DE60133958D1 - Schaltvorrichtung für gepulste Leistung - Google Patents

Schaltvorrichtung für gepulste Leistung

Info

Publication number
DE60133958D1
DE60133958D1 DE60133958T DE60133958T DE60133958D1 DE 60133958 D1 DE60133958 D1 DE 60133958D1 DE 60133958 T DE60133958 T DE 60133958T DE 60133958 T DE60133958 T DE 60133958T DE 60133958 D1 DE60133958 D1 DE 60133958D1
Authority
DE
Germany
Prior art keywords
switching device
pulsed power
pulsed
power
switching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60133958T
Other languages
English (en)
Inventor
Katsuji Iida
Tatsuhiko Hatano
Takeshi Sakuma
Wataru Shionoya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60133958D1 publication Critical patent/DE60133958D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
    • H03K3/57—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a semiconductor device

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Generation Of Surge Voltage And Current (AREA)
  • Electronic Switches (AREA)
DE60133958T 2000-02-21 2001-02-20 Schaltvorrichtung für gepulste Leistung Expired - Lifetime DE60133958D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000042808A JP2001238470A (ja) 2000-02-21 2000-02-21 パルス電力発生用スイッチ回路

Publications (1)

Publication Number Publication Date
DE60133958D1 true DE60133958D1 (de) 2008-06-26

Family

ID=18565832

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60133958T Expired - Lifetime DE60133958D1 (de) 2000-02-21 2001-02-20 Schaltvorrichtung für gepulste Leistung

Country Status (5)

Country Link
US (1) US6359424B2 (de)
EP (1) EP1128557B1 (de)
JP (1) JP2001238470A (de)
KR (1) KR100399714B1 (de)
DE (1) DE60133958D1 (de)

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GB2378065B (en) * 2001-06-15 2004-09-15 Marconi Applied Technologies High voltage switching apparatus
US6741484B2 (en) * 2002-01-04 2004-05-25 Scandinova Ab Power modulator having at least one pulse generating module; multiple cores; and primary windings parallel-connected such that each pulse generating module drives all cores
KR100430670B1 (ko) * 2002-05-02 2004-05-10 한국전기연구원 승압형 컨버터의 직렬 배열 구조를 갖는 펄스전압발생회로
EP1363386B1 (de) 2002-05-13 2005-01-05 Luxon Energy Devices Corporation Generator für Hochstrompulse
WO2005012807A2 (en) * 2003-07-28 2005-02-10 Phillips & Temro Industries, Inc. Controller for air intake heater
US7663319B2 (en) * 2004-02-22 2010-02-16 Zond, Inc. Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
US9123508B2 (en) * 2004-02-22 2015-09-01 Zond, Llc Apparatus and method for sputtering hard coatings
US7095179B2 (en) * 2004-02-22 2006-08-22 Zond, Inc. Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
US7514819B2 (en) * 2004-07-01 2009-04-07 Dana Automotive Systems Group, Llc Semiconductor switch assembly for pulse power apparatus
EP2477207A3 (de) * 2004-09-24 2014-09-03 Zond, Inc. Vorrichtung zum Erzeugen von elektrischen Hochstrom-entladungen
GB0503439D0 (en) * 2005-02-18 2005-03-30 E2V Tech Uk Ltd High voltage switching apparatus
JP2006324039A (ja) * 2005-05-17 2006-11-30 Ushio Inc パルス発生装置および極端紫外光光源装置
US7633182B2 (en) * 2005-11-09 2009-12-15 Bae Systems Advanced Technologies, Inc. Bipolar pulse generators with voltage multiplication
EP2063519B1 (de) * 2006-09-15 2018-10-31 Mitsubishi Electric Corporation Dc/dc-stromwandler
ATE458306T1 (de) * 2006-11-09 2010-03-15 Osram Gmbh Schaltungsanordnung
US9039871B2 (en) 2007-11-16 2015-05-26 Advanced Energy Industries, Inc. Methods and apparatus for applying periodic voltage using direct current
US8133359B2 (en) * 2007-11-16 2012-03-13 Advanced Energy Industries, Inc. Methods and apparatus for sputtering deposition using direct current
JP2009184862A (ja) * 2008-02-05 2009-08-20 Ngk Insulators Ltd プラズマリアクタ
US7903434B2 (en) * 2008-06-23 2011-03-08 Scandinova Systems Ab Power switch grouping
DE102013207329A1 (de) * 2013-04-23 2014-10-23 Siemens Aktiengesellschaft Induktive Isolation von Spannungsquellen eines IVA mittels einzelner gekoppelter Spulen
CA2818450C (en) 2013-06-17 2020-04-07 Mcmaster University Reconfigurable hybrid energy storage system for electrified vehicles
US10020800B2 (en) 2013-11-14 2018-07-10 Eagle Harbor Technologies, Inc. High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
US10978955B2 (en) 2014-02-28 2021-04-13 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
CN116633324A (zh) 2013-11-14 2023-08-22 鹰港科技有限公司 高压纳秒脉冲发生器
US10892140B2 (en) 2018-07-27 2021-01-12 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
US11539352B2 (en) 2013-11-14 2022-12-27 Eagle Harbor Technologies, Inc. Transformer resonant converter
US10483089B2 (en) 2014-02-28 2019-11-19 Eagle Harbor Technologies, Inc. High voltage resistive output stage circuit
CN108471302B (zh) * 2014-07-11 2023-07-07 鹰港科技有限公司 纳秒脉冲发生器
US11430635B2 (en) 2018-07-27 2022-08-30 Eagle Harbor Technologies, Inc. Precise plasma control system
US11004660B2 (en) 2018-11-30 2021-05-11 Eagle Harbor Technologies, Inc. Variable output impedance RF generator
US10268846B2 (en) * 2016-12-30 2019-04-23 Eagle Harbor Technologies, Inc. High voltage inductive adder
WO2018148182A1 (en) 2017-02-07 2018-08-16 Eagle Harbor Technologies, Inc. Transformer resonant converter
JP6902167B2 (ja) 2017-08-25 2021-07-14 イーグル ハーバー テクノロジーズ, インク.Eagle Harbor Technologies, Inc. ナノ秒パルスを使用する任意波形の発生
US11302518B2 (en) 2018-07-27 2022-04-12 Eagle Harbor Technologies, Inc. Efficient energy recovery in a nanosecond pulser circuit
US11222767B2 (en) 2018-07-27 2022-01-11 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
US11532457B2 (en) 2018-07-27 2022-12-20 Eagle Harbor Technologies, Inc. Precise plasma control system
EP3834285A4 (de) 2018-08-10 2022-07-20 Eagle Harbor Technologies, Inc. Plasmamantelsteuerung für hf-plasmareaktoren
TWI783203B (zh) 2019-01-08 2022-11-11 美商鷹港科技股份有限公司 奈秒脈波產生器電路
KR20210123343A (ko) * 2019-01-31 2021-10-13 이글 하버 테크놀로지스, 인코포레이티드 정밀 플라즈마 제어 시스템
TWI778449B (zh) 2019-11-15 2022-09-21 美商鷹港科技股份有限公司 高電壓脈衝電路
EP4082036A4 (de) 2019-12-24 2023-06-07 Eagle Harbor Technologies, Inc. Nanosekunden-impulsgeber-hf-isolation für plasmasysteme
US11888485B2 (en) 2020-06-17 2024-01-30 Mitsubishi Electric Corporation Pulse power supply device
CN114675625A (zh) * 2022-03-21 2022-06-28 潍柴动力股份有限公司 一种控制器控制方法及装置

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FR2544579B1 (fr) * 1983-04-15 1986-05-16 Cgr Mev Modulateur de puissance muni d'un transformateur
US5365421A (en) * 1992-12-14 1994-11-15 Texas Instruments Incorporated Pulse transformer having plural simultaneously operable primary windings and a single secondary winding
SE9604814D0 (sv) * 1996-12-20 1996-12-20 Scanditronix Medical Ab Power modulator
US5914974A (en) * 1997-02-21 1999-06-22 Cymer, Inc. Method and apparatus for eliminating reflected energy due to stage mismatch in nonlinear magnetic compression modules
US6055161A (en) * 1999-04-12 2000-04-25 Lincoln Global, Inc. Switching type power supply for arc welding

Also Published As

Publication number Publication date
JP2001238470A (ja) 2001-08-31
KR100399714B1 (ko) 2003-09-29
US6359424B2 (en) 2002-03-19
EP1128557A3 (de) 2003-10-29
EP1128557B1 (de) 2008-05-14
US20010030527A1 (en) 2001-10-18
EP1128557A2 (de) 2001-08-29
KR20010083187A (ko) 2001-08-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition