DE69117500D1 - Differentialkondensatormessumformer - Google Patents

Differentialkondensatormessumformer

Info

Publication number
DE69117500D1
DE69117500D1 DE69117500T DE69117500T DE69117500D1 DE 69117500 D1 DE69117500 D1 DE 69117500D1 DE 69117500 T DE69117500 T DE 69117500T DE 69117500 T DE69117500 T DE 69117500T DE 69117500 D1 DE69117500 D1 DE 69117500D1
Authority
DE
Germany
Prior art keywords
differential capacitor
capacitor transmitter
transmitter
differential
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69117500T
Other languages
English (en)
Other versions
DE69117500T2 (de
Inventor
L Wilner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meggitt Orange County Inc
Original Assignee
Endevco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endevco Corp filed Critical Endevco Corp
Application granted granted Critical
Publication of DE69117500D1 publication Critical patent/DE69117500D1/de
Publication of DE69117500T2 publication Critical patent/DE69117500T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE69117500T 1990-03-08 1991-03-06 Differentialkondensatormessumformer Expired - Fee Related DE69117500T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/491,132 US4999735A (en) 1990-03-08 1990-03-08 Differential capacitive transducer and method of making
PCT/US1991/001562 WO1991014185A1 (en) 1990-03-08 1991-03-06 Differential capacitive transducer and method of making

Publications (2)

Publication Number Publication Date
DE69117500D1 true DE69117500D1 (de) 1996-04-04
DE69117500T2 DE69117500T2 (de) 1997-02-27

Family

ID=23950927

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69117500T Expired - Fee Related DE69117500T2 (de) 1990-03-08 1991-03-06 Differentialkondensatormessumformer

Country Status (4)

Country Link
US (1) US4999735A (de)
EP (2) EP0644427A1 (de)
DE (1) DE69117500T2 (de)
WO (1) WO1991014185A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4107185C1 (de) * 1991-03-06 1992-06-11 Mercedes-Benz Aktiengesellschaft, 7000 Stuttgart, De
JP2804196B2 (ja) * 1991-10-18 1998-09-24 株式会社日立製作所 マイクロセンサ及びそれを用いた制御システム
DE69332486T2 (de) * 1992-02-17 2003-10-02 Hitachi, Ltd. Fahrschalter zum Steuern eines sich bewegenden Objektes, Verfahren zum Steuern diese Objektes und hierfür verwendeter Sensor
FR2694403B1 (fr) * 1992-07-31 1994-10-07 Sagem Accéléromètre pendulaire électrostatique à électrode de test et procédé de fabrication d'un tel accéléromètre.
FR2700012B1 (fr) * 1992-12-28 1995-03-03 Commissariat Energie Atomique Accéléromètre intégré à axe sensible parallèle au substrat.
US5503285A (en) * 1993-07-26 1996-04-02 Litton Systems, Inc. Method for forming an electrostatically force balanced silicon accelerometer
DE4332843C2 (de) * 1993-09-27 1997-04-24 Siemens Ag Verfahren zur Herstellung einer mikromechanischen Vorrichtung und mikromechanische Vorrichtung
US5456111A (en) * 1994-01-24 1995-10-10 Alliedsignal Inc. Capacitive drive vibrating beam accelerometer
GB9426363D0 (en) * 1994-12-29 1995-03-01 Lynxvale Ltd A micromechanical accelerometer
DE59607318D1 (de) * 1995-01-24 2001-08-23 Infineon Technologies Ag Mikromechanisches bauelement
FR2734057B1 (fr) * 1995-05-11 1997-06-20 Suisse Electronique Microtech Capteur accelerometrique capacitif miniature
FR2736934B1 (fr) * 1995-07-21 1997-08-22 Commissariat Energie Atomique Procede de fabrication d'une structure avec une couche utile maintenue a distance d'un substrat par des butees, et de desolidarisation d'une telle couche
US5694740A (en) * 1996-03-15 1997-12-09 Analog Devices, Inc. Micromachined device packaged to reduce stiction
US6871544B1 (en) * 1999-03-17 2005-03-29 Input/Output, Inc. Sensor design and process
EP1169657A4 (de) * 1999-03-17 2003-03-05 Input Output Inc Eichung von sensoren.
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
US6571628B1 (en) * 2000-10-16 2003-06-03 Institute Of Microelectronics Z-axis accelerometer
US6538798B2 (en) * 2000-12-11 2003-03-25 Axsun Technologies, Inc. Process for fabricating stiction control bumps on optical membrane via conformal coating of etch holes
US7687126B2 (en) 2005-08-22 2010-03-30 3M Innovative Properties Company Adhesive articles and release liners
US8079262B2 (en) * 2007-10-26 2011-12-20 Rosemount Aerospace Inc. Pendulous accelerometer with balanced gas damping
US7736931B1 (en) 2009-07-20 2010-06-15 Rosemount Aerospace Inc. Wafer process flow for a high performance MEMS accelerometer
US20120085170A1 (en) * 2010-10-07 2012-04-12 Letterneau James C Shock Resistant Mounting for High G Shock Accelerometer
US8656778B2 (en) 2010-12-30 2014-02-25 Rosemount Aerospace Inc. In-plane capacitive mems accelerometer
JP2013181884A (ja) * 2012-03-02 2013-09-12 Panasonic Corp 静電容量式センサ
JP2016099224A (ja) * 2014-11-21 2016-05-30 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6893179B2 (ja) 2015-06-11 2021-06-23 ジョージア テック リサーチ コーポレイション 直交同調ための傾斜電極を有するｍｅｍｓ慣性測定装置
JP7225817B2 (ja) * 2019-01-17 2023-02-21 セイコーエプソン株式会社 角速度センサー、慣性計測装置、電子機器および移動体
US10775247B1 (en) 2019-09-16 2020-09-15 Vishal Khosla Capacitive shift-force sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4606228A (en) * 1985-01-07 1986-08-19 General Signal Corporation Diaphragm for transducer measuring low pressure differentials
US4812199A (en) * 1987-12-21 1989-03-14 Ford Motor Company Rectilinearly deflectable element fabricated from a single wafer
US4825335A (en) * 1988-03-14 1989-04-25 Endevco Corporation Differential capacitive transducer and method of making
US4808549A (en) * 1988-05-27 1989-02-28 Ford Motor Company Method for fabricating a silicon force transducer
US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction

Also Published As

Publication number Publication date
DE69117500T2 (de) 1997-02-27
EP0518997A1 (de) 1992-12-23
EP0644427A1 (de) 1995-03-22
US4999735A (en) 1991-03-12
WO1991014185A1 (en) 1991-09-19
EP0518997B1 (de) 1996-02-28

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee