DE69005685D1 - Mikromagnetometer mit kapazitiver Detektion. - Google Patents
Mikromagnetometer mit kapazitiver Detektion.Info
- Publication number
- DE69005685D1 DE69005685D1 DE90420182T DE69005685T DE69005685D1 DE 69005685 D1 DE69005685 D1 DE 69005685D1 DE 90420182 T DE90420182 T DE 90420182T DE 69005685 T DE69005685 T DE 69005685T DE 69005685 D1 DE69005685 D1 DE 69005685D1
- Authority
- DE
- Germany
- Prior art keywords
- micromagnetometer
- capacitive detection
- capacitive
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/028—Electrodynamic magnetometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8905281A FR2645970B1 (fr) | 1989-04-14 | 1989-04-14 | Micromagnetometre a detection capacitive |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69005685D1 true DE69005685D1 (de) | 1994-02-17 |
DE69005685T2 DE69005685T2 (de) | 1994-07-21 |
Family
ID=9380958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1990605685 Expired - Fee Related DE69005685T2 (de) | 1989-04-14 | 1990-04-11 | Mikromagnetometer mit kapazitiver Detektion. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0392945B1 (de) |
DE (1) | DE69005685T2 (de) |
FR (1) | FR2645970B1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19740049A1 (de) | 1997-09-12 | 1999-03-25 | Bosch Gmbh Robert | Sensorelement |
US6275034B1 (en) | 1998-03-11 | 2001-08-14 | Analog Devices Inc. | Micromachined semiconductor magnetic sensor |
DE19858826A1 (de) * | 1998-12-19 | 2000-06-29 | Micronas Intermetall Gmbh | Kapazitiver Magnetfeldsensor |
FR2801970B1 (fr) * | 1999-12-07 | 2002-02-15 | St Microelectronics Sa | Capteur magnetique de tres haute sensibilite |
JP4604037B2 (ja) * | 2003-09-23 | 2010-12-22 | キネティック リミテッド | 共振磁力計デバイス |
US7429858B2 (en) | 2004-07-13 | 2008-09-30 | Lucent Technologies Inc. | Oscillating-beam magnetometer |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1279091A (en) * | 1968-05-08 | 1972-06-21 | Newport Instr Ltd | Devices for the measurement and control of magnetic field strength |
FR2542453B1 (fr) * | 1983-03-07 | 1985-07-12 | Centre Electron Horloger | Dispositif miniature sensible au champ magnetique et appareil de mesure du champ magnetique incorporant un tel dispositif |
-
1989
- 1989-04-14 FR FR8905281A patent/FR2645970B1/fr not_active Expired - Lifetime
-
1990
- 1990-04-11 DE DE1990605685 patent/DE69005685T2/de not_active Expired - Fee Related
- 1990-04-11 EP EP19900420182 patent/EP0392945B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FR2645970B1 (fr) | 1991-08-30 |
EP0392945B1 (de) | 1994-01-05 |
FR2645970A1 (fr) | 1990-10-19 |
EP0392945A1 (de) | 1990-10-17 |
DE69005685T2 (de) | 1994-07-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |