DE602007007722D1 - System und Verfahren zur Analyse einer Probe - Google Patents

System und Verfahren zur Analyse einer Probe

Info

Publication number
DE602007007722D1
DE602007007722D1 DE602007007722T DE602007007722T DE602007007722D1 DE 602007007722 D1 DE602007007722 D1 DE 602007007722D1 DE 602007007722 T DE602007007722 T DE 602007007722T DE 602007007722 T DE602007007722 T DE 602007007722T DE 602007007722 D1 DE602007007722 D1 DE 602007007722D1
Authority
DE
Germany
Prior art keywords
analyzing
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007007722T
Other languages
English (en)
Inventor
Pascal Amary
Benferhat Ramdane
Denis Cattelan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Jobin Yvon SAS
Original Assignee
Horiba Jobin Yvon SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Jobin Yvon SAS filed Critical Horiba Jobin Yvon SAS
Publication of DE602007007722D1 publication Critical patent/DE602007007722D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE602007007722T 2007-01-19 2007-01-19 System und Verfahren zur Analyse einer Probe Active DE602007007722D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07300736A EP1947445B1 (de) 2007-01-19 2007-01-19 System und Verfahren zur Analyse einer Probe

Publications (1)

Publication Number Publication Date
DE602007007722D1 true DE602007007722D1 (de) 2010-08-26

Family

ID=38109904

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007007722T Active DE602007007722D1 (de) 2007-01-19 2007-01-19 System und Verfahren zur Analyse einer Probe

Country Status (5)

Country Link
US (1) US8310675B2 (de)
EP (1) EP1947445B1 (de)
JP (1) JP5145357B2 (de)
DE (1) DE602007007722D1 (de)
WO (1) WO2008087217A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8504140B2 (en) * 2008-04-08 2013-08-06 Bruker Biospin Corporation Apparatus and method for fluorescence imaging and tomography using spatially structured illumination
US8339602B1 (en) 2008-09-15 2012-12-25 J.A. Woollam Co., Inc. View-finder in ellipsometer or the like systems
US8587781B2 (en) 2008-09-15 2013-11-19 J.A. Woollam Co., Inc. View-finder in ellipsometer or the like systems
US9234836B2 (en) * 2012-11-15 2016-01-12 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Measurement of a fiber direction of a carbon fiber material and fabrication of an object in carbon fiber composite technique
FR3079028B1 (fr) * 2018-03-15 2020-05-15 Horiba France Sas Ellipsometre ou scatterometre spectroscopique instantane et procede de mesure associe
FR3087539B1 (fr) 2018-10-18 2020-11-20 Horiba France Sas Instrument de mesure avec systeme de visualisation du spot de mesure et accessoire de visualisation pour un tel instrument de mesure
KR102194562B1 (ko) * 2018-12-27 2020-12-23 한양대학교 에리카산학협력단 분광 타원해석기
US10801953B2 (en) * 2019-01-11 2020-10-13 Kla-Tencor Corporation Semiconductor metrology based on hyperspectral imaging
CN110261319B (zh) * 2019-06-24 2021-11-16 西安理工大学 基于四次测量Mueller矩阵光谱的装置及测量方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06103252B2 (ja) * 1989-05-04 1994-12-14 サーマ―ウェイブ・インク 高分解能エリプソメータ装置と方法
IL96483A (en) * 1990-11-27 1995-07-31 Orbotech Ltd Optical inspection method and apparatus
JPH06147987A (ja) * 1992-11-05 1994-05-27 Canon Inc 偏光解析装置及び位置ずれ補正方法
US5764365A (en) * 1993-11-09 1998-06-09 Nova Measuring Instruments, Ltd. Two-dimensional beam deflector
US6798511B1 (en) * 2000-10-18 2004-09-28 Regents Of The University Of Minnesota Imaging ellipsometry
EP1411333B1 (de) * 2002-10-15 2006-03-08 Centre National De La Recherche Scientifique (Cnrs) Auf Flüssigkristallen basierendes polarimetrisches System, Verfahren zu seiner Kalibrierung, und polarimetrisches Messverfahren
JP2005003666A (ja) * 2003-05-20 2005-01-06 Dainippon Screen Mfg Co Ltd 分光エリプソメータ
WO2005083352A1 (en) * 2004-02-11 2005-09-09 Filmetrics, Inc. Method and apparatus for high-speed thickness mapping of patterned thin films

Also Published As

Publication number Publication date
US8310675B2 (en) 2012-11-13
US20100110427A1 (en) 2010-05-06
WO2008087217A1 (en) 2008-07-24
EP1947445B1 (de) 2010-07-14
EP1947445A1 (de) 2008-07-23
JP5145357B2 (ja) 2013-02-13
JP2010517003A (ja) 2010-05-20

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