DE69006593T2 - Device for vacuum coating by means of arc discharge with means for switching the electrodes. - Google Patents
Device for vacuum coating by means of arc discharge with means for switching the electrodes.Info
- Publication number
- DE69006593T2 DE69006593T2 DE1990606593 DE69006593T DE69006593T2 DE 69006593 T2 DE69006593 T2 DE 69006593T2 DE 1990606593 DE1990606593 DE 1990606593 DE 69006593 T DE69006593 T DE 69006593T DE 69006593 T2 DE69006593 T2 DE 69006593T2
- Authority
- DE
- Germany
- Prior art keywords
- electrodes
- switching
- arc discharge
- vacuum coating
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP90111594A EP0462303B1 (en) | 1988-12-21 | 1990-06-19 | Vacuum arc vapor deposition device having electrode switching means |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69006593D1 DE69006593D1 (en) | 1994-03-24 |
DE69006593T2 true DE69006593T2 (en) | 1994-06-16 |
Family
ID=8204114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1990606593 Expired - Fee Related DE69006593T2 (en) | 1990-06-19 | 1990-06-19 | Device for vacuum coating by means of arc discharge with means for switching the electrodes. |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE69006593T2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010054726A1 (en) * | 2008-11-12 | 2010-05-20 | Oerlikon Trading Ag, Trübbach | Ignition apparatus for arc sources |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109023273B (en) * | 2018-08-06 | 2023-08-11 | 信阳舜宇光学有限公司 | Coating equipment and coating method |
-
1990
- 1990-06-19 DE DE1990606593 patent/DE69006593T2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010054726A1 (en) * | 2008-11-12 | 2010-05-20 | Oerlikon Trading Ag, Trübbach | Ignition apparatus for arc sources |
US9601316B2 (en) | 2008-11-12 | 2017-03-21 | Oerlikon Surface Solutions Ag, Pfaffikon | Ignition apparatus for arc sources |
Also Published As
Publication number | Publication date |
---|---|
DE69006593D1 (en) | 1994-03-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |