DE69005685D1 - Mikromagnetometer mit kapazitiver Detektion. - Google Patents

Mikromagnetometer mit kapazitiver Detektion.

Info

Publication number
DE69005685D1
DE69005685D1 DE90420182T DE69005685T DE69005685D1 DE 69005685 D1 DE69005685 D1 DE 69005685D1 DE 90420182 T DE90420182 T DE 90420182T DE 69005685 T DE69005685 T DE 69005685T DE 69005685 D1 DE69005685 D1 DE 69005685D1
Authority
DE
Germany
Prior art keywords
micromagnetometer
capacitive detection
capacitive
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90420182T
Other languages
English (en)
Other versions
DE69005685T2 (de
Inventor
Eric Donzier
Isabelle Thomas
Serge Spirkovitch
Francois Baillieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Thales Avionics SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Avionics SAS filed Critical Thales Avionics SAS
Publication of DE69005685D1 publication Critical patent/DE69005685D1/de
Application granted granted Critical
Publication of DE69005685T2 publication Critical patent/DE69005685T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
DE1990605685 1989-04-14 1990-04-11 Mikromagnetometer mit kapazitiver Detektion. Expired - Fee Related DE69005685T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8905281A FR2645970B1 (fr) 1989-04-14 1989-04-14 Micromagnetometre a detection capacitive

Publications (2)

Publication Number Publication Date
DE69005685D1 true DE69005685D1 (de) 1994-02-17
DE69005685T2 DE69005685T2 (de) 1994-07-21

Family

ID=9380958

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1990605685 Expired - Fee Related DE69005685T2 (de) 1989-04-14 1990-04-11 Mikromagnetometer mit kapazitiver Detektion.

Country Status (3)

Country Link
EP (1) EP0392945B1 (de)
DE (1) DE69005685T2 (de)
FR (1) FR2645970B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19740049A1 (de) 1997-09-12 1999-03-25 Bosch Gmbh Robert Sensorelement
US6275034B1 (en) 1998-03-11 2001-08-14 Analog Devices Inc. Micromachined semiconductor magnetic sensor
DE19858826A1 (de) * 1998-12-19 2000-06-29 Micronas Intermetall Gmbh Kapazitiver Magnetfeldsensor
FR2801970B1 (fr) * 1999-12-07 2002-02-15 St Microelectronics Sa Capteur magnetique de tres haute sensibilite
JP4604037B2 (ja) * 2003-09-23 2010-12-22 キネティック リミテッド 共振磁力計デバイス
US7429858B2 (en) 2004-07-13 2008-09-30 Lucent Technologies Inc. Oscillating-beam magnetometer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1279091A (en) * 1968-05-08 1972-06-21 Newport Instr Ltd Devices for the measurement and control of magnetic field strength
FR2542453B1 (fr) * 1983-03-07 1985-07-12 Centre Electron Horloger Dispositif miniature sensible au champ magnetique et appareil de mesure du champ magnetique incorporant un tel dispositif

Also Published As

Publication number Publication date
FR2645970B1 (fr) 1991-08-30
EP0392945B1 (de) 1994-01-05
FR2645970A1 (fr) 1990-10-19
EP0392945A1 (de) 1990-10-17
DE69005685T2 (de) 1994-07-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee