DE602007009911D1 - Elektromagnetischer Mikroaktuator und Herstellungsverfahren dafür - Google Patents

Elektromagnetischer Mikroaktuator und Herstellungsverfahren dafür

Info

Publication number
DE602007009911D1
DE602007009911D1 DE602007009911T DE602007009911T DE602007009911D1 DE 602007009911 D1 DE602007009911 D1 DE 602007009911D1 DE 602007009911 T DE602007009911 T DE 602007009911T DE 602007009911 T DE602007009911 T DE 602007009911T DE 602007009911 D1 DE602007009911 D1 DE 602007009911D1
Authority
DE
Germany
Prior art keywords
manufacturing
method therefor
electromagnetic microactuator
microactuator
electromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007009911T
Other languages
English (en)
Inventor
Young-Chul Ko
Jin-Woo Cho
Hee-Moon Jeong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of DE602007009911D1 publication Critical patent/DE602007009911D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/101Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572Magnetic force
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
DE602007009911T 2006-09-01 2007-01-19 Elektromagnetischer Mikroaktuator und Herstellungsverfahren dafür Active DE602007009911D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060084239A KR100829563B1 (ko) 2006-09-01 2006-09-01 전자기방식 마이크로 액츄에이터 및 그 제조방법

Publications (1)

Publication Number Publication Date
DE602007009911D1 true DE602007009911D1 (de) 2010-12-02

Family

ID=38754552

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007009911T Active DE602007009911D1 (de) 2006-09-01 2007-01-19 Elektromagnetischer Mikroaktuator und Herstellungsverfahren dafür

Country Status (5)

Country Link
US (1) US7616365B2 (de)
EP (1) EP1895349B1 (de)
JP (1) JP4576410B2 (de)
KR (1) KR100829563B1 (de)
DE (1) DE602007009911D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5161156B2 (ja) * 2009-06-12 2013-03-13 日本電信電話株式会社 可変焦点レンズ
US8305672B2 (en) * 2010-02-23 2012-11-06 Microvision, Inc. Magnetically actuated system
US9401240B2 (en) * 2010-03-01 2016-07-26 California Institute Of Technology Integrated passive iron shims in silicon
CN103399402B (zh) * 2013-08-13 2015-07-08 北京纳米能源与系统研究所 一种电磁驱动微型二维扫描镜装置
DE102015217935A1 (de) * 2015-09-18 2017-03-23 Robert Bosch Gmbh Mikromechanische Aktorvorrichtung und Verfahren zum Verkippen einer mikromechanischen Aktorvorrichtung
CN108152801B (zh) * 2017-11-10 2022-01-11 无锡英菲感知技术有限公司 一种动态形变可控微镜
CN115097593B (zh) * 2022-08-26 2023-03-24 北京瑞控信科技股份有限公司 一种一维高速动磁式柔性支撑快速反射镜

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232861B1 (en) * 1995-06-05 2001-05-15 Nihon Shingo Kabushiki Kaisha Electromagnetic actuator
AU2001286745A1 (en) * 2000-08-27 2002-03-13 Corning Intellisense Corporation Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
US6388789B1 (en) * 2000-09-19 2002-05-14 The Charles Stark Draper Laboratory, Inc. Multi-axis magnetically actuated device
JP3926552B2 (ja) * 2000-10-25 2007-06-06 日本信号株式会社 アクチュエ−タ
US20020112963A1 (en) * 2001-02-22 2002-08-22 Nikon Corporation Methods for fabricating high-precision thermally stable electromagnetic coils
JP3740444B2 (ja) 2001-07-11 2006-02-01 キヤノン株式会社 光偏向器、それを用いた光学機器、ねじれ揺動体
US6882455B2 (en) * 2001-09-19 2005-04-19 Olympus Corporation Movable structure, and deflection mirror element, optical switch element and shape variable mirror including the movable structure
US6897990B2 (en) * 2001-12-28 2005-05-24 Canon Kabushiki Kaisha Rocking member apparatus
US6894823B2 (en) * 2002-04-26 2005-05-17 Corning Intellisense Llc Magnetically actuated microelectromechanical devices and method of manufacture
KR100439700B1 (ko) * 2002-07-16 2004-07-12 한국과학기술원 전자기력으로 구동되는 미소거울 구동기 및 그 제조방법
US6989614B2 (en) * 2002-08-21 2006-01-24 Canon Kabushiki Kaisha Oscillating device
US6924915B2 (en) * 2002-08-26 2005-08-02 Canon Kabushiki Kaisha Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device
KR100451409B1 (ko) * 2002-10-15 2004-10-06 한국전자통신연구원 마이크로 광스위치 및 그 제조방법
JP4544972B2 (ja) * 2003-12-04 2010-09-15 オリンパス株式会社 光偏向器
US7442918B2 (en) 2004-05-14 2008-10-28 Microvision, Inc. MEMS device having simplified drive
KR100911144B1 (ko) * 2007-03-27 2009-08-06 삼성전자주식회사 2축구동 전자기 액추에이터

Also Published As

Publication number Publication date
KR20080020838A (ko) 2008-03-06
JP4576410B2 (ja) 2010-11-10
EP1895349A1 (de) 2008-03-05
US20080054732A1 (en) 2008-03-06
US7616365B2 (en) 2009-11-10
EP1895349B1 (de) 2010-10-20
KR100829563B1 (ko) 2008-05-14
JP2008058960A (ja) 2008-03-13

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