構造
JPH11237514A (ja) * 1998-02-20 1999-08-31 Shin Etsu Chem Co Ltd グレーティング用光ファイバ、グレーティング用光ファイバ母材およびその光ファイバ母材の製造方法
FR2779835A1 (fr) * 1998-06-11 1999-12-17 Centre Nat Rech Scient Dispositif de diffraction de lumiere enfoui dans un materiau
US6396988B1 (en) * 1999-08-13 2002-05-28 Nec Corporation Optical waveguide device and method of forming the same
US6408125B1 (en) 1999-11-10 2002-06-18 Corning Incorporated Germanium silicon oxynitride high index films for planar waveguides
EP1116967A1 (de) * 2000-01-13 2001-07-18 Contraves Space AG Lichtwellenleiterkoppler
ATE338736T1 (de) * 2000-09-29 2006-09-15 Schott Ag Optisches substrat sowie ein verahren zur herstellung optischer substrate
WO2002048765A1 (en) * 2000-12-14 2002-06-20 Bookham Technology Plc Integrated optical devices
US6532319B2 (en) * 2000-12-18 2003-03-11 Agilent Technologies, Inc. Ceramic substrate for photonic switching system
US6787868B1 (en) 2001-09-25 2004-09-07 Lightwave Microsystems Corporation Microlenses for integrated optical devices
US6798939B2 (en) * 2002-03-14 2004-09-28 Agilent Technologies, Inc. Bubble stability in an optical switch
EP1506440A4 (de) * 2002-05-17 2005-08-10 Nanoventions Inc Planarer optischer wellenleiter
US6709969B1 (en) * 2002-12-19 2004-03-23 Mark E. Murray Method for fabricating a gas insulated gate field effect transistor
US7349612B2 (en) * 2003-01-28 2008-03-25 Nippon Sheet Glass Company, Limited Optical element, optical circuit provided with the optical element, and method for producing the optical element
US7206480B2 (en) * 2003-08-01 2007-04-17 Bae Systems Information And Electronic Systems Integration Inc. Method of forming interlayer connections in integrated optical circuits, and devices formed using same
US20070189669A1 (en) * 2004-07-22 2007-08-16 Maurizio Tormen Integrated wavelength selective grating-based filter
ITRM20040445A1 (it) * 2004-09-17 2004-12-17 St Microelectronics Srl Processo per scavare trincee in un dispositivo ottico integrato.
JP2006337748A (ja) * 2005-06-02 2006-12-14 Fuji Xerox Co Ltd 光導波路及びその製造方法
US20070154156A1 (en) * 2005-12-30 2007-07-05 Gary Brist Imprinted waveguide printed circuit board structure
US7561773B2 (en) * 2006-06-19 2009-07-14 Fuji Xerox Co., Ltd. Optical waveguide, method of manufacturing the same and optical communication module
JP2008020722A (ja) * 2006-07-13 2008-01-31 Fuji Xerox Co Ltd 光導波路及びその製造方法
JP2009145867A (ja) * 2007-11-22 2009-07-02 Sumitomo Bakelite Co Ltd 光導波路、光導波路モジュールおよび光素子実装基板
WO2010023976A1 (ja) * 2008-08-26 2010-03-04 住友ベークライト株式会社 光導波路、光導波路モジュールおよび光素子実装基板
US11726332B2 (en) 2009-04-27 2023-08-15 Digilens Inc. Diffractive projection apparatus
JP2010049280A (ja) * 2009-11-25 2010-03-04 Seiko Epson Corp 偏光素子の製造方法
WO2016020630A2 (en) 2014-08-08 2016-02-11 Milan Momcilo Popovich Waveguide laser illuminator incorporating a despeckler
US9933684B2 (en) * 2012-11-16 2018-04-03 Rockwell Collins, Inc. Transparent waveguide display providing upper and lower fields of view having a specific light output aperture configuration
US10241330B2 (en) 2014-09-19 2019-03-26 Digilens, Inc. Method and apparatus for generating input images for holographic waveguide displays
CN107873086B (zh) 2015-01-12 2020-03-20 迪吉伦斯公司 环境隔离的波导显示器
US9632226B2 (en) 2015-02-12 2017-04-25 Digilens Inc. Waveguide grating device
CN108474945B (zh) 2015-10-05 2021-10-01 迪吉伦斯公司 波导显示器
US10416380B1 (en) * 2016-06-23 2019-09-17 Acacia Communications, Inc. Suspended photonic waveguides with top side sealing
US10545346B2 (en) 2017-01-05 2020-01-28 Digilens Inc. Wearable heads up displays
WO2020168348A1 (en) 2019-02-15 2020-08-20 Digilens Inc. Methods and apparatuses for providing a holographic waveguide display using integrated gratings
CN114207492A (zh) 2019-06-07 2022-03-18 迪吉伦斯公司 带透射光栅和反射光栅的波导及其生产方法
KR20220054386A (ko) 2019-08-29 2022-05-02 디지렌즈 인코포레이티드. 진공 브래그 격자 및 이의 제조 방법

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7706786U1 (de) * 1977-03-05 1977-06-08 Jenaer Glaswerk Schott & Gen., 6500 Mainz Lichtleitfaser mit querlicht
FR2579044B1 (fr) * 1985-03-13 1988-02-26 Commissariat Energie Atomique Dispositif de multiplexage de plusieurs signaux lumineux en optique integree
GB8516108D0 (en) * 1985-06-26 1985-07-31 Gen Electric Co Plc Optical switch
JPS6294823A (ja) * 1985-10-22 1987-05-01 Nippon Telegr & Teleph Corp <Ntt> 導波形光変調器
FR2613826B1 (fr) * 1987-04-07 1990-10-26 Commissariat Energie Atomique Capteur de deplacement en optique integree
US4888785A (en) * 1988-01-19 1989-12-19 Bell Communications Research, Inc. Miniature integrated optical beam splitter
US4932743A (en) * 1988-04-18 1990-06-12 Ricoh Company, Ltd. Optical waveguide device
US5074629A (en) * 1988-10-26 1991-12-24 Stanford University Integrated variable focal length lens and its applications
US4961617A (en) * 1989-07-19 1990-10-09 Ferrydon Shahidi Fibre optic waveguide illuminating elements
US4988157A (en) * 1990-03-08 1991-01-29 Bell Communications Research, Inc. Optical switch using bubbles

Also Published As

Publication number Publication date
EP0451047A1 (de) 1991-10-09
US5210801A (en) 1993-05-11
JPH04230708A (ja) 1992-08-19
DE69128045T2 (de) 1998-04-23
FR2660440B1 (fr) 1992-10-16
FR2660440A1 (fr) 1991-10-04
CA2039526A1 (en) 1991-10-04
EP0451047B1 (de) 1997-10-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee