DE60327928D1 - Herstellung von homopolymeren, copolymeren und terpolymeren aus substituierten styrolen - Google Patents

Herstellung von homopolymeren, copolymeren und terpolymeren aus substituierten styrolen

Info

Publication number
DE60327928D1
DE60327928D1 DE60327928T DE60327928T DE60327928D1 DE 60327928 D1 DE60327928 D1 DE 60327928D1 DE 60327928 T DE60327928 T DE 60327928T DE 60327928 T DE60327928 T DE 60327928T DE 60327928 D1 DE60327928 D1 DE 60327928D1
Authority
DE
Germany
Prior art keywords
terpolymers
homopolymers
copolymers
preparation
substituted styrenes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60327928T
Other languages
English (en)
Inventor
Michael T Sheehan
James R Sounik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DuPont Electronic Polymers LP
Original Assignee
DuPont Electronic Polymers LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DuPont Electronic Polymers LP filed Critical DuPont Electronic Polymers LP
Application granted granted Critical
Publication of DE60327928D1 publication Critical patent/DE60327928D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F216/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical
    • C08F216/02—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical by an alcohol radical
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F6/00—Post-polymerisation treatments
    • C08F6/04—Fractionation
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F12/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
    • C08F12/02—Monomers containing only one unsaturated aliphatic radical
    • C08F12/04—Monomers containing only one unsaturated aliphatic radical containing one ring
    • C08F12/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by hetero atoms or groups containing heteroatoms
    • C08F12/22—Oxygen
    • C08F12/24—Phenols or alcohols
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F6/00—Post-polymerisation treatments
    • C08F6/02—Neutralisation of the polymerisation mass, e.g. killing the catalyst also removal of catalyst residues
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00—Chemical modification by after-treatment
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00—Chemical modification by after-treatment
    • C08F8/14—Esterification
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2800/00—Copolymer characterised by the proportions of the comonomers expressed
    • C08F2800/10—Copolymer characterised by the proportions of the comonomers expressed as molar percentages
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2800/00—Copolymer characterised by the proportions of the comonomers expressed
    • C08F2800/20—Copolymer characterised by the proportions of the comonomers expressed as weight or mass percentages

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Emergency Medicine (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE60327928T 2002-04-19 2003-04-10 Herstellung von homopolymeren, copolymeren und terpolymeren aus substituierten styrolen Expired - Fee Related DE60327928D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/126,719 US6759483B2 (en) 1998-05-05 2002-04-19 Preparation of homo-, co- and terpolymers of substituted styrenes
PCT/US2003/011260 WO2003089482A1 (en) 2002-04-19 2003-04-10 Preparation of homo-, co- and terpolymers of substituted styrenes

Publications (1)

Publication Number Publication Date
DE60327928D1 true DE60327928D1 (de) 2009-07-23

Family

ID=29248422

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60327928T Expired - Fee Related DE60327928D1 (de) 2002-04-19 2003-04-10 Herstellung von homopolymeren, copolymeren und terpolymeren aus substituierten styrolen

Country Status (13)

Country Link
US (1) US6759483B2 (de)
EP (1) EP1497341B1 (de)
JP (1) JP4343707B2 (de)
KR (1) KR20050007314A (de)
CN (1) CN1293105C (de)
AR (1) AR039431A1 (de)
AT (1) ATE433466T1 (de)
AU (1) AU2003223575A1 (de)
CA (1) CA2482901A1 (de)
DE (1) DE60327928D1 (de)
HK (1) HK1071151A1 (de)
TW (1) TWI241309B (de)
WO (1) WO2003089482A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3841399B2 (ja) * 2002-02-21 2006-11-01 富士写真フイルム株式会社 ポジ型レジスト組成物
US7834113B2 (en) * 2003-05-08 2010-11-16 E. I. Du Pont De Nemours And Company Photoresist compositions and processes for preparing the same
TWI284783B (en) * 2003-05-08 2007-08-01 Du Pont Photoresist compositions and processes for preparing the same
KR100506096B1 (ko) * 2003-10-27 2005-08-03 삼성에스디아이 주식회사 말단 술폰산기를 포함하는 고분자 및 이를 채용한 고분자전해질과 연료 전지
WO2006088147A1 (ja) * 2005-02-18 2006-08-24 Sanyo Chemical Industries, Ltd. ビニルフェノール重合体の製造方法
US7534837B2 (en) * 2005-09-26 2009-05-19 E.I. Du Pont De Nemours And Company Random copolymers of ethylene and 4-vinylphenyl esters and method for preparing the same
TWI502031B (zh) * 2012-03-01 2015-10-01 Eternal Materials Co Ltd 抗蝕刻組成物及其應用
TWI603983B (zh) * 2012-08-10 2017-11-01 Nippon Shokubai Co Ltd Hardening resin composition and its use
JP6398026B1 (ja) * 2017-09-14 2018-09-26 共栄社化学株式会社 熱硬化性樹脂組成物
KR102655952B1 (ko) * 2018-10-31 2024-04-09 주식회사 동진쎄미켐 포지티브형 감광성 수지 조성물
TWI837443B (zh) 2019-12-31 2024-04-01 南韓商羅門哈斯電子材料韓國公司 塗料組成物、經塗覆的基底及形成電子裝置的方法

Family Cites Families (25)

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Publication number Priority date Publication date Assignee Title
US4491628A (en) 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
US4636540A (en) 1985-07-08 1987-01-13 Atlantic Richfield Company Purification of polymer solutions
US4689371A (en) 1986-07-07 1987-08-25 Celanese Corporation Process for the preparation of poly (vinylphenol) from poly (acetoxystyrene)
US4939070A (en) 1986-07-28 1990-07-03 Brunsvold William R Thermally stable photoresists with high sensitivity
EP0260104A3 (de) 1986-09-09 1989-03-15 Celanese Corporation Verfahren zur Herstellung von Polyvinylphenol durch gleichzeitige Methanolyse und Polymerisation von 4-Acetoxystyren
US4678843A (en) 1986-09-29 1987-07-07 Celanese Corporation Process for the ammonium hydroxide hydrolysis of polymers of acetoxystyrene to polymers of vinylphenol
US4931379A (en) 1986-10-23 1990-06-05 International Business Machines Corporation High sensitivity resists having autodecomposition temperatures greater than about 160° C.
EP0277721A3 (de) 1987-01-28 1989-03-15 Hoechst Celanese Corporation Emulsionspolymerisation von 4-Acetoxystyren und Hydrolyse zu Poly(p-vinylphenol)
US4822862A (en) 1987-01-28 1989-04-18 Hoechst Celanese Corporation Emulsion polymerization of 4-acetoxystyrene and hydrolysis to poly(p-vinylphenol
US4898916A (en) 1987-03-05 1990-02-06 Hoechst Celanese Corporation Process for the preparation of poly(vinylphenol) from poly(acetoxystyrene) by acid catalyzed transesterification
US4877843A (en) 1987-09-11 1989-10-31 Hoechst Celanese Corporation Selective hydrolysis of copolymers of para-acetoxy styrene and allyl esters of ethylenically unsaturated acids
US4912173A (en) 1987-10-30 1990-03-27 Hoechst Celanese Corporation Hydrolysis of poly(acetoxystyrene) in aqueous suspension
US4962147A (en) 1988-05-26 1990-10-09 Hoechst Celanese Corporation Process for the suspension polymerization of 4-acetoxystyrene and hydrolysis to 4-hydroxystyrene polymers
US4880487A (en) * 1988-06-24 1989-11-14 Hoechst Celanese Corporation Hot melt adhesives containing poly(p-hydroxystyrene) homopolymers and copolymers and bonding methods employing same
US5239015A (en) * 1990-06-29 1993-08-24 Hoechst Celanese Corporation Process for making low optical density polymers and copolymers for photoresists and optical applications
US5087772A (en) 1990-11-16 1992-02-11 Hoechst Celanese Corporation Method for preparing 4-hydroxystyrene
US5264528A (en) * 1990-12-06 1993-11-23 Hoechst Celanese Corporation Process for the preparation of 4-hydroxystyrene polymers from 4-acetoxystyrene polymers
JPH0768296B2 (ja) 1991-11-28 1995-07-26 丸善石油化学株式会社 ビニルフェノール系重合体の金属除去方法
EP0605089B1 (de) 1992-11-03 1999-01-07 International Business Machines Corporation Photolackzusammensetzung
WO1994014858A1 (en) 1992-12-29 1994-07-07 Hoechst Celanese Corporation Metal ion reduction in polyhydroxystyrene and photoresists
US5304610A (en) 1993-01-12 1994-04-19 Hoechst Celanese Corporation Amphoteric copolymer derived from vinylpyridine and acetoxystyrene
US5861231A (en) 1996-06-11 1999-01-19 Shipley Company, L.L.C. Copolymers and photoresist compositions comprising copolymer resin binder component
US5789522A (en) 1996-09-06 1998-08-04 Shipley Company, L.L.C. Resin purification process
US5919597A (en) 1997-10-30 1999-07-06 Ibm Corporation Of Armonk Methods for preparing photoresist compositions
EP1076667B1 (de) * 1998-05-05 2004-03-24 Triquest, L.P. Herstellung von co- und terpolymeren von p-hydroxystyrol und alkylacrylaten

Also Published As

Publication number Publication date
TWI241309B (en) 2005-10-11
CA2482901A1 (en) 2003-10-30
AU2003223575A1 (en) 2003-11-03
TW200408654A (en) 2004-06-01
CN1293105C (zh) 2007-01-03
JP4343707B2 (ja) 2009-10-14
KR20050007314A (ko) 2005-01-17
CN1585782A (zh) 2005-02-23
US6759483B2 (en) 2004-07-06
JP2005523352A (ja) 2005-08-04
US20020156199A1 (en) 2002-10-24
EP1497341A1 (de) 2005-01-19
HK1071151A1 (en) 2005-07-08
AR039431A1 (es) 2005-02-16
WO2003089482A1 (en) 2003-10-30
ATE433466T1 (de) 2009-06-15
EP1497341B1 (de) 2009-06-10

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee