DE602004031841D1 - Impulsansteuerung von resonanten mems-vorrichtungen - Google Patents
Impulsansteuerung von resonanten mems-vorrichtungenInfo
- Publication number
- DE602004031841D1 DE602004031841D1 DE602004031841T DE602004031841T DE602004031841D1 DE 602004031841 D1 DE602004031841 D1 DE 602004031841D1 DE 602004031841 T DE602004031841 T DE 602004031841T DE 602004031841 T DE602004031841 T DE 602004031841T DE 602004031841 D1 DE602004031841 D1 DE 602004031841D1
- Authority
- DE
- Germany
- Prior art keywords
- pulse control
- mems devices
- resonant mems
- resonant
- devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/007—For controlling stiffness, e.g. ribs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
- H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
- H02P25/032—Reciprocating, oscillating or vibrating motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US47933603P | 2003-06-18 | 2003-06-18 | |
PCT/US2004/019637 WO2005001903A2 (en) | 2003-06-18 | 2004-06-16 | Pulse drive of resonant mems devices |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004031841D1 true DE602004031841D1 (de) | 2011-04-28 |
Family
ID=33551879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004031841T Expired - Lifetime DE602004031841D1 (de) | 2003-06-18 | 2004-06-16 | Impulsansteuerung von resonanten mems-vorrichtungen |
Country Status (4)
Country | Link |
---|---|
US (1) | US6965177B2 (de) |
EP (1) | EP1645022B1 (de) |
DE (1) | DE602004031841D1 (de) |
WO (1) | WO2005001903A2 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7485485B2 (en) * | 2004-02-09 | 2009-02-03 | Microvision, Inc. | Method and apparatus for making a MEMS scanner |
US7442918B2 (en) * | 2004-05-14 | 2008-10-28 | Microvision, Inc. | MEMS device having simplified drive |
US7233343B2 (en) * | 2004-11-24 | 2007-06-19 | Texas Instruments Incorporated | Serial printing with multiple torsional hinged MEMS mirrors |
US7107848B2 (en) * | 2004-12-03 | 2006-09-19 | Texas Instruments Incorporated | Active scan velocity control for torsional hinged MEMS scanner |
US20060119925A1 (en) * | 2004-12-03 | 2006-06-08 | Orcutt John W | Single torsional hinge mirror package |
US7636101B2 (en) * | 2005-02-09 | 2009-12-22 | Microvision, Inc. | MEMS scanner adapted to a laser printer |
US7284390B2 (en) * | 2005-05-18 | 2007-10-23 | Whirlpool Corporation | Refrigerator with intermediate temperature icemaking compartment |
US20070146857A1 (en) * | 2005-12-28 | 2007-06-28 | Texas Instruments, Incorporated | Torsional hinge mirror assembly with reduced flexing |
US7800640B2 (en) * | 2006-08-31 | 2010-09-21 | Lexmark International, Inc. | Obtaining pressure of an operating environment of a bi-directionally scanning electrophotographic device for implementing corrections per pressure |
JP2009058930A (ja) * | 2007-08-07 | 2009-03-19 | Canon Inc | 揺動体装置、光偏向器、及びそれを用いた光学機器 |
EP2100848A1 (de) | 2008-03-11 | 2009-09-16 | Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. | Mikromechanisches Bauteil mit einem Spiegel und dessen Herstellungsverfahren |
JP5391579B2 (ja) * | 2008-05-15 | 2014-01-15 | 船井電機株式会社 | 振動素子 |
US20100073096A1 (en) * | 2008-09-22 | 2010-03-25 | Texas Instruments Incorporated | Micro electro-mechanical system based programmable frequency synthesizer and method of operation thereof |
TWI416168B (zh) | 2010-02-05 | 2013-11-21 | Ind Tech Res Inst | 光學多環掃描元件 |
US8606410B2 (en) | 2010-06-29 | 2013-12-10 | Headway Technologies, Inc. | Drive method for starting and operating a resonant scanning MEMS device at its resonant frequency |
TWI438486B (zh) | 2010-08-17 | 2014-05-21 | Ind Tech Res Inst | 微振鏡裝置 |
EP2461184B1 (de) * | 2010-12-03 | 2015-07-08 | Agfa HealthCare N.V. | Vorrichtung und Verfahren zum Auslesen von in einer Speicheleuchtstoffschicht gespeicherten Röntgeninformationen |
TWI408413B (zh) | 2011-02-25 | 2013-09-11 | Ind Tech Res Inst | 二維掃描反射裝置 |
DE202012012948U1 (de) * | 2011-11-22 | 2014-05-26 | DüRR DENTAL AG | Vorrichtung zum Auslesen einer Speicherfolie |
FR3024805B1 (fr) * | 2014-08-07 | 2019-07-05 | Intel Corporation | Une technique d'actionnement d'une structure resonante |
EP3115826A1 (de) * | 2015-07-06 | 2017-01-11 | Trumpf Laser Marking Systems AG | Vorrichtung zur ablenkung eines laserstrahls |
DE102016212703A1 (de) | 2016-07-13 | 2018-01-18 | Robert Bosch Gmbh | Mechanisches Bauteil und Verfahren zum Verstellen eines verstellbaren Teils zumindest um eine Drehachse |
US10578861B2 (en) | 2017-10-25 | 2020-03-03 | Microsoft Technology Licensing, Llc | Piezoelectric mirror system |
JP6585147B2 (ja) * | 2017-12-01 | 2019-10-02 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
CN111417884B (zh) * | 2017-12-01 | 2022-07-29 | 浜松光子学株式会社 | 致动器装置 |
TWI826028B (zh) * | 2022-10-04 | 2023-12-11 | 台睿精工股份有限公司 | 振動致動器 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4692481A (en) | 1984-09-27 | 1987-09-08 | E. I. Du Pont De Nemours And Company | Process for matching color of paint to a colored surface |
US5629790A (en) * | 1993-10-18 | 1997-05-13 | Neukermans; Armand P. | Micromachined torsional scanner |
US6201629B1 (en) * | 1997-08-27 | 2001-03-13 | Microoptical Corporation | Torsional micro-mechanical mirror system |
AR030393A1 (es) * | 1999-06-21 | 2003-08-20 | Fisher & Paykel | Motor lineal electrico |
US7064879B1 (en) * | 2000-04-07 | 2006-06-20 | Microsoft Corporation | Magnetically actuated microelectrochemical systems actuator |
US6674383B2 (en) * | 2000-11-01 | 2004-01-06 | Onix Microsystems, Inc. | PWM-based measurement interface for a micro-machined electrostatic actuator |
WO2002101432A2 (en) | 2001-01-17 | 2002-12-19 | Corning Incorporated | Optical switch with time multiplexing control system architecture |
US6747836B2 (en) | 2001-07-13 | 2004-06-08 | Stmicroelectronics, Inc. | Position control system and method for magnetic hard disk drive systems with dual stage actuation |
-
2004
- 2004-06-15 US US10/868,334 patent/US6965177B2/en not_active Expired - Lifetime
- 2004-06-16 EP EP04755676A patent/EP1645022B1/de not_active Expired - Fee Related
- 2004-06-16 WO PCT/US2004/019637 patent/WO2005001903A2/en active Application Filing
- 2004-06-16 DE DE602004031841T patent/DE602004031841D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1645022A4 (de) | 2008-12-24 |
EP1645022A2 (de) | 2006-04-12 |
US6965177B2 (en) | 2005-11-15 |
WO2005001903A2 (en) | 2005-01-06 |
US20040256921A1 (en) | 2004-12-23 |
EP1645022B1 (de) | 2011-03-16 |
WO2005001903A3 (en) | 2005-07-14 |
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