DE60212581D1 - Method for generating radiation - Google Patents

Method for generating radiation

Info

Publication number
DE60212581D1
DE60212581D1 DE60212581T DE60212581T DE60212581D1 DE 60212581 D1 DE60212581 D1 DE 60212581D1 DE 60212581 T DE60212581 T DE 60212581T DE 60212581 T DE60212581 T DE 60212581T DE 60212581 D1 DE60212581 D1 DE 60212581D1
Authority
DE
Germany
Prior art keywords
target
plasma
directing
predetermined period
radiating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60212581T
Other languages
German (de)
Other versions
DE60212581T2 (en
Inventor
Magnus Berglund
Bjoern Hansson
Oscar Hemberg
Hans Hertz
Lars Rymell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jettec AB
Original Assignee
Jettec AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jettec AB filed Critical Jettec AB
Publication of DE60212581D1 publication Critical patent/DE60212581D1/en
Application granted granted Critical
Publication of DE60212581T2 publication Critical patent/DE60212581T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/10—Power supply arrangements for feeding the X-ray tube
    • H05G1/20—Power supply arrangements for feeding the X-ray tube with high-frequency ac; with pulse trains
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

Abstract

A method of producing a radiating plasma with an increased flux stability and uniformity is disclosed. The method comprises the steps of (210) generating a primary target by urging a liquid under pressure through a nozzle; (220) directing an energy pre-pulse onto the primary target to generate a secondary target in the form of a gas or plasma cloud; (230) allowing the thus formed secondary target to expand for a predetermined period of time; and (240) directing a main energy pulse onto the secondary target when the predetermined period of time has elapsed in order to produce a plasma radiating X-ray or EUV radiation. The pre-pulse has a beam waist size that is larger, in at least one dimension, than the corresponding dimension of the primary target. <IMAGE>
DE60212581T 2002-05-13 2002-05-13 METHOD AND ARRANGEMENT FOR GENERATING RADIATION Expired - Lifetime DE60212581T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02076898A EP1365635B1 (en) 2002-05-13 2002-05-13 Method for producing radiation

Publications (2)

Publication Number Publication Date
DE60212581D1 true DE60212581D1 (en) 2006-08-03
DE60212581T2 DE60212581T2 (en) 2007-07-05

Family

ID=29286188

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60212581T Expired - Lifetime DE60212581T2 (en) 2002-05-13 2002-05-13 METHOD AND ARRANGEMENT FOR GENERATING RADIATION

Country Status (5)

Country Link
EP (1) EP1365635B1 (en)
KR (1) KR20050005478A (en)
AT (1) ATE331424T1 (en)
DE (1) DE60212581T2 (en)
TW (1) TW569652B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004005242B4 (en) * 2004-01-30 2006-04-20 Xtreme Technologies Gmbh Method and apparatus for the plasma-based generation of intense short-wave radiation
KR20060125905A (en) * 2004-03-17 2006-12-06 사이머 인코포레이티드 Lpp euv light source
DE102005014433B3 (en) * 2005-03-24 2006-10-05 Xtreme Technologies Gmbh Method and device for the efficient generation of short-wave radiation based on a laser-generated plasma

Also Published As

Publication number Publication date
KR20050005478A (en) 2005-01-13
EP1365635A1 (en) 2003-11-26
ATE331424T1 (en) 2006-07-15
EP1365635B1 (en) 2006-06-21
DE60212581T2 (en) 2007-07-05
TW569652B (en) 2004-01-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition