DE60317436D1 - Für Längsbeschleunigung abstimmbarer Mikrokreisel - Google Patents
Für Längsbeschleunigung abstimmbarer MikrokreiselInfo
- Publication number
- DE60317436D1 DE60317436D1 DE60317436T DE60317436T DE60317436D1 DE 60317436 D1 DE60317436 D1 DE 60317436D1 DE 60317436 T DE60317436 T DE 60317436T DE 60317436 T DE60317436 T DE 60317436T DE 60317436 D1 DE60317436 D1 DE 60317436D1
- Authority
- DE
- Germany
- Prior art keywords
- gyro
- longitudinal acceleration
- tunable micro
- tunable
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
- G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2002062301 | 2002-10-12 | ||
KR10-2002-0062301A KR100470590B1 (ko) | 2002-10-12 | 2002-10-12 | 병진 가속에 의한 신호 검출을 방지하기 위한 마이크로자이로스코프 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60317436D1 true DE60317436D1 (de) | 2007-12-27 |
DE60317436T2 DE60317436T2 (de) | 2008-04-17 |
Family
ID=36086259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60317436T Expired - Lifetime DE60317436T2 (de) | 2002-10-12 | 2003-10-06 | Für Längsbeschleunigung abstimmbarer Mikrokreisel |
Country Status (7)
Country | Link |
---|---|
US (1) | US6860150B2 (de) |
EP (1) | EP1408302B1 (de) |
JP (1) | JP2004132988A (de) |
KR (1) | KR100470590B1 (de) |
CN (1) | CN1246668C (de) |
DE (1) | DE60317436T2 (de) |
TW (1) | TWI230781B (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3937334B2 (ja) * | 2003-03-27 | 2007-06-27 | 株式会社デンソー | 振動型角速度センサの異常検出装置、異常検出方法、異常検出用プログラム並びに車両制御システム |
US6880400B1 (en) * | 2003-05-23 | 2005-04-19 | The United States Of America As Represented By The Secretary Of The Navy | Phase synchronized array of non-identical oscillators using coupling network |
US20050066728A1 (en) * | 2003-09-25 | 2005-03-31 | Kionix, Inc. | Z-axis angular rate micro electro-mechanical systems (MEMS) sensor |
KR100616641B1 (ko) * | 2004-12-03 | 2006-08-28 | 삼성전기주식회사 | 튜닝포크형 진동식 mems 자이로스코프 |
US7621183B2 (en) | 2005-11-18 | 2009-11-24 | Invensense Inc. | X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging |
US7934423B2 (en) | 2007-12-10 | 2011-05-03 | Invensense, Inc. | Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics |
US20090262074A1 (en) * | 2007-01-05 | 2009-10-22 | Invensense Inc. | Controlling and accessing content using motion processing on mobile devices |
US8508039B1 (en) | 2008-05-08 | 2013-08-13 | Invensense, Inc. | Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics |
US7796872B2 (en) * | 2007-01-05 | 2010-09-14 | Invensense, Inc. | Method and apparatus for producing a sharp image from a handheld device containing a gyroscope |
US8952832B2 (en) | 2008-01-18 | 2015-02-10 | Invensense, Inc. | Interfacing application programs and motion sensors of a device |
US8020441B2 (en) | 2008-02-05 | 2011-09-20 | Invensense, Inc. | Dual mode sensing for vibratory gyroscope |
US8250921B2 (en) | 2007-07-06 | 2012-08-28 | Invensense, Inc. | Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics |
US8462109B2 (en) | 2007-01-05 | 2013-06-11 | Invensense, Inc. | Controlling and accessing content using motion processing on mobile devices |
US8141424B2 (en) | 2008-09-12 | 2012-03-27 | Invensense, Inc. | Low inertia frame for detecting coriolis acceleration |
US8047075B2 (en) | 2007-06-21 | 2011-11-01 | Invensense, Inc. | Vertically integrated 3-axis MEMS accelerometer with electronics |
JP4687791B2 (ja) * | 2007-09-19 | 2011-05-25 | 株式会社村田製作所 | 複合センサおよび加速度センサ |
US7677099B2 (en) * | 2007-11-05 | 2010-03-16 | Invensense Inc. | Integrated microelectromechanical systems (MEMS) vibrating mass Z-axis rate sensor |
US7755367B2 (en) | 2008-06-02 | 2010-07-13 | Infineon Technologies, Ag | Silicon MEMS resonators |
JP5228675B2 (ja) * | 2008-07-29 | 2013-07-03 | 富士通株式会社 | 角速度センサおよび電子装置 |
DE102008057281A1 (de) * | 2008-11-14 | 2010-05-20 | Northrop Grumman Litef Gmbh | Simulationsverfahren für das Betriebsverhalten eines Corioliskreisels |
US9097524B2 (en) | 2009-09-11 | 2015-08-04 | Invensense, Inc. | MEMS device with improved spring system |
US8534127B2 (en) | 2009-09-11 | 2013-09-17 | Invensense, Inc. | Extension-mode angular velocity sensor |
CN102175236B (zh) * | 2011-02-14 | 2012-12-12 | 厦门大学 | 一种可调整降低正交误差的微陀螺仪 |
ITTO20110688A1 (it) * | 2011-07-28 | 2013-01-29 | St Microelectronics Srl | Giroscopio microelettromeccanico con funzione di autocalibrazione e metodo di calibrazione di un giroscopio microelettromeccanico |
US8875578B2 (en) * | 2011-10-26 | 2014-11-04 | Silicon Laboratories Inc. | Electronic damper circuit for MEMS sensors and resonators |
FI125238B (en) * | 2012-06-29 | 2015-07-31 | Murata Manufacturing Co | Improved vibration gyroscope |
KR101318421B1 (ko) | 2013-04-08 | 2013-10-16 | 한국생산기술연구원 | 지혈 및 상처치유용 카복시메틸셀룰로오스 폼 및 그의 제조방법 |
CN106066175B (zh) | 2015-04-24 | 2019-09-24 | 意法半导体股份有限公司 | 用于感测角速率的微机电陀螺仪及感测角速率的方法 |
KR101679592B1 (ko) * | 2015-05-12 | 2016-11-25 | 주식회사 신성씨앤티 | 대칭형 z축 멤스 자이로스코프 |
ITUA20162172A1 (it) | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5408877A (en) * | 1992-03-16 | 1995-04-25 | The Charles Stark Draper Laboratory, Inc. | Micromechanical gyroscopic transducer with improved drive and sense capabilities |
DE4442033C2 (de) * | 1994-11-25 | 1997-12-18 | Bosch Gmbh Robert | Drehratensensor |
KR100211025B1 (ko) * | 1996-12-20 | 1999-07-15 | 정선종 | 진동형 마이크로 자이로스코프 |
KR100231715B1 (ko) * | 1997-11-25 | 1999-11-15 | 정선종 | 평면 진동형 마이크로 자이로스코프 |
KR100493149B1 (ko) * | 1999-01-15 | 2005-06-02 | 삼성전자주식회사 | 대칭형 z축 마이크로자이로스코프 및 그 제조방법 |
KR100363786B1 (ko) * | 1999-05-13 | 2002-12-11 | 삼성전기주식회사 | 마이크로 자이로스코프 |
KR100363785B1 (ko) * | 1999-06-04 | 2002-12-11 | 삼성전기주식회사 | 마이크로 자이로스코프 |
-
2002
- 2002-10-12 KR KR10-2002-0062301A patent/KR100470590B1/ko not_active IP Right Cessation
-
2003
- 2003-08-07 US US10/635,471 patent/US6860150B2/en not_active Expired - Lifetime
- 2003-10-06 EP EP03256281A patent/EP1408302B1/de not_active Expired - Fee Related
- 2003-10-06 DE DE60317436T patent/DE60317436T2/de not_active Expired - Lifetime
- 2003-10-10 CN CNB2003101010178A patent/CN1246668C/zh not_active Expired - Fee Related
- 2003-10-10 JP JP2003352772A patent/JP2004132988A/ja active Pending
- 2003-10-13 TW TW092128274A patent/TWI230781B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE60317436T2 (de) | 2008-04-17 |
EP1408302A3 (de) | 2005-10-12 |
JP2004132988A (ja) | 2004-04-30 |
TWI230781B (en) | 2005-04-11 |
KR100470590B1 (ko) | 2005-03-08 |
US6860150B2 (en) | 2005-03-01 |
CN1246668C (zh) | 2006-03-22 |
CN1497240A (zh) | 2004-05-19 |
TW200416394A (en) | 2004-09-01 |
KR20040035946A (ko) | 2004-04-30 |
EP1408302A2 (de) | 2004-04-14 |
EP1408302B1 (de) | 2007-11-14 |
US20040069062A1 (en) | 2004-04-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |