DE60320722D1 - Teilchenoptische Systeme - Google Patents

Teilchenoptische Systeme

Info

Publication number
DE60320722D1
DE60320722D1 DE60320722T DE60320722T DE60320722D1 DE 60320722 D1 DE60320722 D1 DE 60320722D1 DE 60320722 T DE60320722 T DE 60320722T DE 60320722 T DE60320722 T DE 60320722T DE 60320722 D1 DE60320722 D1 DE 60320722D1
Authority
DE
Germany
Prior art keywords
particle
optical systems
optical
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60320722T
Other languages
English (en)
Inventor
Dirk Dr Preikszas
Michael Dr Steigerwald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss NTS GmbH
Original Assignee
Carl Zeiss NTS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss NTS GmbH filed Critical Carl Zeiss NTS GmbH
Application granted granted Critical
Publication of DE60320722D1 publication Critical patent/DE60320722D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H01J2237/152—Magnetic means
    • H01J2237/1523—Prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Tubes For Measurement (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE60320722T 2002-08-06 2003-08-05 Teilchenoptische Systeme Expired - Lifetime DE60320722D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2002135981 DE10235981B9 (de) 2002-08-06 2002-08-06 Teilchenoptische Vorrichtung und Elektronenmikroskop

Publications (1)

Publication Number Publication Date
DE60320722D1 true DE60320722D1 (de) 2008-06-19

Family

ID=30128746

Family Applications (2)

Application Number Title Priority Date Filing Date
DE2002135981 Expired - Lifetime DE10235981B9 (de) 2001-02-20 2002-08-06 Teilchenoptische Vorrichtung und Elektronenmikroskop
DE60320722T Expired - Lifetime DE60320722D1 (de) 2002-08-06 2003-08-05 Teilchenoptische Systeme

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE2002135981 Expired - Lifetime DE10235981B9 (de) 2001-02-20 2002-08-06 Teilchenoptische Vorrichtung und Elektronenmikroskop

Country Status (3)

Country Link
EP (1) EP1388882B1 (de)
JP (1) JP4693342B2 (de)
DE (2) DE10235981B9 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2579268A1 (de) 2003-09-05 2013-04-10 Carl Zeiss SMT GmbH Optische Partikelsysteme und Anordnungen und optische Partikelkomponenten für solche Systeme und Anordnungen
DE102008064696B4 (de) 2008-12-23 2022-01-27 Carl Zeiss Microscopy Gmbh Teilchenoptische Vorrichtung mit Magnetanordnung und ihre Verwendung zum Abbilden oder Beleuchten
NL2004483A (nl) * 2009-05-26 2010-11-30 Asml Holding Nv Pulse stretcher with reduced energy density on optical components.
JP5948083B2 (ja) * 2012-02-28 2016-07-06 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
US9312093B1 (en) 2014-06-27 2016-04-12 Carl Zeiss Microscopy Gmbh Particle beam device comprising an electrode unit
DE102015207484B4 (de) 2015-04-23 2022-11-03 Carl Zeiss Microscopy Gmbh Hochspannungsversorgungseinheit und Schaltungsanordnung zur Erzeugung einer Hochspannung für ein Teilchenstrahlgerät sowie Teilchenstrahlgerät
DE102015210893B4 (de) 2015-06-15 2019-05-09 Carl Zeiss Microscopy Gmbh Analyseeinrichtung zur Analyse der Energie geladener Teilchen und Teilchenstrahlgerät mit einer Analyseeinrichtung
DE102015210941B9 (de) 2015-06-15 2019-09-19 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät und Verfahren zum Betrieb eines Teilchenstrahlgeräts

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3532699A1 (de) * 1985-09-13 1987-03-26 Zeiss Carl Fa Elektronenenergiefilter vom omega-typ
JPS63276860A (ja) * 1987-05-07 1988-11-15 Nissin Electric Co Ltd 表面解析装置
DE3931970A1 (de) * 1989-09-25 1991-04-04 Roethele S Sektorfeldablenksystem, insbes. fuer ein niederspannungselektronen-mikroskop
DE4041495A1 (de) * 1990-12-22 1992-06-25 Zeiss Carl Fa Elektronenenergiefilter, vorzugsweise vom alpha- oder omega-typ
DE4129403A1 (de) * 1991-09-04 1993-03-11 Zeiss Carl Fa Abbildungssystem fuer strahlung geladener teilchen mit spiegelkorrektor
JP3518271B2 (ja) * 1997-08-28 2004-04-12 株式会社日立製作所 エネルギーフィルタおよびこれを備えた電子顕微鏡
DE19746785A1 (de) * 1997-10-23 1999-04-29 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät mit Energiefilter
JP3441955B2 (ja) * 1998-02-23 2003-09-02 株式会社日立製作所 投射方式の荷電粒子顕微鏡および基板検査システム
DE10107910A1 (de) * 2001-02-20 2002-08-22 Leo Elektronenmikroskopie Gmbh Teilchenstrahlsystem mit einem Spiegelkorrektor

Also Published As

Publication number Publication date
DE10235981A1 (de) 2004-02-26
DE10235981B9 (de) 2009-01-22
EP1388882A3 (de) 2005-05-25
EP1388882B1 (de) 2008-05-07
JP2004134386A (ja) 2004-04-30
JP4693342B2 (ja) 2011-06-01
DE10235981B4 (de) 2008-07-17
EP1388882A2 (de) 2004-02-11
EP1388882A9 (de) 2004-09-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition