DE69127223T2 - Verfahren und Vorrichtung zur Positionsdetektion - Google Patents

Verfahren und Vorrichtung zur Positionsdetektion

Info

Publication number
DE69127223T2
DE69127223T2 DE1991627223 DE69127223T DE69127223T2 DE 69127223 T2 DE69127223 T2 DE 69127223T2 DE 1991627223 DE1991627223 DE 1991627223 DE 69127223 T DE69127223 T DE 69127223T DE 69127223 T2 DE69127223 T2 DE 69127223T2
Authority
DE
Germany
Prior art keywords
position detection
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1991627223
Other languages
English (en)
Other versions
DE69127223D1 (de
Inventor
Shigeyuki Suda
Kenji Saitoh
Minoru Yoshii
Noriyuki Nose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2115447A external-priority patent/JP2910151B2/ja
Priority claimed from JP2143869A external-priority patent/JP2906585B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69127223D1 publication Critical patent/DE69127223D1/de
Publication of DE69127223T2 publication Critical patent/DE69127223T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE1991627223 1990-05-01 1991-04-29 Verfahren und Vorrichtung zur Positionsdetektion Expired - Fee Related DE69127223T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2115447A JP2910151B2 (ja) 1990-05-01 1990-05-01 位置検出装置
JP2143869A JP2906585B2 (ja) 1990-06-01 1990-06-01 位置検出方法

Publications (2)

Publication Number Publication Date
DE69127223D1 DE69127223D1 (de) 1997-09-18
DE69127223T2 true DE69127223T2 (de) 1997-12-04

Family

ID=26453947

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991627223 Expired - Fee Related DE69127223T2 (de) 1990-05-01 1991-04-29 Verfahren und Vorrichtung zur Positionsdetektion

Country Status (2)

Country Link
EP (1) EP0455446B1 (de)
DE (1) DE69127223T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5798195A (en) * 1993-09-24 1998-08-25 Nikon Corporation Stepping accuracy measuring method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0810124B2 (ja) * 1987-07-03 1996-01-31 株式会社ニコン 露光装置
JP2676933B2 (ja) * 1988-09-05 1997-11-17 キヤノン株式会社 位置検出装置

Also Published As

Publication number Publication date
EP0455446A2 (de) 1991-11-06
DE69127223D1 (de) 1997-09-18
EP0455446A3 (en) 1992-07-08
EP0455446B1 (de) 1997-08-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee