DE602004031841D1 - Impulsansteuerung von resonanten mems-vorrichtungen - Google Patents

Impulsansteuerung von resonanten mems-vorrichtungen

Info

Publication number
DE602004031841D1
DE602004031841D1 DE602004031841T DE602004031841T DE602004031841D1 DE 602004031841 D1 DE602004031841 D1 DE 602004031841D1 DE 602004031841 T DE602004031841 T DE 602004031841T DE 602004031841 T DE602004031841 T DE 602004031841T DE 602004031841 D1 DE602004031841 D1 DE 602004031841D1
Authority
DE
Germany
Prior art keywords
pulse control
mems devices
resonant mems
resonant
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004031841T
Other languages
English (en)
Inventor
Arthur M Turner
Andrew S Dewa
Mark W Heaton
Philip A Roden
Carter B Simpson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE602004031841D1 publication Critical patent/DE602004031841D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/032—Reciprocating, oscillating or vibrating motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
DE602004031841T 2003-06-18 2004-06-16 Impulsansteuerung von resonanten mems-vorrichtungen Expired - Lifetime DE602004031841D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47933603P 2003-06-18 2003-06-18
PCT/US2004/019637 WO2005001903A2 (en) 2003-06-18 2004-06-16 Pulse drive of resonant mems devices

Publications (1)

Publication Number Publication Date
DE602004031841D1 true DE602004031841D1 (de) 2011-04-28

Family

ID=33551879

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004031841T Expired - Lifetime DE602004031841D1 (de) 2003-06-18 2004-06-16 Impulsansteuerung von resonanten mems-vorrichtungen

Country Status (4)

Country Link
US (1) US6965177B2 (de)
EP (1) EP1645022B1 (de)
DE (1) DE602004031841D1 (de)
WO (1) WO2005001903A2 (de)

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US7485485B2 (en) * 2004-02-09 2009-02-03 Microvision, Inc. Method and apparatus for making a MEMS scanner
US7442918B2 (en) * 2004-05-14 2008-10-28 Microvision, Inc. MEMS device having simplified drive
US7233343B2 (en) * 2004-11-24 2007-06-19 Texas Instruments Incorporated Serial printing with multiple torsional hinged MEMS mirrors
US7107848B2 (en) * 2004-12-03 2006-09-19 Texas Instruments Incorporated Active scan velocity control for torsional hinged MEMS scanner
US20060119925A1 (en) * 2004-12-03 2006-06-08 Orcutt John W Single torsional hinge mirror package
US7636101B2 (en) * 2005-02-09 2009-12-22 Microvision, Inc. MEMS scanner adapted to a laser printer
US7284390B2 (en) * 2005-05-18 2007-10-23 Whirlpool Corporation Refrigerator with intermediate temperature icemaking compartment
US20070146857A1 (en) * 2005-12-28 2007-06-28 Texas Instruments, Incorporated Torsional hinge mirror assembly with reduced flexing
US7800640B2 (en) * 2006-08-31 2010-09-21 Lexmark International, Inc. Obtaining pressure of an operating environment of a bi-directionally scanning electrophotographic device for implementing corrections per pressure
JP2009058930A (ja) * 2007-08-07 2009-03-19 Canon Inc 揺動体装置、光偏向器、及びそれを用いた光学機器
EP2100848A1 (de) 2008-03-11 2009-09-16 Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. Mikromechanisches Bauteil mit einem Spiegel und dessen Herstellungsverfahren
JP5391579B2 (ja) * 2008-05-15 2014-01-15 船井電機株式会社 振動素子
US20100073096A1 (en) * 2008-09-22 2010-03-25 Texas Instruments Incorporated Micro electro-mechanical system based programmable frequency synthesizer and method of operation thereof
TWI416168B (zh) 2010-02-05 2013-11-21 Ind Tech Res Inst 光學多環掃描元件
US8606410B2 (en) 2010-06-29 2013-12-10 Headway Technologies, Inc. Drive method for starting and operating a resonant scanning MEMS device at its resonant frequency
TWI438486B (zh) 2010-08-17 2014-05-21 Ind Tech Res Inst 微振鏡裝置
EP2461184B1 (de) * 2010-12-03 2015-07-08 Agfa HealthCare N.V. Vorrichtung und Verfahren zum Auslesen von in einer Speicheleuchtstoffschicht gespeicherten Röntgeninformationen
TWI408413B (zh) 2011-02-25 2013-09-11 Ind Tech Res Inst 二維掃描反射裝置
DE202012012948U1 (de) * 2011-11-22 2014-05-26 DüRR DENTAL AG Vorrichtung zum Auslesen einer Speicherfolie
FR3024805B1 (fr) * 2014-08-07 2019-07-05 Intel Corporation Une technique d'actionnement d'une structure resonante
EP3115826A1 (de) * 2015-07-06 2017-01-11 Trumpf Laser Marking Systems AG Vorrichtung zur ablenkung eines laserstrahls
DE102016212703A1 (de) 2016-07-13 2018-01-18 Robert Bosch Gmbh Mechanisches Bauteil und Verfahren zum Verstellen eines verstellbaren Teils zumindest um eine Drehachse
US10578861B2 (en) 2017-10-25 2020-03-03 Microsoft Technology Licensing, Llc Piezoelectric mirror system
JP6585147B2 (ja) * 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
CN111417884B (zh) * 2017-12-01 2022-07-29 浜松光子学株式会社 致动器装置
TWI826028B (zh) * 2022-10-04 2023-12-11 台睿精工股份有限公司 振動致動器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4692481A (en) 1984-09-27 1987-09-08 E. I. Du Pont De Nemours And Company Process for matching color of paint to a colored surface
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
AR030393A1 (es) * 1999-06-21 2003-08-20 Fisher & Paykel Motor lineal electrico
US7064879B1 (en) * 2000-04-07 2006-06-20 Microsoft Corporation Magnetically actuated microelectrochemical systems actuator
US6674383B2 (en) * 2000-11-01 2004-01-06 Onix Microsystems, Inc. PWM-based measurement interface for a micro-machined electrostatic actuator
WO2002101432A2 (en) 2001-01-17 2002-12-19 Corning Incorporated Optical switch with time multiplexing control system architecture
US6747836B2 (en) 2001-07-13 2004-06-08 Stmicroelectronics, Inc. Position control system and method for magnetic hard disk drive systems with dual stage actuation

Also Published As

Publication number Publication date
EP1645022A4 (de) 2008-12-24
EP1645022A2 (de) 2006-04-12
US6965177B2 (en) 2005-11-15
WO2005001903A2 (en) 2005-01-06
US20040256921A1 (en) 2004-12-23
EP1645022B1 (de) 2011-03-16
WO2005001903A3 (en) 2005-07-14

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