DE60330660D1 - Hochleistungslaser für den tiefen ultraviolettbereich mit langlebiger optik - Google Patents

Hochleistungslaser für den tiefen ultraviolettbereich mit langlebiger optik

Info

Publication number
DE60330660D1
DE60330660D1 DE60330660T DE60330660T DE60330660D1 DE 60330660 D1 DE60330660 D1 DE 60330660D1 DE 60330660 T DE60330660 T DE 60330660T DE 60330660 T DE60330660 T DE 60330660T DE 60330660 D1 DE60330660 D1 DE 60330660D1
Authority
DE
Germany
Prior art keywords
lasting
optics
long
deep ultraviolet
performance laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60330660T
Other languages
English (en)
Inventor
Thomas A Yager
William N Partlo
Richard L Sandstrom
Xiaojiang Pan
John T Melchior
John M Algots
Matthew Ball
Alexander I Ershov
Vladimir Fleurov
Walter D Gillespie
Holger K Glatzel
Leonard Lublin
Elizabeth Marsh
Richard G Morton
Richard C Ujazdowski
David J Warkentin
Kyle R Webb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/141,216 external-priority patent/US6693939B2/en
Priority claimed from US10/233,253 external-priority patent/US6704339B2/en
Priority claimed from US10/384,967 external-priority patent/US6904073B2/en
Application filed by Cymer Inc filed Critical Cymer Inc
Priority claimed from PCT/US2003/012819 external-priority patent/WO2003096497A1/en
Application granted granted Critical
Publication of DE60330660D1 publication Critical patent/DE60330660D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE60330660T 2002-05-07 2003-04-23 Hochleistungslaser für den tiefen ultraviolettbereich mit langlebiger optik Expired - Lifetime DE60330660D1 (de)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US10/141,216 US6693939B2 (en) 2001-01-29 2002-05-07 Laser lithography light source with beam delivery
US10/233,253 US6704339B2 (en) 2001-01-29 2002-08-30 Lithography laser with beam delivery and beam pointing control
US41234902P 2002-09-20 2002-09-20
US42688802P 2002-11-15 2002-11-15
US44257903P 2003-01-24 2003-01-24
US44367303P 2003-01-28 2003-01-28
US44571503P 2003-02-07 2003-02-07
US10/384,967 US6904073B2 (en) 2001-01-29 2003-03-08 High power deep ultraviolet laser with long life optics
PCT/US2003/012819 WO2003096497A1 (en) 2002-05-07 2003-04-23 High power deep ultraviolet laser with long life optics

Publications (1)

Publication Number Publication Date
DE60330660D1 true DE60330660D1 (de) 2010-02-04

Family

ID=41461961

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60330660T Expired - Lifetime DE60330660D1 (de) 2002-05-07 2003-04-23 Hochleistungslaser für den tiefen ultraviolettbereich mit langlebiger optik

Country Status (1)

Country Link
DE (1) DE60330660D1 (de)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition