DE602008001548D1 - Messverfahren des Kriechens einer Dünnschicht, die zwischen zwei starre Substrate eingeschoben ist und deren eines Ende eingeklemmt wird - Google Patents

Messverfahren des Kriechens einer Dünnschicht, die zwischen zwei starre Substrate eingeschoben ist und deren eines Ende eingeklemmt wird

Info

Publication number
DE602008001548D1
DE602008001548D1 DE602008001548T DE602008001548T DE602008001548D1 DE 602008001548 D1 DE602008001548 D1 DE 602008001548D1 DE 602008001548 T DE602008001548 T DE 602008001548T DE 602008001548 T DE602008001548 T DE 602008001548T DE 602008001548 D1 DE602008001548 D1 DE 602008001548D1
Authority
DE
Germany
Prior art keywords
rigid substrates
thin film
creep
clamped
measuring method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602008001548T
Other languages
English (en)
Inventor
Cecile Petitdidier
Raluca Tiron
Benedicte Mortini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE602008001548D1 publication Critical patent/DE602008001548D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/20—Investigating strength properties of solid materials by application of mechanical stress by applying steady bending forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied
    • G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
    • G01N2203/0071—Creep
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied
    • G01N2203/0092—Visco-elasticity, solidification, curing, cross-linking degree, vulcanisation or strength properties of semi-solid materials
    • G01N2203/0094—Visco-elasticity

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Laminated Bodies (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE602008001548T 2007-12-20 2008-12-18 Messverfahren des Kriechens einer Dünnschicht, die zwischen zwei starre Substrate eingeschoben ist und deren eines Ende eingeklemmt wird Active DE602008001548D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0708955A FR2925682B1 (fr) 2007-12-20 2007-12-20 Dispositif de mesure du fluage d'un film mince, intercale entre deux substrats rigides, avec une extremite encastree et procede d'utilisation

Publications (1)

Publication Number Publication Date
DE602008001548D1 true DE602008001548D1 (de) 2010-07-29

Family

ID=39677424

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602008001548T Active DE602008001548D1 (de) 2007-12-20 2008-12-18 Messverfahren des Kriechens einer Dünnschicht, die zwischen zwei starre Substrate eingeschoben ist und deren eines Ende eingeklemmt wird

Country Status (5)

Country Link
US (1) US8152364B2 (de)
EP (1) EP2072995B1 (de)
AT (1) ATE471509T1 (de)
DE (1) DE602008001548D1 (de)
FR (1) FR2925682B1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2925682B1 (fr) * 2007-12-20 2010-01-01 Commissariat Energie Atomique Dispositif de mesure du fluage d'un film mince, intercale entre deux substrats rigides, avec une extremite encastree et procede d'utilisation
KR20140081358A (ko) * 2012-12-21 2014-07-01 삼성전기주식회사 접합력 평가방법, 접합력 평가장치 및 접합력 평가용 표본
US9772268B2 (en) 2015-03-30 2017-09-26 International Business Machines Corporation Predicting semiconductor package warpage
CN113049399B (zh) * 2021-03-12 2023-11-21 广西科技大学 一种土工合成材料多功能蠕变仪及其试验方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2670624A (en) * 1950-04-04 1954-03-02 Standard Oil Co Apparatus for measurement of low rate deformability
JP2964094B2 (ja) * 1990-08-23 1999-10-18 セイコーインスツルメンツ株式会社 引張り式動的粘弾性測定装置
US5199305A (en) * 1991-10-21 1993-04-06 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Method and apparatus for measuring the strain developed in a coated surface
US5184517A (en) * 1991-11-01 1993-02-09 Robert Kelzer Printed circuit board test fixture and method
US5187987A (en) * 1991-11-19 1993-02-23 The Pennsylvania Research Corporation Bending beam creep test device with piston having a gas bearing
US5710426A (en) * 1996-03-01 1998-01-20 Ta Instruments, Inc. Dynamic and thermal mechanical analyzer having an optical encoder with diffraction grating and a linear permanent magnet motor
JP3939053B2 (ja) * 1999-09-28 2007-06-27 エスアイアイ・ナノテクノロジー株式会社 動的粘弾性測定装置
EP1490734B1 (de) * 2002-04-03 2009-06-24 3M Innovative Properties Company Produkte zur anzeige der zeit oder zeit-temperatur
US7716987B2 (en) * 2006-07-31 2010-05-18 University Of Dayton Non-contact thermo-elastic property measurement and imaging system for quantitative nondestructive evaluation of materials
CN101236230A (zh) * 2007-02-02 2008-08-06 深圳富泰宏精密工业有限公司 检测设备
FR2925682B1 (fr) * 2007-12-20 2010-01-01 Commissariat Energie Atomique Dispositif de mesure du fluage d'un film mince, intercale entre deux substrats rigides, avec une extremite encastree et procede d'utilisation

Also Published As

Publication number Publication date
US20090260450A1 (en) 2009-10-22
FR2925682B1 (fr) 2010-01-01
ATE471509T1 (de) 2010-07-15
EP2072995A1 (de) 2009-06-24
US8152364B2 (en) 2012-04-10
EP2072995B1 (de) 2010-06-16
FR2925682A1 (fr) 2009-06-26

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERG, FR