DE602004016196D1 - Vergrösserung der seitlichen auflösung der organischen dampfjet-ablagerung durch verwendung eines eingrenzenden schutzflusses - Google Patents

Vergrösserung der seitlichen auflösung der organischen dampfjet-ablagerung durch verwendung eines eingrenzenden schutzflusses

Info

Publication number
DE602004016196D1
DE602004016196D1 DE602004016196T DE602004016196T DE602004016196D1 DE 602004016196 D1 DE602004016196 D1 DE 602004016196D1 DE 602004016196 T DE602004016196 T DE 602004016196T DE 602004016196 T DE602004016196 T DE 602004016196T DE 602004016196 D1 DE602004016196 D1 DE 602004016196D1
Authority
DE
Germany
Prior art keywords
enlargement
organic steam
protection flow
steam deposition
side resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004016196T
Other languages
English (en)
Inventor
Max Shtein
Stephen R Forrest
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Princeton University
Original Assignee
Princeton University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Princeton University filed Critical Princeton University
Publication of DE602004016196D1 publication Critical patent/DE602004016196D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30—Coordination compounds
    • H10K85/321—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
    • H10K85/324—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3] comprising aluminium, e.g. Alq3

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Thin Film Transistor (AREA)
  • Air Humidification (AREA)
DE602004016196T 2003-10-23 2004-10-22 Vergrösserung der seitlichen auflösung der organischen dampfjet-ablagerung durch verwendung eines eingrenzenden schutzflusses Expired - Lifetime DE602004016196D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/690,704 US7744957B2 (en) 2003-10-23 2003-10-23 Method and apparatus for depositing material
PCT/US2004/034974 WO2005043641A1 (en) 2003-10-23 2004-10-22 Increasing the lateral resolution of organic vapor jet deposition by using a confining guard flow

Publications (1)

Publication Number Publication Date
DE602004016196D1 true DE602004016196D1 (de) 2008-10-09

Family

ID=34521705

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004016196T Expired - Lifetime DE602004016196D1 (de) 2003-10-23 2004-10-22 Vergrösserung der seitlichen auflösung der organischen dampfjet-ablagerung durch verwendung eines eingrenzenden schutzflusses

Country Status (9)

Country Link
US (1) US7744957B2 (de)
EP (3) EP1978570B1 (de)
JP (1) JP5000302B2 (de)
KR (1) KR101128144B1 (de)
CN (1) CN1883060B (de)
AT (1) ATE406668T1 (de)
DE (1) DE602004016196D1 (de)
TW (1) TWI363805B (de)
WO (1) WO2005043641A1 (de)

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US7879401B2 (en) * 2006-12-22 2011-02-01 The Regents Of The University Of Michigan Organic vapor jet deposition using an exhaust
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US8674593B2 (en) 2007-05-31 2014-03-18 Nthdegree Technologies Worldwide Inc Diode for a printable composition
WO2008150960A1 (en) * 2007-05-31 2008-12-11 Nthdegree Technologies Worldwide Inc. Addressable or static light emitting, power generating or other electronic apparatus
US7972031B2 (en) * 2007-05-31 2011-07-05 Nthdegree Technologies Worldwide Inc Addressable or static light emitting or electronic apparatus
US8395568B2 (en) 2007-05-31 2013-03-12 Nthdegree Technologies Worldwide Inc Light emitting, photovoltaic or other electronic apparatus and system
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US9419179B2 (en) 2007-05-31 2016-08-16 Nthdegree Technologies Worldwide Inc Diode for a printable composition
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US9425357B2 (en) 2007-05-31 2016-08-23 Nthdegree Technologies Worldwide Inc. Diode for a printable composition
US8852467B2 (en) 2007-05-31 2014-10-07 Nthdegree Technologies Worldwide Inc Method of manufacturing a printable composition of a liquid or gel suspension of diodes
US8415879B2 (en) 2007-05-31 2013-04-09 Nthdegree Technologies Worldwide Inc Diode for a printable composition
US8846457B2 (en) 2007-05-31 2014-09-30 Nthdegree Technologies Worldwide Inc Printable composition of a liquid or gel suspension of diodes
US9534772B2 (en) 2007-05-31 2017-01-03 Nthdegree Technologies Worldwide Inc Apparatus with light emitting diodes
US8889216B2 (en) 2007-05-31 2014-11-18 Nthdegree Technologies Worldwide Inc Method of manufacturing addressable and static electronic displays
US8809126B2 (en) 2007-05-31 2014-08-19 Nthdegree Technologies Worldwide Inc Printable composition of a liquid or gel suspension of diodes
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US8931431B2 (en) 2009-03-25 2015-01-13 The Regents Of The University Of Michigan Nozzle geometry for organic vapor jet printing
US8613496B2 (en) * 2009-03-25 2013-12-24 The Regents Of The University Of Michigan Compact organic vapor jet printing print head
WO2010127328A2 (en) * 2009-05-01 2010-11-04 Kateeva, Inc. Method and apparatus for organic vapor printing
US20110097495A1 (en) * 2009-09-03 2011-04-28 Universal Display Corporation Organic vapor jet printing with chiller plate
US8801856B2 (en) 2009-09-08 2014-08-12 Universal Display Corporation Method and system for high-throughput deposition of patterned organic thin films
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US9653709B2 (en) * 2012-11-20 2017-05-16 The Regents Of The University Of Michigan Optoelectronic device formed with controlled vapor flow
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CN104651781B (zh) * 2015-03-10 2020-03-03 合肥京东方光电科技有限公司 一种有机蒸汽材料的增压喷射沉积装置及方法
CN104711514B (zh) * 2015-04-07 2017-05-31 合肥京东方光电科技有限公司 一种成膜装置及方法
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US10704144B2 (en) * 2015-10-12 2020-07-07 Universal Display Corporation Apparatus and method for printing multilayer organic thin films from vapor phase in an ultra-pure gas ambient
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CN109477205B (zh) * 2016-07-29 2021-02-19 环球展览公司 沉积喷嘴
KR102389072B1 (ko) * 2016-10-18 2022-04-22 유니버셜 디스플레이 코포레이션 유기 기상 제트 증착 디바이스 구성
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Also Published As

Publication number Publication date
EP1676331A1 (de) 2006-07-05
TW200526793A (en) 2005-08-16
US7744957B2 (en) 2010-06-29
KR20060108681A (ko) 2006-10-18
EP3144988B1 (de) 2018-05-02
KR101128144B1 (ko) 2012-03-26
TWI363805B (en) 2012-05-11
EP3144988A1 (de) 2017-03-22
EP1978570B1 (de) 2017-12-06
JP2007520854A (ja) 2007-07-26
EP1978570A1 (de) 2008-10-08
EP1676331B1 (de) 2008-08-27
US20050087131A1 (en) 2005-04-28
JP5000302B2 (ja) 2012-08-15
CN1883060A (zh) 2006-12-20
ATE406668T1 (de) 2008-09-15
CN1883060B (zh) 2010-09-15
WO2005043641A1 (en) 2005-05-12

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