DE69009089D1 - Reinigung von Chlorsilanen. - Google Patents
Reinigung von Chlorsilanen.Info
- Publication number
- DE69009089D1 DE69009089D1 DE69009089T DE69009089T DE69009089D1 DE 69009089 D1 DE69009089 D1 DE 69009089D1 DE 69009089 T DE69009089 T DE 69009089T DE 69009089 T DE69009089 T DE 69009089T DE 69009089 D1 DE69009089 D1 DE 69009089D1
- Authority
- DE
- Germany
- Prior art keywords
- chlorosilanes
- purification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10778—Purification
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US32347389A | 1989-03-14 | 1989-03-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69009089D1 true DE69009089D1 (de) | 1994-06-30 |
DE69009089T2 DE69009089T2 (de) | 1994-09-01 |
Family
ID=23259344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1990609089 Expired - Fee Related DE69009089T2 (de) | 1989-03-14 | 1990-03-02 | Reinigung von Chlorsilanen. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0387638B1 (de) |
JP (1) | JPH02283611A (de) |
DE (1) | DE69009089T2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105480982B (zh) * | 2015-12-25 | 2018-03-06 | 湖北晶星科技股份有限公司 | 一种二氯二氢硅除杂方法 |
DE102017125221A1 (de) * | 2017-10-27 | 2019-05-02 | Nexwafe Gmbh | Verfahren und Vorrichtung zur Entfernung von Verunreinigungen aus Chlorsilanen |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DK100224A (de) | ||||
GB1015604A (en) * | 1961-10-11 | 1966-01-05 | Texas Instruments Ltd | A treatment process for silicon compounds |
-
1990
- 1990-03-02 EP EP19900104123 patent/EP0387638B1/de not_active Expired - Lifetime
- 1990-03-02 DE DE1990609089 patent/DE69009089T2/de not_active Expired - Fee Related
- 1990-03-13 JP JP6248890A patent/JPH02283611A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE69009089T2 (de) | 1994-09-01 |
EP0387638A2 (de) | 1990-09-19 |
JPH02283611A (ja) | 1990-11-21 |
EP0387638B1 (de) | 1994-05-25 |
EP0387638A3 (de) | 1991-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |