DE602008000820D1 - Magnetic sensor and manufacturing method therefor - Google Patents

Magnetic sensor and manufacturing method therefor

Info

Publication number
DE602008000820D1
DE602008000820D1 DE200860000820 DE602008000820T DE602008000820D1 DE 602008000820 D1 DE602008000820 D1 DE 602008000820D1 DE 200860000820 DE200860000820 DE 200860000820 DE 602008000820 T DE602008000820 T DE 602008000820T DE 602008000820 D1 DE602008000820 D1 DE 602008000820D1
Authority
DE
Germany
Prior art keywords
manufacturing
magnetic sensor
method therefor
therefor
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200860000820
Other languages
German (de)
Inventor
Junichi Azumi
Futoyoshi Kou
Akihiro Fuse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Publication of DE602008000820D1 publication Critical patent/DE602008000820D1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0047—Housings or packaging of magnetic sensors ; Holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices
DE200860000820 2007-06-13 2008-06-12 Magnetic sensor and manufacturing method therefor Active DE602008000820D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007156423 2007-06-13
JP2008108061A JP5157611B2 (en) 2007-06-13 2008-04-17 Magnetic sensor and manufacturing method thereof

Publications (1)

Publication Number Publication Date
DE602008000820D1 true DE602008000820D1 (en) 2010-04-29

Family

ID=40188644

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200860000820 Active DE602008000820D1 (en) 2007-06-13 2008-06-12 Magnetic sensor and manufacturing method therefor

Country Status (4)

Country Link
JP (1) JP5157611B2 (en)
KR (1) KR100996712B1 (en)
CN (1) CN101325210B (en)
DE (1) DE602008000820D1 (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8451003B2 (en) 2009-07-29 2013-05-28 Tdk Corporation Magnetic sensor having magneto-resistive elements on a substrate
FR2955942B1 (en) * 2010-01-29 2013-01-04 Centre Nat Rech Scient INTEGRATED MAGNETOMETER AND METHOD FOR MANUFACTURING THE SAME
IT1403421B1 (en) 2010-12-23 2013-10-17 St Microelectronics Srl INTEGRATED MAGNETORESISTIVE SENSOR, IN PARTICULAR TRIASSIAL MAGNETORESISTIVE SENSOR AND ITS MANUFACTURING PROCEDURE
CN202433514U (en) * 2011-01-17 2012-09-12 江苏多维科技有限公司 Independently-packaged bridge-type magnetic field sensor
CN102226835A (en) 2011-04-06 2011-10-26 江苏多维科技有限公司 Single-chip double-axis magnetic field sensor and preparation method thereof
CN202305777U (en) * 2011-04-06 2012-07-04 江苏多维科技有限公司 Monolithic biaxial bridge-type magnetic field sensor
CN102385043B (en) * 2011-08-30 2013-08-21 江苏多维科技有限公司 Magnetic tunnel junction (MTJ) triaxial magnetic field sensor and packaging method thereof
CN102651343B (en) * 2012-03-16 2014-12-24 京东方科技集团股份有限公司 Manufacturing method of array substrate, array substrate and display device
DE102012204835A1 (en) * 2012-03-27 2013-10-02 Robert Bosch Gmbh Sensor, method for manufacturing a sensor and method for mounting a sensor
CN102830372A (en) * 2012-09-05 2012-12-19 复旦大学 Three-dimensional anisotropic magnetic field sensor employing 45-degree oblique angle and manufacturing method thereof
CN102830374A (en) * 2012-09-05 2012-12-19 复旦大学 Three-dimensional tunnelling magnetic field sensor using angle of 45 degrees and manufacturing method thereof
WO2014059110A1 (en) * 2012-10-12 2014-04-17 Memsic, Inc. Monolithic three-axis magnetic field sensor
CN103839320A (en) * 2012-11-23 2014-06-04 北京嘉岳同乐极电子有限公司 Magnetic sensor used for financial counterfeit detection machine and manufacturing method thereof
JP6688409B2 (en) * 2013-03-25 2020-04-28 ローム株式会社 Semiconductor device
CN103630854B (en) * 2013-10-24 2016-01-13 黑龙江大学 Space three-dimensional magnetic field detection sensor
JP5766321B1 (en) 2014-03-07 2015-08-19 三菱電機株式会社 TMR magnetic sensor and manufacturing method thereof
WO2016075763A1 (en) * 2014-11-12 2016-05-19 株式会社日立製作所 Magnetic sensor
CN108291948B (en) * 2015-12-03 2021-04-13 阿尔卑斯阿尔派株式会社 Magnetic detection device and method for manufacturing the same
US10067201B2 (en) * 2016-04-14 2018-09-04 Texas Instruments Incorporated Wiring layout to reduce magnetic field
US11360124B2 (en) * 2018-03-01 2022-06-14 Yokogawa Electric Corporation Current measuring device, current measuring method, and non-transitory computer-readable storage medium
JP7107330B2 (en) * 2020-03-27 2022-07-27 Tdk株式会社 Magnetic sensor and manufacturing method thereof
CN111965571B (en) * 2020-07-29 2022-11-11 珠海多创科技有限公司 Preparation method of GMR magnetic field sensor
JP7347397B2 (en) * 2020-10-28 2023-09-20 Tdk株式会社 Magnetic sensor and its manufacturing method
CN113030803A (en) * 2021-03-01 2021-06-25 歌尔微电子股份有限公司 Magnetic sensor, method for manufacturing magnetic sensor, and electronic device
JP2023125569A (en) * 2022-02-28 2023-09-07 ソニーセミコンダクタソリューションズ株式会社 Storage device, electronic apparatus, and manufacturing method of storage device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3596600B2 (en) * 2000-06-02 2004-12-02 ヤマハ株式会社 Magnetic sensor and method of manufacturing the same
JP3971934B2 (en) * 2001-03-07 2007-09-05 ヤマハ株式会社 Magnetic sensor and its manufacturing method
DE10145300C1 (en) * 2001-09-14 2002-10-17 Bosch Gmbh Robert Sensor element for angle or rotation sensor, uses 2 pairs of magneto-resistive in 2 angled planes connected in Wheatstone bridge circuit
JP4085859B2 (en) 2002-03-27 2008-05-14 ヤマハ株式会社 Magnetic sensor and manufacturing method thereof
JP4177032B2 (en) * 2002-06-04 2008-11-05 株式会社ワコー Three-dimensional magnetic sensor and manufacturing method thereof

Also Published As

Publication number Publication date
CN101325210A (en) 2008-12-17
KR100996712B1 (en) 2010-11-25
JP5157611B2 (en) 2013-03-06
CN101325210B (en) 2010-11-24
KR20080109683A (en) 2008-12-17
JP2009020092A (en) 2009-01-29

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