DE69102679D1 - System zum Aerosolspritzen für die Erzeugung von Verbundschichten durch Pyrolyse. - Google Patents

System zum Aerosolspritzen für die Erzeugung von Verbundschichten durch Pyrolyse.

Info

Publication number
DE69102679D1
DE69102679D1 DE69102679T DE69102679T DE69102679D1 DE 69102679 D1 DE69102679 D1 DE 69102679D1 DE 69102679 T DE69102679 T DE 69102679T DE 69102679 T DE69102679 T DE 69102679T DE 69102679 D1 DE69102679 D1 DE 69102679D1
Authority
DE
Germany
Prior art keywords
pyrolysis
production
spraying system
composite layers
aerosol spraying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69102679T
Other languages
English (en)
Other versions
DE69102679T2 (de
Inventor
Jean-Jacques Chazee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR909005525A external-priority patent/FR2661623B1/fr
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69102679D1 publication Critical patent/DE69102679D1/de
Publication of DE69102679T2 publication Critical patent/DE69102679T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Nozzles (AREA)
  • Medicinal Preparation (AREA)
  • Coating Apparatus (AREA)
  • Surface Treatment Of Glass (AREA)
DE69102679T 1990-05-02 1991-04-30 System zum Aerosolspritzen für die Erzeugung von Verbundschichten durch Pyrolyse. Expired - Fee Related DE69102679T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR909005525A FR2661623B1 (fr) 1989-04-04 1990-05-02 Systeme d'injection d'aerosol pour elaboration de couches composites par pyrolyse.

Publications (2)

Publication Number Publication Date
DE69102679D1 true DE69102679D1 (de) 1994-08-04
DE69102679T2 DE69102679T2 (de) 1995-01-12

Family

ID=9396251

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69102679T Expired - Fee Related DE69102679T2 (de) 1990-05-02 1991-04-30 System zum Aerosolspritzen für die Erzeugung von Verbundschichten durch Pyrolyse.

Country Status (5)

Country Link
US (1) US5190592A (de)
EP (1) EP0455555B1 (de)
JP (1) JPH04228458A (de)
CA (1) CA2041631A1 (de)
DE (1) DE69102679T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3222518B2 (ja) * 1991-12-26 2001-10-29 キヤノン株式会社 液体原料気化装置および薄膜形成装置
JP2875458B2 (ja) * 1993-07-16 1999-03-31 大日本スクリーン製造株式会社 基板の熱処理装置
US6012647A (en) * 1997-12-01 2000-01-11 3M Innovative Properties Company Apparatus and method of atomizing and vaporizing
US6045864A (en) * 1997-12-01 2000-04-04 3M Innovative Properties Company Vapor coating method
US7163587B2 (en) * 2002-02-08 2007-01-16 Axcelis Technologies, Inc. Reactor assembly and processing method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4618508A (en) * 1983-03-21 1986-10-21 Commissariat A L'energie Atomique Process for producing composite layers
GB2216903A (en) * 1988-04-06 1989-10-18 Ici Plc Transparent conductive zinc oxide layer

Also Published As

Publication number Publication date
EP0455555A1 (de) 1991-11-06
CA2041631A1 (en) 1991-11-03
DE69102679T2 (de) 1995-01-12
EP0455555B1 (de) 1994-06-29
US5190592A (en) 1993-03-02
JPH04228458A (ja) 1992-08-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee