DE60205845D1 - Magnetlagersteuerungsvorrichtung - Google Patents

Magnetlagersteuerungsvorrichtung

Info

Publication number
DE60205845D1
DE60205845D1 DE60205845T DE60205845T DE60205845D1 DE 60205845 D1 DE60205845 D1 DE 60205845D1 DE 60205845 T DE60205845 T DE 60205845T DE 60205845 T DE60205845 T DE 60205845T DE 60205845 D1 DE60205845 D1 DE 60205845D1
Authority
DE
Germany
Prior art keywords
control device
magnetic bearing
bearing control
magnetic
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60205845T
Other languages
English (en)
Other versions
DE60205845T2 (de
Inventor
Toshiaki Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Japan Ltd filed Critical BOC Edwards Japan Ltd
Application granted granted Critical
Publication of DE60205845D1 publication Critical patent/DE60205845D1/de
Publication of DE60205845T2 publication Critical patent/DE60205845T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0457—Details of the power supply to the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
DE2002605845 2001-12-04 2002-11-28 Magnetlagersteuerungsvorrichtung Expired - Lifetime DE60205845T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001369694A JP4017383B2 (ja) 2001-12-04 2001-12-04 磁気軸受制御装置
JP2001369694 2001-12-04

Publications (2)

Publication Number Publication Date
DE60205845D1 true DE60205845D1 (de) 2005-10-06
DE60205845T2 DE60205845T2 (de) 2006-01-26

Family

ID=19179044

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2002605845 Expired - Lifetime DE60205845T2 (de) 2001-12-04 2002-11-28 Magnetlagersteuerungsvorrichtung

Country Status (3)

Country Link
EP (1) EP1318310B1 (de)
JP (1) JP4017383B2 (de)
DE (1) DE60205845T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005140190A (ja) * 2003-11-05 2005-06-02 Koyo Seiko Co Ltd 電力増幅装置および磁気軸受
JP4502667B2 (ja) * 2004-03-04 2010-07-14 エドワーズ株式会社 磁気軸受装置及び該磁気軸受装置を搭載したターボ分子ポンプ
JP2005273802A (ja) 2004-03-25 2005-10-06 Boc Edwards Kk 磁気軸受装置及び該磁気軸受装置を搭載したターボ分子ポンプ
JP6144527B2 (ja) 2013-04-16 2017-06-07 エドワーズ株式会社 磁気軸受装置、及び該磁気軸受装置を備えた真空ポンプ
JP6321949B2 (ja) * 2013-11-29 2018-05-09 エドワーズ株式会社 磁気軸受装置、及び真空ポンプ
JP7164471B2 (ja) * 2019-03-15 2022-11-01 エドワーズ株式会社 制御装置、及び該制御装置を備えた真空ポンプ
CN113295411B (zh) * 2021-05-26 2023-05-23 苏州中科科仪技术发展有限公司 一种分子泵磁轴承检测装置及检测方法
CN114738385B (zh) * 2022-04-28 2023-03-21 珠海格力电器股份有限公司 一种磁悬浮轴承系统及其控制方法、装置和存储介质

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3550465B2 (ja) * 1996-08-30 2004-08-04 株式会社日立製作所 ターボ真空ポンプ及びその運転方法
JP4005654B2 (ja) * 1996-12-26 2007-11-07 Ｎｔｎ株式会社 磁気浮上型遠心式ポンプ装置
US6398524B1 (en) * 1997-12-02 2002-06-04 Ebara Corporation Magnetic bearing control device and turbo-molecular pump device
KR20010071171A (ko) * 1998-04-22 2001-07-28 톰 메이져 하이브리드 자기 베어링을 갖춘 이식가능한 원심 혈액펌프
JP3215842B2 (ja) * 1999-03-29 2001-10-09 セイコーインスツルメンツ株式会社 磁気軸受保護装置及びターボ分子ポンプ

Also Published As

Publication number Publication date
EP1318310A1 (de) 2003-06-11
DE60205845T2 (de) 2006-01-26
JP2003172354A (ja) 2003-06-20
JP4017383B2 (ja) 2007-12-05
EP1318310B1 (de) 2005-08-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., TOKIO, JP

8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., YACHIYO, CHIBA, JP