DE602007002284D1 - Mems-resonator mit mindestens einer resonatormodusform - Google Patents
Mems-resonator mit mindestens einer resonatormodusformInfo
- Publication number
- DE602007002284D1 DE602007002284D1 DE602007002284T DE602007002284T DE602007002284D1 DE 602007002284 D1 DE602007002284 D1 DE 602007002284D1 DE 602007002284 T DE602007002284 T DE 602007002284T DE 602007002284 T DE602007002284 T DE 602007002284T DE 602007002284 D1 DE602007002284 D1 DE 602007002284D1
- Authority
- DE
- Germany
- Prior art keywords
- resonator
- mems
- substrate
- mode form
- trench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 abstract 4
- 238000004519 manufacturing process Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02259—Driving or detection means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
- H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/48—Coupling means therefor
- H03H9/50—Mechanical coupling means
- H03H9/505—Mechanical coupling means for microelectro-mechanical filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
- H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06110892 | 2006-03-09 | ||
PCT/IB2007/050770 WO2007102130A2 (en) | 2006-03-09 | 2007-03-08 | Mems resonator having at least one resonator mode shape |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602007002284D1 true DE602007002284D1 (de) | 2009-10-15 |
Family
ID=38365257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602007002284T Active DE602007002284D1 (de) | 2006-03-09 | 2007-03-08 | Mems-resonator mit mindestens einer resonatormodusform |
Country Status (7)
Country | Link |
---|---|
US (1) | US7839239B2 (de) |
EP (1) | EP1997225B1 (de) |
JP (1) | JP2009529820A (de) |
CN (1) | CN101401303B (de) |
AT (1) | ATE441974T1 (de) |
DE (1) | DE602007002284D1 (de) |
WO (1) | WO2007102130A2 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7907035B2 (en) * | 2007-12-18 | 2011-03-15 | Robert Bosch Gmbh | MEMS resonator array structure and method of operating and using same |
WO2010044058A1 (en) | 2008-10-14 | 2010-04-22 | Nxp B.V. | Frame-shaped mems piezoresistive resonator |
US8040207B2 (en) * | 2009-01-15 | 2011-10-18 | Infineon Technologies Ag | MEMS resonator devices with a plurality of mass elements formed thereon |
FI20096201A0 (fi) * | 2009-11-19 | 2009-11-19 | Valtion Teknillinen | Massa-aaltoresonaattori ja menetelmä sen valmistamiseksi |
CN101984557B (zh) * | 2010-11-03 | 2012-11-21 | 中国科学院半导体研究所 | 基于谐振原理工作的mems滤波器模块 |
FI126586B (fi) * | 2011-02-17 | 2017-02-28 | Teknologian Tutkimuskeskus Vtt Oy | Uudet mikromekaaniset laitteet |
US9991868B1 (en) * | 2014-04-14 | 2018-06-05 | Hrl Laboratories, Llc | Micro-resonator having lid-integrated electrode |
CN104202011A (zh) * | 2014-08-29 | 2014-12-10 | 电子科技大学 | 基于绝缘材料振动块的mems谐振器 |
US9923545B2 (en) | 2014-10-22 | 2018-03-20 | Microchip Technology Incorporated | Compound spring MEMS resonators for frequency and timing generation |
US9866200B2 (en) | 2014-10-22 | 2018-01-09 | Microchip Technology Incorporated | Multiple coil spring MEMS resonator |
WO2016171772A1 (en) * | 2015-04-21 | 2016-10-27 | Massachusetts Institute Of Technology | Dual trench deep trench-based unreleased mems resonators |
CN105306003B (zh) * | 2015-11-20 | 2017-12-22 | 中国科学院半导体研究所 | 环形检测电极面内伸缩谐振器设计及其制备方法 |
