DE69008363T2 - Vorrichtung zur messung der änderung der kapazität eines kondensators, insbesondere eines sensors. - Google Patents

Vorrichtung zur messung der änderung der kapazität eines kondensators, insbesondere eines sensors.

Info

Publication number
DE69008363T2
DE69008363T2 DE69008363T DE69008363T DE69008363T2 DE 69008363 T2 DE69008363 T2 DE 69008363T2 DE 69008363 T DE69008363 T DE 69008363T DE 69008363 T DE69008363 T DE 69008363T DE 69008363 T2 DE69008363 T2 DE 69008363T2
Authority
DE
Germany
Prior art keywords
condenser
capacity
measuring
sensor
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69008363T
Other languages
English (en)
Other versions
DE69008363D1 (de
Inventor
Alfred Permuy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Application granted granted Critical
Publication of DE69008363D1 publication Critical patent/DE69008363D1/de
Publication of DE69008363T2 publication Critical patent/DE69008363T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/2403—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by moving plates, not forming part of the capacitor itself, e.g. shields
DE69008363T 1989-12-29 1990-12-28 Vorrichtung zur messung der änderung der kapazität eines kondensators, insbesondere eines sensors. Expired - Fee Related DE69008363T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8917551A FR2656698B1 (fr) 1989-12-29 1989-12-29 Dispositif de mesure des variations de la capacite d'un condensateur formant, notamment, un capteur.
PCT/FR1990/000961 WO1991009812A2 (fr) 1989-12-29 1990-12-28 Dispositif de mesure des variations de la capacite d'un condensateur formant, notamment, un capteur

Publications (2)

Publication Number Publication Date
DE69008363D1 DE69008363D1 (de) 1994-05-26
DE69008363T2 true DE69008363T2 (de) 1994-11-17

Family

ID=9389226

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69008363T Expired - Fee Related DE69008363T2 (de) 1989-12-29 1990-12-28 Vorrichtung zur messung der änderung der kapazität eines kondensators, insbesondere eines sensors.

Country Status (6)

Country Link
US (1) US5311140A (de)
EP (1) EP0510061B1 (de)
DE (1) DE69008363T2 (de)
ES (1) ES2051118T3 (de)
FR (1) FR2656698B1 (de)
WO (1) WO1991009812A2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3139305B2 (ja) * 1994-08-24 2001-02-26 株式会社村田製作所 容量型加速度センサ
AT401826B (de) * 1995-06-01 1996-12-27 Peter Ing Klementschitz Messverfahren
US5659195A (en) * 1995-06-08 1997-08-19 The Regents Of The University Of California CMOS integrated microsensor with a precision measurement circuit
DE19528384C2 (de) * 1995-08-02 1999-09-30 Ulrich Pok Kapazitive Meßeinrichtung zur kontinuierlichen Standregelung für Medien unterschiedlicher Dielektrizitätskonstanten
US5808198A (en) * 1997-05-19 1998-09-15 The Charles Stark Draper Laboratory, Inc. RF balanced capacitive vibration sensor system
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6366099B1 (en) 1999-12-21 2002-04-02 Conrad Technologies, Inc. Differential capacitance sampler
US7194390B1 (en) * 2000-03-31 2007-03-20 United States Of America As Represented By The Secretary Of The Navy Predictor of minimal noise figure for wideband amplifier
US6622092B1 (en) * 2000-03-31 2003-09-16 The United States Of America As Represented By The Secretary Of The Navy Predictor for optimal broadband impedance matching
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US20030121332A1 (en) * 2001-12-21 2003-07-03 Mathew Santhi E. Pressure transducer with dual slope output
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7327275B2 (en) 2004-02-02 2008-02-05 Gecko Alliance Group Inc. Bathing system controller having abnormal operational condition identification capabilities
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7368923B2 (en) * 2005-12-22 2008-05-06 Honeywell International Inc. Time interval trimmed differential capacitance sensor
US9063067B1 (en) 2010-11-17 2015-06-23 Alvin P. Schmitt Moisture sensing devices
WO2015077102A1 (en) 2013-11-25 2015-05-28 Oil States Industries, Inc. Method and system for health monitoring of composite elastomeric flexible elements
GB2615799A (en) * 2022-02-18 2023-08-23 Weiner Nicholas Impedance sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2337346A1 (fr) * 1975-12-30 1977-07-29 Onera (Off Nat Aerospatiale) Pont de mesure de capacites
US4241303A (en) * 1979-01-17 1980-12-23 The Babcock & Wilcox Company Linearization circuit
US4673869A (en) * 1985-02-13 1987-06-16 Phillips Petroleum Company Dielectric constant detector capacitance matching
US4684886A (en) * 1985-05-17 1987-08-04 Doyle James H Automatic equalizer
JPS62168408A (ja) * 1985-11-21 1987-07-24 Shimadzu Corp Ｍｒｉ装置用アンテナ回路自動共振・整合装置

Also Published As

Publication number Publication date
FR2656698B1 (fr) 1992-05-07
US5311140A (en) 1994-05-10
ES2051118T3 (es) 1994-06-01
WO1991009812A3 (fr) 1991-08-22
WO1991009812A2 (fr) 1991-07-11
EP0510061A1 (de) 1992-10-28
EP0510061B1 (de) 1994-04-20
FR2656698A1 (fr) 1991-07-05
DE69008363D1 (de) 1994-05-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee