DE602007009911D1 - Elektromagnetischer Mikroaktuator und Herstellungsverfahren dafür - Google Patents
Elektromagnetischer Mikroaktuator und Herstellungsverfahren dafürInfo
- Publication number
- DE602007009911D1 DE602007009911D1 DE602007009911T DE602007009911T DE602007009911D1 DE 602007009911 D1 DE602007009911 D1 DE 602007009911D1 DE 602007009911 T DE602007009911 T DE 602007009911T DE 602007009911 T DE602007009911 T DE 602007009911T DE 602007009911 D1 DE602007009911 D1 DE 602007009911D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- method therefor
- electromagnetic microactuator
- microactuator
- electromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3572—Magnetic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Mechanical Optical Scanning Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060084239A KR100829563B1 (ko) | 2006-09-01 | 2006-09-01 | 전자기방식 마이크로 액츄에이터 및 그 제조방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602007009911D1 true DE602007009911D1 (de) | 2010-12-02 |
Family
ID=38754552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602007009911T Active DE602007009911D1 (de) | 2006-09-01 | 2007-01-19 | Elektromagnetischer Mikroaktuator und Herstellungsverfahren dafür |
Country Status (5)
Country | Link |
---|---|
US (1) | US7616365B2 (de) |
EP (1) | EP1895349B1 (de) |
JP (1) | JP4576410B2 (de) |
KR (1) | KR100829563B1 (de) |
DE (1) | DE602007009911D1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5161156B2 (ja) * | 2009-06-12 | 2013-03-13 | 日本電信電話株式会社 | 可変焦点レンズ |
US8305672B2 (en) * | 2010-02-23 | 2012-11-06 | Microvision, Inc. | Magnetically actuated system |
US9401240B2 (en) * | 2010-03-01 | 2016-07-26 | California Institute Of Technology | Integrated passive iron shims in silicon |
CN103399402B (zh) * | 2013-08-13 | 2015-07-08 | 北京纳米能源与系统研究所 | 一种电磁驱动微型二维扫描镜装置 |
DE102015217935A1 (de) * | 2015-09-18 | 2017-03-23 | Robert Bosch Gmbh | Mikromechanische Aktorvorrichtung und Verfahren zum Verkippen einer mikromechanischen Aktorvorrichtung |
CN108152801B (zh) * | 2017-11-10 | 2022-01-11 | 无锡英菲感知技术有限公司 | 一种动态形变可控微镜 |
CN115097593B (zh) * | 2022-08-26 | 2023-03-24 | 北京瑞控信科技股份有限公司 | 一种一维高速动磁式柔性支撑快速反射镜 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6232861B1 (en) * | 1995-06-05 | 2001-05-15 | Nihon Shingo Kabushiki Kaisha | Electromagnetic actuator |
AU2001286745A1 (en) * | 2000-08-27 | 2002-03-13 | Corning Intellisense Corporation | Magnetically actuated micro-electro-mechanical apparatus and method of manufacture |
US6388789B1 (en) * | 2000-09-19 | 2002-05-14 | The Charles Stark Draper Laboratory, Inc. | Multi-axis magnetically actuated device |
JP3926552B2 (ja) * | 2000-10-25 | 2007-06-06 | 日本信号株式会社 | アクチュエ−タ |
US20020112963A1 (en) * | 2001-02-22 | 2002-08-22 | Nikon Corporation | Methods for fabricating high-precision thermally stable electromagnetic coils |
JP3740444B2 (ja) | 2001-07-11 | 2006-02-01 | キヤノン株式会社 | 光偏向器、それを用いた光学機器、ねじれ揺動体 |
US6882455B2 (en) * | 2001-09-19 | 2005-04-19 | Olympus Corporation | Movable structure, and deflection mirror element, optical switch element and shape variable mirror including the movable structure |
US6897990B2 (en) * | 2001-12-28 | 2005-05-24 | Canon Kabushiki Kaisha | Rocking member apparatus |
US6894823B2 (en) * | 2002-04-26 | 2005-05-17 | Corning Intellisense Llc | Magnetically actuated microelectromechanical devices and method of manufacture |
KR100439700B1 (ko) * | 2002-07-16 | 2004-07-12 | 한국과학기술원 | 전자기력으로 구동되는 미소거울 구동기 및 그 제조방법 |
US6989614B2 (en) * | 2002-08-21 | 2006-01-24 | Canon Kabushiki Kaisha | Oscillating device |
US6924915B2 (en) * | 2002-08-26 | 2005-08-02 | Canon Kabushiki Kaisha | Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device |
KR100451409B1 (ko) * | 2002-10-15 | 2004-10-06 | 한국전자통신연구원 | 마이크로 광스위치 및 그 제조방법 |
JP4544972B2 (ja) * | 2003-12-04 | 2010-09-15 | オリンパス株式会社 | 光偏向器 |
US7442918B2 (en) | 2004-05-14 | 2008-10-28 | Microvision, Inc. | MEMS device having simplified drive |
KR100911144B1 (ko) * | 2007-03-27 | 2009-08-06 | 삼성전자주식회사 | 2축구동 전자기 액추에이터 |
-
2006
- 2006-09-01 KR KR1020060084239A patent/KR100829563B1/ko not_active IP Right Cessation
-
2007
- 2007-01-19 DE DE602007009911T patent/DE602007009911D1/de active Active
- 2007-01-19 EP EP07100852A patent/EP1895349B1/de not_active Expired - Fee Related
- 2007-02-26 US US11/710,432 patent/US7616365B2/en not_active Expired - Fee Related
- 2007-08-16 JP JP2007212430A patent/JP4576410B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20080020838A (ko) | 2008-03-06 |
JP4576410B2 (ja) | 2010-11-10 |
EP1895349A1 (de) | 2008-03-05 |
US20080054732A1 (en) | 2008-03-06 |
US7616365B2 (en) | 2009-11-10 |
EP1895349B1 (de) | 2010-10-20 |
KR100829563B1 (ko) | 2008-05-14 |
JP2008058960A (ja) | 2008-03-13 |
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