DE60324021D1 - Drivers for piezoelectric actuators - Google Patents

Drivers for piezoelectric actuators

Info

Publication number
DE60324021D1
DE60324021D1 DE60324021T DE60324021T DE60324021D1 DE 60324021 D1 DE60324021 D1 DE 60324021D1 DE 60324021 T DE60324021 T DE 60324021T DE 60324021 T DE60324021 T DE 60324021T DE 60324021 D1 DE60324021 D1 DE 60324021D1
Authority
DE
Germany
Prior art keywords
drivers
piezoelectric actuators
actuators
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60324021T
Other languages
German (de)
Inventor
Kazuhisa Watanabe
Satoshi Enomoto
Hiroshi Enomoto
Shigeru Kanai
Toshiaki Takane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WAC Data Service KK
CDK Co Ltd
Original Assignee
WAC Data Service KK
CDK Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WAC Data Service KK, CDK Co Ltd filed Critical WAC Data Service KK
Application granted granted Critical
Publication of DE60324021D1 publication Critical patent/DE60324021D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/065—Large signal circuits, e.g. final stages
    • H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
DE60324021T 2002-12-16 2003-12-11 Drivers for piezoelectric actuators Expired - Lifetime DE60324021D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002363294 2002-12-16
PCT/JP2003/015840 WO2004055966A1 (en) 2002-12-16 2003-12-11 Piezoelectric actuator driver

Publications (1)

Publication Number Publication Date
DE60324021D1 true DE60324021D1 (en) 2008-11-20

Family

ID=32588201

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60324021T Expired - Lifetime DE60324021D1 (en) 2002-12-16 2003-12-11 Drivers for piezoelectric actuators

Country Status (10)

Country Link
US (1) US20060012937A1 (en)
EP (1) EP1575157B1 (en)
JP (1) JP4037870B2 (en)
KR (1) KR100653673B1 (en)
CN (1) CN100553105C (en)
DE (1) DE60324021D1 (en)
ES (1) ES2314262T3 (en)
HK (1) HK1086114A1 (en)
TW (1) TWI241062B (en)
WO (1) WO2004055966A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6230313B1 (en) 1998-12-23 2001-05-08 Cray Inc. Parallelism performance analysis based on execution trace information
JP5188094B2 (en) * 2007-04-20 2013-04-24 キヤノン株式会社 Drive apparatus, exposure apparatus, and device manufacturing method
DE102013009646A1 (en) * 2013-06-08 2014-12-11 Festo Ag & Co. Kg Piezoelectric actuator device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3872330A (en) * 1973-10-25 1975-03-18 Rockwell International Corp High power acoustical transducer with elastic wave amplification
US4551735A (en) * 1983-05-30 1985-11-05 Canon Kabushiki Kaisha Ink jet recording apparatus
US5436648A (en) * 1991-08-16 1995-07-25 Compaq Computer Corporation Switched digital drive system for an ink jet printhead
JPH05206537A (en) * 1991-11-11 1993-08-13 Omron Corp Piezoelectric element drive device
JP2683982B2 (en) * 1992-04-21 1997-12-03 ワックデータサービス 株式会社 Piezoelectric three-point support method
WO1994027330A1 (en) * 1993-05-18 1994-11-24 Telesensory Corporation Method and apparatus for increasing bimorph displacement range
JPH07141028A (en) * 1993-11-17 1995-06-02 Toyo Electric Mfg Co Ltd Piezoelectric actuator controller
JPH08218255A (en) * 1995-02-09 1996-08-27 Wac Data Service Kk System for controlling piezoelectric actuator
JPH10773A (en) * 1996-06-18 1998-01-06 Brother Ind Ltd Circuit for driving piezoelectric element
JP3506057B2 (en) * 1999-08-20 2004-03-15 日本碍子株式会社 Drive circuit for piezoelectric / electrostrictive element
US6465931B2 (en) * 2000-03-29 2002-10-15 Qortek, Inc. Device and method for driving symmetric load systems
JP4714979B2 (en) * 2000-10-10 2011-07-06 パナソニック株式会社 Head drive circuit for inkjet printer
DE60325258D1 (en) * 2002-10-16 2009-01-22 Cdk Co Ltd Drivers for piezoelectric actuators

Also Published As

Publication number Publication date
TW200417127A (en) 2004-09-01
US20060012937A1 (en) 2006-01-19
TWI241062B (en) 2005-10-01
JPWO2004055966A1 (en) 2006-04-20
EP1575157A4 (en) 2007-09-05
KR20050084300A (en) 2005-08-26
CN1726634A (en) 2006-01-25
KR100653673B1 (en) 2006-12-05
ES2314262T3 (en) 2009-03-16
CN100553105C (en) 2009-10-21
EP1575157B1 (en) 2008-10-08
HK1086114A1 (en) 2006-09-08
JP4037870B2 (en) 2008-01-23
EP1575157A1 (en) 2005-09-14
WO2004055966A1 (en) 2004-07-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition