DE69108993T2 - Vorrichtung zur kontinuierlichen Analyse und Impuls-Analyse der Energieverteilung eines Leistungslaserstrahls und Vorrichtung zum Ausrichten dieses Strahls. - Google Patents

Vorrichtung zur kontinuierlichen Analyse und Impuls-Analyse der Energieverteilung eines Leistungslaserstrahls und Vorrichtung zum Ausrichten dieses Strahls.

Info

Publication number
DE69108993T2
DE69108993T2 DE69108993T DE69108993T DE69108993T2 DE 69108993 T2 DE69108993 T2 DE 69108993T2 DE 69108993 T DE69108993 T DE 69108993T DE 69108993 T DE69108993 T DE 69108993T DE 69108993 T2 DE69108993 T2 DE 69108993T2
Authority
DE
Germany
Prior art keywords
analysis
aligning
energy distribution
power laser
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69108993T
Other languages
English (en)
Other versions
DE69108993D1 (de
Inventor
Didier Boisselier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electricite de Strasbourg SA
Original Assignee
Electricite de Strasbourg SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR9008423A external-priority patent/FR2663794B2/fr
Application filed by Electricite de Strasbourg SA filed Critical Electricite de Strasbourg SA
Publication of DE69108993D1 publication Critical patent/DE69108993D1/de
Application granted granted Critical
Publication of DE69108993T2 publication Critical patent/DE69108993T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014—Monitoring arrangements not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0266—Field-of-view determination; Aiming or pointing of a photometer; Adjusting alignment; Encoding angular position; Size of the measurement area; Position tracking; Photodetection involving different fields of view for a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G01J2005/123—Thermoelectric array

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Laser Beam Processing (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Lasers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69108993T 1990-06-26 1991-06-25 Vorrichtung zur kontinuierlichen Analyse und Impuls-Analyse der Energieverteilung eines Leistungslaserstrahls und Vorrichtung zum Ausrichten dieses Strahls. Expired - Fee Related DE69108993T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9008423A FR2663794B2 (fr) 1987-08-10 1990-06-26 Dispositif d'analyse en mode continu et en mode impulsionnel de la repartition d'energie au sein d'un faisceau laser de puissance et de l'alignement de ce dernier.

Publications (2)

Publication Number Publication Date
DE69108993D1 DE69108993D1 (de) 1995-05-24
DE69108993T2 true DE69108993T2 (de) 1995-11-23

Family

ID=9398302

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69108993T Expired - Fee Related DE69108993T2 (de) 1990-06-26 1991-06-25 Vorrichtung zur kontinuierlichen Analyse und Impuls-Analyse der Energieverteilung eines Leistungslaserstrahls und Vorrichtung zum Ausrichten dieses Strahls.

Country Status (7)

Country Link
US (1) US5172392A (de)
EP (1) EP0463982B1 (de)
JP (1) JP2614374B2 (de)
AT (1) ATE121538T1 (de)
CA (1) CA2045350C (de)
DE (1) DE69108993T2 (de)
ES (1) ES2074248T3 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19605384C1 (de) * 1996-02-14 1997-02-13 Fortech Hts Gmbh Thermoelektrischer Sensor
US6734415B1 (en) * 1999-10-07 2004-05-11 Agilent Technologies, Inc. High quantum efficiency point light detector
US7012421B2 (en) * 2003-01-06 2006-03-14 General Electric Company Energy calculation methods in power distribution systems
CN101155662B (zh) * 2005-04-01 2010-09-01 通快机床两合公司 包括以像素矩阵形式提供的温度传感器的光学元件及记录射束参数的方法
JP5759232B2 (ja) * 2011-04-04 2015-08-05 キヤノン株式会社 測定装置
CN109822796B (zh) * 2019-02-19 2021-05-04 太原理工大学 一种输送带硫化机温度均匀性检测装置
EP4080286A1 (de) * 2021-04-21 2022-10-26 ASML Netherlands B.V. Spiegel zur durchführung von metrologie in einem laserstrahlsystem, laserstrahlsystem, euv-strahlungsquelle und lithografievorrichtung
WO2022214288A1 (en) * 2021-04-08 2022-10-13 Asml Netherlands B.V. Mirror for performing metrology in a laser beam system, laser beam system, euv radiation source and lithographic apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3391279A (en) * 1967-11-28 1968-07-02 Army Usa Laser total energy detector
US3738168A (en) * 1971-11-16 1973-06-12 Us Air Force Laser beam scanning device
US4320462A (en) * 1980-03-31 1982-03-16 Hughes Aircraft Company High speed laser pulse analyzer
EP0064476A1 (de) * 1981-04-10 1982-11-10 Asulab S.A. Anordnung zur Emissionsstabilisierung eines Laserresonators bei einem bestimmten Emissionsmodus
US4596461A (en) * 1984-02-16 1986-06-24 The United States Of America As Represented By The Secretary Of The Navy In-line, concurrent electromagnetic beam analyzer
US4871250A (en) * 1985-12-19 1989-10-03 Amada Engineering Service Co., Inc. Beam monitor for a high-output laser
FR2619475B1 (fr) * 1987-08-10 1990-01-26 Strasbourg Sa Electricite Dispositif d'analyse en mode continu et en mode impulsionnel de la repartition d'energie au sein d'un faisceau laser de puissance

Also Published As

Publication number Publication date
EP0463982A1 (de) 1992-01-02
EP0463982B1 (de) 1995-04-19
ATE121538T1 (de) 1995-05-15
JPH06310777A (ja) 1994-11-04
DE69108993D1 (de) 1995-05-24
CA2045350A1 (fr) 1991-12-27
US5172392A (en) 1992-12-15
JP2614374B2 (ja) 1997-05-28
ES2074248T3 (es) 1995-09-01
CA2045350C (fr) 1995-07-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee