DE60144094D1 - Drucksensor des kapazitätstyps und verfahren zu seiner herstellung - Google Patents

Drucksensor des kapazitätstyps und verfahren zu seiner herstellung

Info

Publication number
DE60144094D1
DE60144094D1 DE60144094T DE60144094T DE60144094D1 DE 60144094 D1 DE60144094 D1 DE 60144094D1 DE 60144094 T DE60144094 T DE 60144094T DE 60144094 T DE60144094 T DE 60144094T DE 60144094 D1 DE60144094 D1 DE 60144094D1
Authority
DE
Germany
Prior art keywords
production
pressure sensor
capacity type
capacity
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60144094T
Other languages
English (en)
Inventor
Yoshiyuki Ishikura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Application granted granted Critical
Publication of DE60144094D1 publication Critical patent/DE60144094D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/01—Details
    • H01G5/014—Housing; Encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE60144094T 2000-07-04 2001-07-03 Drucksensor des kapazitätstyps und verfahren zu seiner herstellung Expired - Lifetime DE60144094D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000202367A JP3771425B2 (ja) 2000-07-04 2000-07-04 容量式圧力センサおよびその製造方法
PCT/JP2001/005751 WO2002003043A1 (fr) 2000-07-04 2001-07-03 Capteur de pression de type capacite et son procede de fabrication

Publications (1)

Publication Number Publication Date
DE60144094D1 true DE60144094D1 (de) 2011-04-07

Family

ID=18699900

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60144094T Expired - Lifetime DE60144094D1 (de) 2000-07-04 2001-07-03 Drucksensor des kapazitätstyps und verfahren zu seiner herstellung

Country Status (6)

Country Link
US (1) US6704186B2 (de)
EP (1) EP1316786B1 (de)
JP (1) JP3771425B2 (de)
CN (1) CN1181324C (de)
DE (1) DE60144094D1 (de)
WO (1) WO2002003043A1 (de)

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JP4091241B2 (ja) * 2000-09-29 2008-05-28 株式会社山武 圧力センサおよび圧力センサの製造方法
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US8118748B2 (en) * 2005-04-28 2012-02-21 Medtronic, Inc. Implantable capacitive pressure sensor system and method
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
US8072764B2 (en) * 2009-03-09 2011-12-06 Apple Inc. Multi-part substrate assemblies for low profile portable electronic devices
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
TWI586946B (zh) * 2013-02-04 2017-06-11 Fujikura Ltd Sensing detectors
CN103148977B (zh) * 2013-02-27 2016-01-20 东南大学 基于柔性基板的具有自封装功能的无源无线压力传感器
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
EP2871455B1 (de) 2013-11-06 2020-03-04 Invensense, Inc. Drucksensor
EP2871456B1 (de) 2013-11-06 2018-10-10 Invensense, Inc. Drucksensor und Herstellungsmethode für einen Drucksensor
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
FI126999B (en) * 2014-01-17 2017-09-15 Murata Manufacturing Co Improved pressure sensor
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
EP3614115A1 (de) 2015-04-02 2020-02-26 InvenSense, Inc. Drucksensor
EP3117991A1 (de) * 2015-07-08 2017-01-18 AGC Glass Europe Autoscheibe
CN105575637B (zh) * 2015-12-23 2017-11-24 四方继保（武汉）软件有限公司 一种悬浮平板电极结构的gis电子式电压互感器
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
RU178898U1 (ru) * 2017-12-12 2018-04-23 Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский технологический университет" Емкостной датчик давления с алмазной мембраной
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
US11225409B2 (en) 2018-09-17 2022-01-18 Invensense, Inc. Sensor with integrated heater
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
US10955306B2 (en) * 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4919875A (de) * 1972-04-18 1974-02-21
JPS56129831A (en) * 1980-03-17 1981-10-12 Yokogawa Hokushin Electric Corp Pressure converter
US4405970A (en) * 1981-10-13 1983-09-20 United Technologies Corporation Silicon-glass-silicon capacitive pressure transducer
US4562742A (en) * 1984-08-07 1986-01-07 Bell Microcomponents, Inc. Capacitive pressure transducer
US4578735A (en) * 1984-10-12 1986-03-25 Knecht Thomas A Pressure sensing cell using brittle diaphragm
DE3814844A1 (de) * 1988-05-02 1989-11-16 Iot Entwicklungsgesellschaft F Verfahren und vorrichtung zur bestimmung der brechzahl n einer substanz
US4951174A (en) * 1988-12-30 1990-08-21 United Technologies Corporation Capacitive pressure sensor with third encircling plate
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
JPH05215770A (ja) * 1992-02-04 1993-08-24 Hitachi Ltd 半導体容量式加速度センサ
EP0596711B1 (de) 1992-11-06 1998-01-21 Texas Instruments Incorporated Verfahren zur Herstellung eines kapazitiven Druckwandlers
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
DE69942382D1 (de) * 1998-03-12 2010-07-01 Yamatake Corp Sensor und verfahren zu dessen herstellung

Also Published As

Publication number Publication date
US20030189809A1 (en) 2003-10-09
JP3771425B2 (ja) 2006-04-26
EP1316786B1 (de) 2011-02-23
US6704186B2 (en) 2004-03-09
EP1316786A1 (de) 2003-06-04
CN1181324C (zh) 2004-12-22
JP2002022583A (ja) 2002-01-23
EP1316786A4 (de) 2007-08-01
CN1440504A (zh) 2003-09-03
WO2002003043A1 (fr) 2002-01-10

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