DE602006011788D1 - Verfahren und einrichtung zur messung der dicke einer materialschicht - Google Patents

Verfahren und einrichtung zur messung der dicke einer materialschicht

Info

Publication number
DE602006011788D1
DE602006011788D1 DE602006011788T DE602006011788T DE602006011788D1 DE 602006011788 D1 DE602006011788 D1 DE 602006011788D1 DE 602006011788 T DE602006011788 T DE 602006011788T DE 602006011788 T DE602006011788 T DE 602006011788T DE 602006011788 D1 DE602006011788 D1 DE 602006011788D1
Authority
DE
Germany
Prior art keywords
measuring
thickness
layer
microwave sensor
reference data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006011788T
Other languages
English (en)
Inventor
Giovanni Cristini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SA Giuseppe Cristini SpA
Original Assignee
SA Giuseppe Cristini SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SA Giuseppe Cristini SpA filed Critical SA Giuseppe Cristini SpA
Publication of DE602006011788D1 publication Critical patent/DE602006011788D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE602006011788T 2006-01-19 2006-11-06 Verfahren und einrichtung zur messung der dicke einer materialschicht Active DE602006011788D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT000084A ITMI20060084A1 (it) 2006-01-19 2006-01-19 Metodo e dispositivo per misurare lo spessore di uno strato di materiale
PCT/IB2006/003207 WO2007083178A1 (en) 2006-01-19 2006-11-06 Method and device for measuring the thickness of a layer of material

Publications (1)

Publication Number Publication Date
DE602006011788D1 true DE602006011788D1 (de) 2010-03-04

Family

ID=38068598

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006011788T Active DE602006011788D1 (de) 2006-01-19 2006-11-06 Verfahren und einrichtung zur messung der dicke einer materialschicht

Country Status (9)

Country Link
US (1) US8138769B2 (de)
EP (1) EP1974181B1 (de)
CN (1) CN101421583B (de)
AT (1) ATE455288T1 (de)
CA (1) CA2637788C (de)
DE (1) DE602006011788D1 (de)
ES (1) ES2339596T3 (de)
IT (1) ITMI20060084A1 (de)
WO (1) WO2007083178A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8269509B2 (en) * 2008-11-17 2012-09-18 General Electric Company System and method for measuring thickness of a refractory wall of a gasifier using electromagnetic energy
CN102478395B (zh) * 2010-11-26 2013-05-29 宝山钢铁股份有限公司 在线检测带钢表面无铬涂层厚度的方法
CN102095395B (zh) * 2010-11-29 2012-10-03 沈阳工业大学 大块金属玻璃形成厚度预测方法
CN102221337B (zh) * 2011-03-23 2012-07-04 大连海事大学 船载微波散射计反演油膜厚度装置
GB201113715D0 (en) * 2011-08-09 2011-09-21 Renishaw Plc Method and apparatus for inspecting workpieces
CN102564361B (zh) * 2011-11-18 2013-10-23 北京金自天正智能控制股份有限公司 一种射线式测厚仪及其校正方法
GB201308467D0 (en) 2013-05-10 2013-06-19 Renishaw Plc Method and Apparatus for Inspecting Workpieces
CN103743362B (zh) * 2013-12-25 2016-03-30 武汉钢铁(集团)公司 电工钢表面绝缘涂层涂布量的测量方法
US9488601B2 (en) * 2014-03-26 2016-11-08 Paneratech, Inc. Material erosion monitoring system and method
US9880110B2 (en) 2014-03-26 2018-01-30 Paneratech, Inc. Material erosion monitoring system and method
CA2998778C (en) * 2015-10-29 2024-02-27 Paneratech, Inc. Asset life optimization and monitoring system
CN107504909A (zh) * 2017-08-17 2017-12-22 中国计量大学 基于贝叶斯正则化算法的白光反射率测量薄膜厚度自适应方法
CN112578358A (zh) * 2020-12-29 2021-03-30 深圳承泰科技有限公司 一种毫米波雷达的校准方法及装置
CN114264259B (zh) * 2021-04-02 2023-03-10 湖南国戎科技有限公司 等效观冰方法及系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1118096A (en) * 1966-07-04 1968-06-26 British Iron Steel Research Method and apparatus for measuring material thickness
US4255709A (en) * 1978-09-22 1981-03-10 Zatsepin Nikolai N Device for providing an electrical signal proportional to the thickness of a measured coating with an automatic range switch and sensitivity control
WO2000012974A1 (en) 1998-08-31 2000-03-09 Malcam Ltd. Microwave resonator for continuous evaluation of fibrous materials
DE10214955B9 (de) * 2002-04-04 2017-06-29 Rieter Ingolstadt Gmbh Spinnereivorbereitungsmaschine
ITFI20060019A1 (it) * 2006-01-19 2007-07-20 Advanced Microwave Engineering Dispositivo per la valutazione per contatto di caratteristiche chimico-fisiche dei materiali e metodo ad esso associato
US7794142B2 (en) * 2006-05-09 2010-09-14 Tsi Technologies Llc Magnetic element temperature sensors

Also Published As

Publication number Publication date
EP1974181B1 (de) 2010-01-13
CA2637788C (en) 2015-07-07
ES2339596T3 (es) 2010-05-21
ITMI20060084A1 (it) 2007-07-20
US8138769B2 (en) 2012-03-20
EP1974181A1 (de) 2008-10-01
US20090302865A1 (en) 2009-12-10
CA2637788A1 (en) 2007-07-26
ATE455288T1 (de) 2010-01-15
CN101421583A (zh) 2009-04-29
CN101421583B (zh) 2011-01-19
WO2007083178A1 (en) 2007-07-26

Similar Documents

Publication Publication Date Title
ATE455288T1 (de) Verfahren und einrichtung zur messung der dicke einer materialschicht
DE50310307D1 (de) Verfahren und Vorrichtung zur schnellen tomographischen Messung der elektrischen Leitfähigkeitsverteilung in einer Probe
ATE520020T1 (de) Feuchtigkeitsgehaltsensor und entsprechendes verfahren
ATE462350T1 (de) Verfahren und gerät zur laufenden überwachung der konzentration eines analyten
DE602005019362D1 (de) Gerät zur Messung der Dicke von Blattgut
WO2012142502A3 (en) Advanced analyte sensor calibration and error detection
DE60031661D1 (de) Verfahren und vorrichtung zur messung des wasseranteils in einem substrat
BRPI0718971B8 (pt) sistema para medir parâmetros múltiplos
MX2009012072A (es) Metodo y aparato para medir el ph de soluciones de baja alcalinidad.
ATE472091T1 (de) Verfahren und vorrichtung zur dickenmessung
WO2011151585A3 (fr) Procédé et dispositif de mesure de l'épaisseur d'une couche de revêtement sur une bande en défilement.
DE602005015913D1 (de) Zweifrequenz-Messmethode für einen Oberflächenwellensensor, sowie Oberflächenwellensensor und Biosensor mit Mittel zur Durchmischung der Analyseflüssigkeit
DE602004018357D1 (de) Messung der schmelzpunkte mehrerer proben
Chakraborty et al. PMMA-coated capacitive type soil moisture sensor: Design, fabrication, and testing
Akram et al. Fringing field impedance sensor for hydration monitoring and setting time determination of concrete material
FR2892521B1 (fr) Systeme de mesure de permeabilite magnetique et echantillon de reference utilise dans celui-ci
Suchorab et al. Comparison of the moist material relative permittivity readouts using the non-invasive reflectometric sensors and microwave antenna
WO2008091708A3 (en) Gene expression profiling for identification, monitoring, and treatment of lupus erythematosus
DE10394364A5 (de) Sensor, Sensoranordnung und Messverfahren
DE602008005251D1 (de) Dickensensor zum Messen der Dicke von blattartigen Objekten
TW200711020A (en) Methods and apparatus for optimizing an electrical response to a set of conductive layers on a substrate
ATE524720T1 (de) Vorrichtung und verfahren zur thermogravimetrischen materialfeuchtebestimmung
IE87052B1 (en) Method of testing surface plasmon resonance sensor
DE502007002968D1 (de) Vorrichtung und verfahren zur erfassung elektrischer eigenschaften einer probe aus einem anregbaren material
WO2009158598A3 (en) Evanescent microwave microscopy probe and methodology

Legal Events

Date Code Title Description
8364 No opposition during term of opposition