DE602006018928D1 - Vorrichtung zur pevcd-abscheidung einer innenbarriichtung zur optischen plasmaanalyse - Google Patents

Vorrichtung zur pevcd-abscheidung einer innenbarriichtung zur optischen plasmaanalyse

Info

Publication number
DE602006018928D1
DE602006018928D1 DE602006018928T DE602006018928T DE602006018928D1 DE 602006018928 D1 DE602006018928 D1 DE 602006018928D1 DE 602006018928 T DE602006018928 T DE 602006018928T DE 602006018928 T DE602006018928 T DE 602006018928T DE 602006018928 D1 DE602006018928 D1 DE 602006018928D1
Authority
DE
Germany
Prior art keywords
pevcd
separation
plasma
internal barrier
plasma analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006018928T
Other languages
English (en)
Inventor
Jean-Michel Rius
Guy Feuilloley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sidel Participations SAS
Original Assignee
Sidel Participations SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sidel Participations SAS filed Critical Sidel Participations SAS
Publication of DE602006018928D1 publication Critical patent/DE602006018928D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0025—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using photoelectric means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Sampling And Sample Adjustment (AREA)
DE602006018928T 2005-07-13 2006-07-12 Vorrichtung zur pevcd-abscheidung einer innenbarriichtung zur optischen plasmaanalyse Active DE602006018928D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0507555A FR2888587B1 (fr) 2005-07-13 2005-07-13 Appareil pour le depot pecvd d'une couche barriere interne sur un recipient, comprenant un dispositif d'analyse optique du plasma
PCT/FR2006/001703 WO2007006977A2 (fr) 2005-07-13 2006-07-12 Appareil pour le depot pecvd d'une couche barriere interne sur un recipient, comprenant un dispositif d'analyse optique du plasma

Publications (1)

Publication Number Publication Date
DE602006018928D1 true DE602006018928D1 (de) 2011-01-27

Family

ID=36406267

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006018928T Active DE602006018928D1 (de) 2005-07-13 2006-07-12 Vorrichtung zur pevcd-abscheidung einer innenbarriichtung zur optischen plasmaanalyse

Country Status (9)

Country Link
US (1) US8826853B2 (de)
EP (1) EP1902154B1 (de)
JP (1) JP4791543B2 (de)
CN (1) CN101223297B (de)
AT (1) ATE491824T1 (de)
DE (1) DE602006018928D1 (de)
ES (1) ES2357482T3 (de)
FR (1) FR2888587B1 (de)
WO (1) WO2007006977A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10081864B2 (en) 2011-03-10 2018-09-25 Kaiatech, Inc Method and apparatus for treating containers
CN103103495B (zh) * 2011-11-11 2015-01-14 中国科学院沈阳科学仪器研制中心有限公司 一种全自动下传输系统
FR3035881B1 (fr) * 2015-05-04 2019-09-27 Sidel Participations Installation pour le traitement de recipients par plasma micro-ondes, comprenant un generateur a etat solide

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1541499A (fr) * 1966-10-31 1968-10-04 Air Reduction Procédé et appareil de contrôle de la densité d'une vapeur par spectroscopie
JPS57161063A (en) * 1981-03-31 1982-10-04 Nippon Sheet Glass Co Ltd Method and device for sticking metallic oxide film on substrate
JPS61130485A (ja) * 1984-11-28 1986-06-18 Mitsubishi Electric Corp 真空モニタ装置
JPS6293382A (ja) * 1985-10-21 1987-04-28 Mitsubishi Electric Corp 薄膜形成装置
ZA951048B (en) * 1994-02-16 1995-10-12 Coca Cola Co Hollow containers with inert or impermeable inner surface through plasma-assisted surface reaction or on-surface polymerization
US5521351A (en) * 1994-08-30 1996-05-28 Wisconsin Alumni Research Foundation Method and apparatus for plasma surface treatment of the interior of hollow forms
US5522351A (en) * 1995-05-22 1996-06-04 Brunswick Corporation Internal combustion engine temperature control system
US6112695A (en) * 1996-10-08 2000-09-05 Nano Scale Surface Systems, Inc. Apparatus for plasma deposition of a thin film onto the interior surface of a container
FR2776540B1 (fr) 1998-03-27 2000-06-02 Sidel Sa Recipient en matiere a effet barriere et procede et appareil pour sa fabrication
TW492106B (en) * 2000-06-20 2002-06-21 Hitachi Ltd Inspection method for thickness of film to be processed using luminous beam-splitter and method of film processing
US20050118365A1 (en) * 2002-04-26 2005-06-02 Shunzo Miyazaki Plastic containers coated on the inner surface and process for production thereof
DE10341513B4 (de) * 2002-09-06 2010-10-07 Von Ardenne Anlagentechnik Gmbh Verfahren zur Regelung des Reaktivgasflusses in reaktiven plasmagestützten Vakuumbeschichtungsprozessen
JP2004137556A (ja) * 2002-10-17 2004-05-13 Renesas Technology Corp 半導体製造装置
FR2872148B1 (fr) * 2004-06-24 2006-09-22 Sidel Sas Machine de traitement de bouteilles equipee d'une cartouche de raccordement interchangeable

Also Published As

Publication number Publication date
US20090133626A1 (en) 2009-05-28
US8826853B2 (en) 2014-09-09
CN101223297B (zh) 2010-09-22
WO2007006977A2 (fr) 2007-01-18
ES2357482T3 (es) 2011-04-26
ATE491824T1 (de) 2011-01-15
CN101223297A (zh) 2008-07-16
FR2888587B1 (fr) 2007-10-05
JP4791543B2 (ja) 2011-10-12
EP1902154B1 (de) 2010-12-15
WO2007006977A3 (fr) 2007-03-22
JP2009501277A (ja) 2009-01-15
FR2888587A1 (fr) 2007-01-19
EP1902154A2 (de) 2008-03-26

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