DE60135194D1 - Umformungsvorrichtung der Verschiebungsrichtung eines Schiebers eines elektrostatischen Betätigers - Google Patents

Umformungsvorrichtung der Verschiebungsrichtung eines Schiebers eines elektrostatischen Betätigers

Info

Publication number
DE60135194D1
DE60135194D1 DE60135194T DE60135194T DE60135194D1 DE 60135194 D1 DE60135194 D1 DE 60135194D1 DE 60135194 T DE60135194 T DE 60135194T DE 60135194 T DE60135194 T DE 60135194T DE 60135194 D1 DE60135194 D1 DE 60135194D1
Authority
DE
Germany
Prior art keywords
slide
conversion device
displacement direction
electrostatic actuator
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60135194T
Other languages
English (en)
Inventor
Yasuhisa Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Application granted granted Critical
Publication of DE60135194D1 publication Critical patent/DE60135194D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
DE60135194T 2000-10-05 2001-10-05 Umformungsvorrichtung der Verschiebungsrichtung eines Schiebers eines elektrostatischen Betätigers Expired - Lifetime DE60135194D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000306445A JP3533443B2 (ja) 2000-10-05 2000-10-05 静電アクチュエータの運動方向変換機構

Publications (1)

Publication Number Publication Date
DE60135194D1 true DE60135194D1 (de) 2008-09-18

Family

ID=18787133

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60135194T Expired - Lifetime DE60135194D1 (de) 2000-10-05 2001-10-05 Umformungsvorrichtung der Verschiebungsrichtung eines Schiebers eines elektrostatischen Betätigers

Country Status (4)

Country Link
US (1) US6781280B2 (de)
EP (1) EP1195887B1 (de)
JP (1) JP3533443B2 (de)
DE (1) DE60135194D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3533443B2 (ja) * 2000-10-05 2004-05-31 独立行政法人産業技術総合研究所 静電アクチュエータの運動方向変換機構
JP4534010B2 (ja) * 2004-06-15 2010-09-01 独立行政法人産業技術総合研究所 プラズマエッチング方法
CN102897704B (zh) * 2012-10-17 2015-03-04 东南大学 一种静电力调变齿间隙的微机电梳齿机构
JP6953117B2 (ja) * 2016-07-04 2021-10-27 エドワード・パクチャン Ｍｅｍｓディスプレイのための光変調器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2682181B2 (ja) 1990-02-02 1997-11-26 日本電気株式会社 微小可動機械機構
JPH05116757A (ja) * 1991-10-24 1993-05-14 Ricoh Co Ltd 搬送機構
US5434464A (en) 1994-05-23 1995-07-18 Mcnc Unidirectional supporting structure for microelectromechanical transducers
US5862003A (en) * 1995-06-23 1999-01-19 Saif; Muhammad T. A. Micromotion amplifier
WO2001077001A2 (en) * 2000-04-11 2001-10-18 Sandia Corporation Microelectromechanical apparatus for elevating and tilting a platform
JP3533443B2 (ja) * 2000-10-05 2004-05-31 独立行政法人産業技術総合研究所 静電アクチュエータの運動方向変換機構

Also Published As

Publication number Publication date
JP3533443B2 (ja) 2004-05-31
EP1195887A3 (de) 2003-09-24
EP1195887A2 (de) 2002-04-10
JP2002119072A (ja) 2002-04-19
US20020050763A1 (en) 2002-05-02
US6781280B2 (en) 2004-08-24
EP1195887B1 (de) 2008-08-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition