DE68914733D1 - Arrangement for characterizing semiconductors by high-resolution electro-luminescence at low temperature. - Google Patents

Arrangement for characterizing semiconductors by high-resolution electro-luminescence at low temperature.

Info

Publication number
DE68914733D1
DE68914733D1 DE68914733T DE68914733T DE68914733D1 DE 68914733 D1 DE68914733 D1 DE 68914733D1 DE 68914733 T DE68914733 T DE 68914733T DE 68914733 T DE68914733 T DE 68914733T DE 68914733 D1 DE68914733 D1 DE 68914733D1
Authority
DE
Germany
Prior art keywords
luminescence
arrangement
low temperature
resolution electro
semiconductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68914733T
Other languages
German (de)
Other versions
DE68914733T2 (en
Inventor
Bris Jean Societe Civile S Le
Marko Societe Civile S P Erman
Gerard Societe Civil Gillardin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of DE68914733D1 publication Critical patent/DE68914733D1/en
Publication of DE68914733T2 publication Critical patent/DE68914733T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
DE68914733T 1988-07-08 1989-07-03 Arrangement for characterizing semiconductors by high-resolution electro-luminescence at low temperature. Expired - Fee Related DE68914733T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8809296A FR2634026B1 (en) 1988-07-08 1988-07-08

Publications (2)

Publication Number Publication Date
DE68914733D1 true DE68914733D1 (en) 1994-05-26
DE68914733T2 DE68914733T2 (en) 1994-10-20

Family

ID=9368247

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68914733T Expired - Fee Related DE68914733T2 (en) 1988-07-08 1989-07-03 Arrangement for characterizing semiconductors by high-resolution electro-luminescence at low temperature.

Country Status (6)

Country Link
US (1) US4954713A (en)
EP (1) EP0350123B1 (en)
JP (1) JPH0786460B2 (en)
KR (1) KR900002312A (en)
DE (1) DE68914733T2 (en)
FR (1) FR2634026B1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04294255A (en) * 1991-03-22 1992-10-19 Shimadzu Corp Measuring apparatus for photoluminescence
US5878072A (en) * 1997-03-25 1999-03-02 Seh America, Inc. Laser alignment cross hair
GB2339019B (en) * 1998-06-30 2000-06-14 Khaled Karrai Sample holder apparatus
CN100353171C (en) * 2004-12-23 2007-12-05 中国科学院半导体研究所 Sample holder in use for measuring spectrum of photoluminescence of electrical modulation
DE102007028865B3 (en) 2007-06-22 2009-01-29 Vericold Technologies Gmbh Cryogenic device
DE102011115303B4 (en) * 2011-09-29 2013-06-27 Entropy GmbH Cryogenic device
DE102014015665B4 (en) * 2014-10-23 2016-05-19 Attocube Systems Ag Optical table

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3800161A (en) * 1972-12-19 1974-03-26 Atomic Energy Commission Portable dynamic multistation photometer-fluorometer
SU1029053A1 (en) * 1979-12-07 1983-07-15 Ленинградское научно-производственное объединение "Буревестник" Spectrofluorimeter
JPS58210551A (en) * 1982-06-01 1983-12-07 Fujitsu Ltd Measuring method of photoluminescence
SE455646B (en) * 1984-10-22 1988-07-25 Radians Innova Ab FLUORESCENT DEVICE
JPS61194307A (en) * 1985-02-25 1986-08-28 Hitachi Ltd Printed substrate pattern inspecting apparatus
JPS61290311A (en) * 1985-06-19 1986-12-20 Hitachi Ltd Apparatus and method for inspecting soldered zone
US4703260A (en) * 1985-09-23 1987-10-27 International Business Machines Corporation Full chip integrated circuit tester
JPH0660873B2 (en) * 1985-12-06 1994-08-10 日本電信電話株式会社 Luminescence measuring device
US4859063A (en) * 1986-02-11 1989-08-22 University Of Massachusetts Medical Center Imaging microspectrofluorimeter
JPS62263451A (en) * 1986-05-12 1987-11-16 Hitachi Electronics Eng Co Ltd Apparatus for inspecting wiring pattern

Also Published As

Publication number Publication date
EP0350123A1 (en) 1990-01-10
DE68914733T2 (en) 1994-10-20
EP0350123B1 (en) 1994-04-20
JPH0786460B2 (en) 1995-09-20
JPH0254149A (en) 1990-02-23
US4954713A (en) 1990-09-04
KR900002312A (en) 1990-02-28
FR2634026B1 (en) 1990-11-09
FR2634026A1 (en) 1990-01-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8339 Ceased/non-payment of the annual fee