DE68929018D1 - Herstellung von Präzisionsmustern auf gebogenen Oberflächen - Google Patents

Herstellung von Präzisionsmustern auf gebogenen Oberflächen

Info

Publication number
DE68929018D1
DE68929018D1 DE68929018T DE68929018T DE68929018D1 DE 68929018 D1 DE68929018 D1 DE 68929018D1 DE 68929018 T DE68929018 T DE 68929018T DE 68929018 T DE68929018 T DE 68929018T DE 68929018 D1 DE68929018 D1 DE 68929018D1
Authority
DE
Germany
Prior art keywords
manufacture
curved surfaces
precision samples
precision
samples
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68929018T
Other languages
English (en)
Other versions
DE68929018T2 (de
Inventor
Loren Bradley Haddock
Bruce Donald Ballinger
George Howard Gelb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Space and Mission Systems Corp
Original Assignee
TRW Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TRW Inc filed Critical TRW Inc
Publication of DE68929018D1 publication Critical patent/DE68929018D1/de
Application granted granted Critical
Publication of DE68929018T2 publication Critical patent/DE68929018T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/703—Non-planar pattern areas or non-planar masks, e.g. curved masks or substrates
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70375—Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation
DE68929018T 1989-03-03 1989-03-03 Herstellung von Präzisionsmustern auf gebogenen Oberflächen Expired - Lifetime DE68929018T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89302180A EP0385013B1 (de) 1989-03-03 1989-03-03 Herstellung von Präzisionsmustern auf gebogenen Oberflächen

Publications (2)

Publication Number Publication Date
DE68929018D1 true DE68929018D1 (de) 1999-07-22
DE68929018T2 DE68929018T2 (de) 1999-11-18

Family

ID=8202611

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68929018T Expired - Lifetime DE68929018T2 (de) 1989-03-03 1989-03-03 Herstellung von Präzisionsmustern auf gebogenen Oberflächen

Country Status (2)

Country Link
EP (1) EP0385013B1 (de)
DE (1) DE68929018T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6071315A (en) * 1998-07-10 2000-06-06 Ball Semiconductor, Inc. Two-dimensional to three-dimensional VLSI design
US10345705B2 (en) 2013-07-12 2019-07-09 Xerox Corporation Photolithographic patterning of a cylinder

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694080A (en) * 1970-03-09 1972-09-26 Massachusetts Inst Technology Method of and apparatus for photoprinting conductor patterns on the curved surfaces of transducers
US3620623A (en) * 1970-04-24 1971-11-16 Us Army Optical system for intermixing dissimilar step-and-repeat patterns
FR2245984B1 (de) * 1973-09-27 1977-03-18 Ibm
DE2744663A1 (de) * 1976-10-05 1978-04-06 Mbi Inc Verfahren und vorrichtung zur uebertragung eines bildes auf eine bildflaeche
US4233123A (en) * 1978-12-18 1980-11-11 General Motors Corporation Method for making an air cooled combustor
GB2150312A (en) * 1983-11-24 1985-06-26 Emi Varian Ltd Reproducing a planar pattern on a curved surface

Also Published As

Publication number Publication date
EP0385013A1 (de) 1990-09-05
DE68929018T2 (de) 1999-11-18
EP0385013B1 (de) 1999-06-16

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