US11644313B2 (en) | 2017-09-07 | 2023-05-09 | Georgia Tech Research Corporation | Substrate-decoupled high-coriolis-coupling pitch/roll gyroscope |
CN109376373B (zh) * | 2018-08-30 | 2020-09-18 | 西安电子科技大学 | 一种耦合谐振滤波器的构建方法 |
CN114301406B (zh) * | 2021-12-29 | 2024-04-02 | 苏州达波新材科技有限公司 | 空腔型压电单晶体声波谐振器及其制备方法 |
CN116488609B (zh) * | 2023-06-20 | 2023-09-19 | 麦斯塔微电子(深圳)有限公司 | 微机电系统谐振器 |
CN116545382B (zh) * | 2023-07-07 | 2023-10-31 | 麦斯塔微电子(深圳)有限公司 | Mems振荡器 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3634787A (en) * | 1968-01-23 | 1972-01-11 | Westinghouse Electric Corp | Electromechanical tuning apparatus particularly for microelectronic components |
US6136630A (en) * | 1998-06-04 | 2000-10-24 | The Regents Of The University Of Michigan | Method of making a micromechanical device from a single crystal semiconductor substrate and monolithic sensor formed thereby |
DE19852878B4 (de) * | 1998-11-16 | 2009-11-12 | Infineon Technologies Ag | Mikromechanisches Bauelement und Herstellungsverfahren hierfür |
US6275122B1 (en) * | 1999-08-17 | 2001-08-14 | International Business Machines Corporation | Encapsulated MEMS band-pass filter for integrated circuits |
US6628177B2 (en) | 2000-08-24 | 2003-09-30 | The Regents Of The University Of Michigan | Micromechanical resonator device and micromechanical device utilizing same |
JP4176450B2 (ja) * | 2002-02-13 | 2008-11-05 | 松下電器産業株式会社 | 微小機械振動フィルタ |
AU2003290513A1 (en) * | 2002-08-07 | 2004-04-08 | Georgia Tech Research Corporation | Capacitive resonators and methods of fabrication |
US6985051B2 (en) * | 2002-12-17 | 2006-01-10 | The Regents Of The University Of Michigan | Micromechanical resonator device and method of making a micromechanical device |
JP3797355B2 (ja) * | 2003-10-22 | 2006-07-19 | セイコーエプソン株式会社 | 圧電振動子の製造方法 |
WO2005074502A2 (en) * | 2004-01-21 | 2005-08-18 | The Regents Of The University Of Michigan | High-q micromechanical resonator devices and filters utilizing same |
US7323952B2 (en) * | 2005-09-02 | 2008-01-29 | Robert Bosch Gmbh | Breath-mode ring resonator structure, and method of designing, operating and using same |
US7633360B2 (en) * | 2005-09-27 | 2009-12-15 | Analog Devices, Inc. | MEMS resonator having an inner element and an outer element that flex |
WO2007056277A2 (en) * | 2005-11-04 | 2007-05-18 | Cornell Research Foundation, Inc. | Dielectrically transduced single-ended to differential mems filter |
-
2007
- 2007-03-08 JP JP2008557881A patent/JP2009529820A/ja not_active Withdrawn
- 2007-03-08 AT AT07735055T patent/ATE441974T1/de not_active IP Right Cessation
- 2007-03-08 US US12/281,985 patent/US7839239B2/en active Active
- 2007-03-08 DE DE602007002284T patent/DE602007002284D1/de active Active
- 2007-03-08 CN CN2007800084575A patent/CN101401303B/zh active Active
- 2007-03-08 WO PCT/IB2007/050770 patent/WO2007102130A2/en active Application Filing
- 2007-03-08 EP EP07735055A patent/EP1997225B1/de active Active
Also Published As
Publication number | Publication date |
---|---|
CN101401303B (zh) | 2011-07-13 |
EP1997225A2 (de) | 2008-12-03 |
EP1997225B1 (de) | 2009-09-02 |
CN101401303A (zh) | 2009-04-01 |
US7839239B2 (en) | 2010-11-23 |
JP2009529820A (ja) | 2009-08-20 |
WO2007102130A3 (en) | 2007-11-15 |
ATE441974T1 (de) | 2009-09-15 |
WO2007102130A2 (en) | 2007-09-13 |
US20100156569A1 (en) | 2010-06-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |