DE60201383D1 - Dosierrohr für Gasabgabe - Google Patents
Dosierrohr für GasabgabeInfo
- Publication number
- DE60201383D1 DE60201383D1 DE60201383T DE60201383T DE60201383D1 DE 60201383 D1 DE60201383 D1 DE 60201383D1 DE 60201383 T DE60201383 T DE 60201383T DE 60201383 T DE60201383 T DE 60201383T DE 60201383 D1 DE60201383 D1 DE 60201383D1
- Authority
- DE
- Germany
- Prior art keywords
- gas delivery
- dosing tube
- dosing
- tube
- delivery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45576—Coaxial inlets for each gas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45578—Elongated nozzles, tubes with holes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45595—Atmospheric CVD gas inlets with no enclosed reaction chamber
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/01—Control of flow without auxiliary power
- G05D7/0186—Control of flow without auxiliary power without moving parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Automation & Control Theory (AREA)
- General Physics & Mathematics (AREA)
- Chemical Vapour Deposition (AREA)
- Pipeline Systems (AREA)
- Pipe Accessories (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/905,349 US20020134507A1 (en) | 1999-12-22 | 2001-07-13 | Gas delivery metering tube |
US905349 | 2001-07-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60201383D1 true DE60201383D1 (de) | 2004-11-04 |
DE60201383T2 DE60201383T2 (de) | 2006-02-16 |
Family
ID=25420665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60201383T Expired - Fee Related DE60201383T2 (de) | 2001-07-13 | 2002-07-15 | Dosierrohr für Gasabgabe |
Country Status (8)
Country | Link |
---|---|
US (1) | US20020134507A1 (de) |
EP (1) | EP1276031B1 (de) |
JP (1) | JP3621393B2 (de) |
KR (1) | KR20030007162A (de) |
CN (1) | CN1397755A (de) |
DE (1) | DE60201383T2 (de) |
SG (1) | SG115486A1 (de) |
TW (1) | TWI240017B (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6890386B2 (en) * | 2001-07-13 | 2005-05-10 | Aviza Technology, Inc. | Modular injector and exhaust assembly |
KR100829327B1 (ko) | 2002-04-05 | 2008-05-13 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 반응 용기 |
US20040144321A1 (en) * | 2003-01-28 | 2004-07-29 | Eastman Kodak Company | Method of designing a thermal physical vapor deposition system |
DE10346033A1 (de) * | 2003-10-02 | 2005-05-04 | Siltronic Ag | Gasverdünnungsvorrichtung |
US20050244580A1 (en) * | 2004-04-30 | 2005-11-03 | Eastman Kodak Company | Deposition apparatus for temperature sensitive materials |
JP5008252B2 (ja) * | 2004-05-18 | 2012-08-22 | パナソニック株式会社 | 燃料電池用液体燃料収納容器及び燃料電池システム |
JP4775641B2 (ja) * | 2006-05-23 | 2011-09-21 | 株式会社島津製作所 | ガス導入装置 |
CN101460659B (zh) * | 2006-06-02 | 2011-12-07 | 应用材料股份有限公司 | 利用压差测量的气流控制 |
US8123902B2 (en) * | 2007-03-21 | 2012-02-28 | Applied Materials, Inc. | Gas flow diffuser |
US8673080B2 (en) | 2007-10-16 | 2014-03-18 | Novellus Systems, Inc. | Temperature controlled showerhead |
US8372482B2 (en) * | 2009-02-27 | 2013-02-12 | Goodrich Corporation | Methods and apparatus for controlled chemical vapor deposition |
JP5141607B2 (ja) * | 2009-03-13 | 2013-02-13 | 東京エレクトロン株式会社 | 成膜装置 |
DE102009043840A1 (de) * | 2009-08-24 | 2011-03-03 | Aixtron Ag | CVD-Reaktor mit streifenförmig verlaufenden Gaseintrittszonen sowie Verfahren zum Abscheiden einer Schicht auf einem Substrat in einem derartigen CVD-Reaktor |
KR101102807B1 (ko) * | 2009-11-27 | 2012-01-05 | 이희영 | 마이크로파 온열치료기 |
FI124113B (fi) * | 2010-08-30 | 2014-03-31 | Beneq Oy | Laitteisto ja menetelmä substraatin pinnan muokkaamiseksi |
CN103403843B (zh) | 2011-03-04 | 2016-12-14 | 诺发系统公司 | 混合型陶瓷喷淋头 |
KR20140038070A (ko) * | 2012-09-20 | 2014-03-28 | 삼성코닝정밀소재 주식회사 | 가스 분사 장치 및 이에 사용되는 인젝터 파이프 |
US10112836B2 (en) * | 2012-11-26 | 2018-10-30 | The Regents Of The University Of Michigan | Continuous nanosynthesis apparatus and process |
TWI469179B (zh) * | 2012-11-27 | 2015-01-11 | Ind Tech Res Inst | 電漿裝置 |
US9512519B2 (en) | 2012-12-03 | 2016-12-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Atomic layer deposition apparatus and method |
JP6465816B2 (ja) * | 2013-02-14 | 2019-02-06 | アライアンス・マグネシウム | HClを生成する水素ガス拡散陽極の集成装置及び当該集成装置を含む電解セル |
CN103396008A (zh) * | 2013-08-02 | 2013-11-20 | 蚌埠雷诺真空技术有限公司 | 磁控溅射真空室均匀进气装置 |
DE102013113913A1 (de) | 2013-12-12 | 2015-06-18 | Thyssenkrupp Ag | Anlagenverbund zur Stahlerzeugung und Verfahren zum Betreiben des Anlagenverbundes |
JP5924336B2 (ja) * | 2013-12-27 | 2016-05-25 | Jfeスチール株式会社 | 化学蒸着処理の原料ガス供給用ノズル |
JP6320824B2 (ja) * | 2014-03-31 | 2018-05-09 | 株式会社東芝 | ガス供給管、およびガス処理装置 |
US10741365B2 (en) * | 2014-05-05 | 2020-08-11 | Lam Research Corporation | Low volume showerhead with porous baffle |
US10378107B2 (en) | 2015-05-22 | 2019-08-13 | Lam Research Corporation | Low volume showerhead with faceplate holes for improved flow uniformity |
US10023959B2 (en) | 2015-05-26 | 2018-07-17 | Lam Research Corporation | Anti-transient showerhead |
US20170207078A1 (en) * | 2016-01-15 | 2017-07-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Atomic layer deposition apparatus and semiconductor process |
JP6462161B2 (ja) * | 2016-02-09 | 2019-01-30 | 株式会社Kokusai Electric | 基板処理装置および半導体装置の製造方法 |
US10400332B2 (en) * | 2017-03-14 | 2019-09-03 | Eastman Kodak Company | Deposition system with interlocking deposition heads |
US11610765B1 (en) * | 2018-08-09 | 2023-03-21 | Apjet, Inc. | Atmospheric-pressure plasma processing apparatus and method using argon plasma gas |
KR102514673B1 (ko) * | 2018-10-26 | 2023-03-27 | 제이에프이 스틸 가부시키가이샤 | 슬릿 노즐 및 고규소 강대의 제조 방법 |
WO2020097040A1 (en) | 2018-11-06 | 2020-05-14 | Corning Incorporated | Methods and apparatus comprising a first conduit circumscribed by a second conduit |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4854266A (en) * | 1987-11-02 | 1989-08-08 | Btu Engineering Corporation | Cross-flow diffusion furnace |
US6022414A (en) * | 1994-07-18 | 2000-02-08 | Semiconductor Equipment Group, Llc | Single body injector and method for delivering gases to a surface |
US20010047756A1 (en) * | 1999-05-17 | 2001-12-06 | Bartholomew Lawrence Duane | Gas distribution system |
KR100394571B1 (ko) * | 1999-09-17 | 2003-08-14 | 삼성전자주식회사 | 화학기상증착용 튜브 |
-
2001
- 2001-07-13 US US09/905,349 patent/US20020134507A1/en not_active Abandoned
-
2002
- 2002-07-09 SG SG200204131A patent/SG115486A1/en unknown
- 2002-07-09 TW TW091115232A patent/TWI240017B/zh not_active IP Right Cessation
- 2002-07-12 CN CN02140679A patent/CN1397755A/zh active Pending
- 2002-07-12 KR KR1020020040745A patent/KR20030007162A/ko not_active Application Discontinuation
- 2002-07-15 JP JP2002206050A patent/JP3621393B2/ja not_active Expired - Fee Related
- 2002-07-15 DE DE60201383T patent/DE60201383T2/de not_active Expired - Fee Related
- 2002-07-15 EP EP02254962A patent/EP1276031B1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE60201383T2 (de) | 2006-02-16 |
US20020134507A1 (en) | 2002-09-26 |
EP1276031B1 (de) | 2004-09-29 |
CN1397755A (zh) | 2003-02-19 |
SG115486A1 (en) | 2005-10-28 |
JP3621393B2 (ja) | 2005-02-16 |
EP1276031A1 (de) | 2003-01-15 |
JP2003130280A (ja) | 2003-05-08 |
KR20030007162A (ko) | 2003-01-23 |
TWI240017B (en) | 2005-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |