DE69006593T2 - Device for vacuum coating by means of arc discharge with means for switching the electrodes. - Google Patents

Device for vacuum coating by means of arc discharge with means for switching the electrodes.

Info

Publication number
DE69006593T2
DE69006593T2 DE1990606593 DE69006593T DE69006593T2 DE 69006593 T2 DE69006593 T2 DE 69006593T2 DE 1990606593 DE1990606593 DE 1990606593 DE 69006593 T DE69006593 T DE 69006593T DE 69006593 T2 DE69006593 T2 DE 69006593T2
Authority
DE
Germany
Prior art keywords
electrodes
switching
arc discharge
vacuum coating
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1990606593
Other languages
German (de)
Other versions
DE69006593D1 (en
Inventor
Tetsuya Yoshikawa
Hakumi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority claimed from EP90111594A external-priority patent/EP0462303B1/en
Application granted granted Critical
Publication of DE69006593D1 publication Critical patent/DE69006593D1/en
Publication of DE69006593T2 publication Critical patent/DE69006593T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

DE1990606593 1990-06-19 1990-06-19 Device for vacuum coating by means of arc discharge with means for switching the electrodes. Expired - Fee Related DE69006593T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90111594A EP0462303B1 (en) 1988-12-21 1990-06-19 Vacuum arc vapor deposition device having electrode switching means

Publications (2)

Publication Number Publication Date
DE69006593D1 DE69006593D1 (en) 1994-03-24
DE69006593T2 true DE69006593T2 (en) 1994-06-16

Family

ID=8204114

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1990606593 Expired - Fee Related DE69006593T2 (en) 1990-06-19 1990-06-19 Device for vacuum coating by means of arc discharge with means for switching the electrodes.

Country Status (1)

Country Link
DE (1) DE69006593T2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010054726A1 (en) * 2008-11-12 2010-05-20 Oerlikon Trading Ag, Trübbach Ignition apparatus for arc sources

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109023273B (en) * 2018-08-06 2023-08-11 信阳舜宇光学有限公司 Coating equipment and coating method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010054726A1 (en) * 2008-11-12 2010-05-20 Oerlikon Trading Ag, Trübbach Ignition apparatus for arc sources
US9601316B2 (en) 2008-11-12 2017-03-21 Oerlikon Surface Solutions Ag, Pfaffikon Ignition apparatus for arc sources

Also Published As

Publication number Publication date
DE69006593D1 (en) 1994-03-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee