DE602004016682D1 - Elektrostatische steuereinrichtung - Google Patents

Elektrostatische steuereinrichtung

Info

Publication number
DE602004016682D1
DE602004016682D1 DE602004016682T DE602004016682T DE602004016682D1 DE 602004016682 D1 DE602004016682 D1 DE 602004016682D1 DE 602004016682 T DE602004016682 T DE 602004016682T DE 602004016682 T DE602004016682 T DE 602004016682T DE 602004016682 D1 DE602004016682 D1 DE 602004016682D1
Authority
DE
Germany
Prior art keywords
control device
electrostatic control
electrostatic
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004016682T
Other languages
English (en)
Inventor
Claire Divoux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE602004016682D1 publication Critical patent/DE602004016682D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lens Barrels (AREA)
DE602004016682T 2003-12-26 2004-11-18 Elektrostatische steuereinrichtung Active DE602004016682D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0351210A FR2864526B1 (fr) 2003-12-26 2003-12-26 Dispositif d'actionnement electrostatique
PCT/FR2004/050601 WO2005069472A1 (fr) 2003-12-26 2004-11-18 Dispositif d'actionnement electrostatique

Publications (1)

Publication Number Publication Date
DE602004016682D1 true DE602004016682D1 (de) 2008-10-30

Family

ID=34639763

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004016682T Active DE602004016682D1 (de) 2003-12-26 2004-11-18 Elektrostatische steuereinrichtung

Country Status (6)

Country Link
US (1) US20070120438A1 (de)
EP (1) EP1698041B1 (de)
JP (1) JP2007517488A (de)
DE (1) DE602004016682D1 (de)
FR (1) FR2864526B1 (de)
WO (1) WO2005069472A1 (de)

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FR2864527B1 (fr) * 2003-12-26 2008-04-18 Commissariat Energie Atomique Composants mems electrostatiques permettant un deplacement vertical important
US7882701B2 (en) * 2005-01-18 2011-02-08 Massachusetts Institute Of Technology Microfabricated mechanical frequency multiplier
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9087486B2 (en) 2005-02-23 2015-07-21 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
FR2887537B1 (fr) * 2005-06-23 2007-09-07 Commissariat Energie Atomique Actionneur electrostatique, dispositif comportant de tels actionneurs, microsysteme comportant un tel dispositif et procede de realisation d'un tel actionneur
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
WO2010038640A1 (ja) * 2008-10-01 2010-04-08 コニカミノルタホールディングス株式会社 撮像ユニットおよび撮像装置
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
EP2239600A1 (de) 2010-06-02 2010-10-13 Optotune AG Einstellbare optische Linse
JP5618681B2 (ja) * 2010-08-02 2014-11-05 キヤノン株式会社 ホルダ部とデバイス部を有する構造体及びその固定方法
FR2985851A1 (fr) * 2012-01-18 2013-07-19 St Microelectronics Crolles 2 Convertisseur d'energie a effet tunnel
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
DE102013209234B4 (de) 2013-05-17 2018-04-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung mit einem schwingfähig aufgehängten optischen Element
DE102013209823B4 (de) 2013-05-27 2015-10-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Struktur mit daran angeordneten Stegen und Verfahren zur Herstellung derselben
DE102013209804A1 (de) 2013-05-27 2014-11-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Elektrostatischer aktuator und verfahren zum herstellen desselben
US9883151B2 (en) * 2014-11-28 2018-01-30 Electronics And Telecommunications Research Institute Apparatus and method for capturing lightfield image
KR102408142B1 (ko) * 2014-11-28 2022-06-16 한국전자통신연구원 라이트필드 촬영 장치 및 방법
US11548261B2 (en) 2018-10-24 2023-01-10 Toyota Motor Engineering & Manufacturing North America, Inc. Structure with selectively variable stiffness
US11067200B2 (en) 2018-10-24 2021-07-20 Toyota Motor Engineering & Manufacturing North America, Inc. Self-healing microvalve
US11081975B2 (en) 2018-10-25 2021-08-03 Toyota Motor Engineering & Manufacturing North America, Inc. Somersaulting motion of soft bodied structure
US10946535B2 (en) 2018-10-25 2021-03-16 Toyota Motor Engineering & Manufacturing North America, Inc. Earthworm-like motion of soft bodied structure
US11088635B2 (en) 2018-10-25 2021-08-10 Toyota Motor Engineering & Manufacturing North America, Inc. Actuator with sealable edge region
US11041576B2 (en) * 2018-10-25 2021-06-22 Toyota Motor Engineering & Manufacturing North America, Inc. Actuator with static activated position
US11498270B2 (en) 2018-11-21 2022-11-15 Toyota Motor Engineering & Manufacturing North America, Inc. Programmable matter
US11195506B2 (en) 2018-12-03 2021-12-07 Toyota Motor Engineering & Manufacturing North America, Inc. Sound-modulating windows
US11066016B2 (en) 2018-12-18 2021-07-20 Toyota Motor Engineering & Manufacturing North America, Inc. Adjusting vehicle mirrors
US11479308B2 (en) 2019-01-09 2022-10-25 Toyota Motor Engineering & Manufacturing North America, Inc. Active vehicle interface for crosswind management
US11192469B2 (en) 2019-01-30 2021-12-07 Toyota Motor Engineering & Manufacturing North America, Inc. Vehicle seat with morphing bolsters
US11473567B2 (en) 2019-02-07 2022-10-18 Toyota Motor Engineering & Manufacturing North America, Inc. Programmable surface
US11370653B2 (en) * 2020-03-16 2022-06-28 Facebook Technologies, Llc Electrostatic zipper
US11413746B2 (en) 2020-12-09 2022-08-16 Toyota Motor Engineering & Manufacturing North America, Inc. Artificial muscle stacks comprising alternatingly offset artificial muscle layers

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US3886310A (en) * 1973-08-22 1975-05-27 Westinghouse Electric Corp Electrostatically deflectable light valve with improved diffraction properties
EP0539889A3 (en) * 1991-10-30 1993-07-28 Steinbichler, Hans, Dr. Micromechanical actuator
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
US5629918A (en) * 1995-01-20 1997-05-13 The Regents Of The University Of California Electromagnetically actuated micromachined flap
US6025951A (en) * 1996-11-27 2000-02-15 National Optics Institute Light modulating microdevice and method
US6384952B1 (en) * 1997-03-27 2002-05-07 Mems Optical Inc. Vertical comb drive actuated deformable mirror device and method
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US6724125B2 (en) * 1999-03-30 2004-04-20 Massachusetts Institute Of Technology Methods and apparatus for diffractive optical processing using an actuatable structure
US6220561B1 (en) * 1999-06-30 2001-04-24 Sandia Corporation Compound floating pivot micromechanisms
US6545385B2 (en) * 2000-04-11 2003-04-08 Sandia Corporation Microelectromechanical apparatus for elevating and tilting a platform
KR100413793B1 (ko) * 2000-12-05 2003-12-31 삼성전자주식회사 마이크로미러 액튜에이터
US6787438B1 (en) * 2001-10-16 2004-09-07 Teravieta Technologies, Inc. Device having one or more contact structures interposed between a pair of electrodes
US6919784B2 (en) * 2001-10-18 2005-07-19 The Board Of Trustees Of The University Of Illinois High cycle MEMS device
US6760144B2 (en) * 2001-12-05 2004-07-06 Jds Uniphase Corporation Articulated MEMS electrostatic rotary actuator
US6822370B2 (en) * 2002-03-06 2004-11-23 Analog Devices, Inc. Parallel plate electrostatic actuation of MEMS mirrors
FR2864527B1 (fr) * 2003-12-26 2008-04-18 Commissariat Energie Atomique Composants mems electrostatiques permettant un deplacement vertical important
FR2864634B1 (fr) * 2003-12-26 2006-02-24 Commissariat Energie Atomique Composants optiques et leur procede de realisation
FR2887537B1 (fr) * 2005-06-23 2007-09-07 Commissariat Energie Atomique Actionneur electrostatique, dispositif comportant de tels actionneurs, microsysteme comportant un tel dispositif et procede de realisation d'un tel actionneur

Also Published As

Publication number Publication date
EP1698041B1 (de) 2008-09-17
EP1698041A1 (de) 2006-09-06
FR2864526A1 (fr) 2005-07-01
US20070120438A1 (en) 2007-05-31
WO2005069472A1 (fr) 2005-07-28
JP2007517488A (ja) 2007-06-28
FR2864526B1 (fr) 2006-10-13

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Legal Events

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8364 No opposition during term of opposition