DE69024509D1 - Automatic impedance adjustment device for microwave exposure and method therefor - Google Patents

Automatic impedance adjustment device for microwave exposure and method therefor

Info

Publication number
DE69024509D1
DE69024509D1 DE69024509T DE69024509T DE69024509D1 DE 69024509 D1 DE69024509 D1 DE 69024509D1 DE 69024509 T DE69024509 T DE 69024509T DE 69024509 T DE69024509 T DE 69024509T DE 69024509 D1 DE69024509 D1 DE 69024509D1
Authority
DE
Germany
Prior art keywords
adjustment device
method therefor
impedance adjustment
microwave exposure
automatic impedance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69024509T
Other languages
German (de)
Other versions
DE69024509T2 (en
Inventor
Yuji Ishida
Michio Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2014457A external-priority patent/JP2986166B2/en
Application filed by Daihen Corp filed Critical Daihen Corp
Publication of DE69024509D1 publication Critical patent/DE69024509D1/en
Application granted granted Critical
Publication of DE69024509T2 publication Critical patent/DE69024509T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/04—Coupling devices of the waveguide type with variable factor of coupling
DE1990624509 1989-01-30 1990-01-29 Automatic impedance adjustment device for microwave exposure and method therefor Expired - Lifetime DE69024509T2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2203889 1989-01-30
JP25168489 1989-09-26
JP2014457A JP2986166B2 (en) 1989-01-30 1990-01-24 Apparatus and method for automatically adjusting impedance of microwave circuit

Publications (2)

Publication Number Publication Date
DE69024509D1 true DE69024509D1 (en) 1996-02-15
DE69024509T2 DE69024509T2 (en) 1996-06-13

Family

ID=27280646

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1990624509 Expired - Lifetime DE69024509T2 (en) 1989-01-30 1990-01-29 Automatic impedance adjustment device for microwave exposure and method therefor

Country Status (2)

Country Link
EP (1) EP0381398B1 (en)
DE (1) DE69024509T2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2981284B2 (en) * 1990-11-28 1999-11-22 株式会社ダイヘン Power supply for microwave oscillator
DE4135555C2 (en) * 1991-10-29 1993-10-07 Ant Nachrichtentech Method for determining the output reflection factor and the backward transmission factor of a measurement object and use of the method
US6297649B1 (en) 1999-09-30 2001-10-02 Focus Microwaves Inc. Harmonic rejection load tuner
US20050185769A1 (en) * 2004-02-25 2005-08-25 Pickerd John J. Calibration method and apparatus
DE102005005887A1 (en) * 2005-02-09 2006-08-10 Rohde & Schwarz Gmbh & Co. Kg Method and arrangement for correcting the retroactivity of electrical transducers on the object to be measured
US7460983B2 (en) 2006-08-23 2008-12-02 Tektronix, Inc. Signal analysis system and calibration method
US7405575B2 (en) 2006-08-23 2008-07-29 Tektronix, Inc. Signal analysis system and calibration method for measuring the impedance of a device under test
US7408363B2 (en) 2006-08-23 2008-08-05 Tektronix, Inc. Signal analysis system and calibration method for processing acquires signal samples with an arbitrary load
US7414411B2 (en) 2006-08-23 2008-08-19 Tektronix, Inc. Signal analysis system and calibration method for multiple signal probes

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3617953A (en) * 1971-03-16 1971-11-02 Canadian Patents Dev Microwave impedance matching system
GB1400895A (en) * 1973-06-27 1975-07-16 Canadian Patents Dev Microwave heating apparatus
GB2100526B (en) * 1981-05-21 1985-04-24 Secr Defence Improvements in or relating to impedance matching devices
JPS59221020A (en) * 1983-05-30 1984-12-12 Ulvac Corp Impedance matching circuit in device utilizing plasma
JPS611101A (en) * 1984-06-13 1986-01-07 Fujitsu Ltd Microwave processor
US4679007A (en) * 1985-05-20 1987-07-07 Advanced Energy, Inc. Matching circuit for delivering radio frequency electromagnetic energy to a variable impedance load
US4965607A (en) * 1987-04-30 1990-10-23 Br Communications, Inc. Antenna coupler

Also Published As

Publication number Publication date
EP0381398A2 (en) 1990-08-08
EP0381398A3 (en) 1991-07-10
EP0381398B1 (en) 1996-01-03
DE69024509T2 (en) 1996-06-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition