DE60130356D1 - METHOD AND DEVICE FOR DETERMINING THE POLARIZATION PROPERTIES OF LIGHT THAT IS EMITTED, REFLECTED, OR LEVIED BY A MATERIAL THROUGH THE USE OF A LASER SCANNING MICROSCOPE - Google Patents
METHOD AND DEVICE FOR DETERMINING THE POLARIZATION PROPERTIES OF LIGHT THAT IS EMITTED, REFLECTED, OR LEVIED BY A MATERIAL THROUGH THE USE OF A LASER SCANNING MICROSCOPEInfo
- Publication number
- DE60130356D1 DE60130356D1 DE60130356T DE60130356T DE60130356D1 DE 60130356 D1 DE60130356 D1 DE 60130356D1 DE 60130356 T DE60130356 T DE 60130356T DE 60130356 T DE60130356 T DE 60130356T DE 60130356 D1 DE60130356 D1 DE 60130356D1
- Authority
- DE
- Germany
- Prior art keywords
- light
- determining
- intensity
- reflected
- emitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000010287 polarization Effects 0.000 title abstract 8
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention relates to a method and apparatus for determining the polarization properties of light emitted, reflected or transmitted by a material using a laser scanning microscope with the tested material being illuminated point by point with a laser beam of known polarization state. According to the invention the light beam with a polarization state modified by the material or the light emitted by the material is being examined by measuring the intensity of two different polarization components of a selected light beam received from each point of said material essentially at the same time and assigning a signal obtained by processing the two intensity signals to a respective point of an image of said material. The apparatus has a polarization state generator between the laser light source and the material being tested, and a detector in a light beam for determining the intensity of light with a polarization state modified by the material or the intensity of light emitted by the material, the improvement of which is that a means for dividing the polarization components in space or time is used in front of the detector.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
HU0004571 | 2000-11-17 | ||
HU0004571A HU226937B1 (en) | 2000-11-17 | 2000-11-17 | Method and apparatus for determining polarization amount of material by a laser scanning microscope |
PCT/HU2001/000116 WO2002040953A1 (en) | 2000-11-17 | 2001-11-16 | Method and apparatus for determining the polarization properties of light emitted, reflected or transmitted by a material using a laser scanning microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60130356D1 true DE60130356D1 (en) | 2007-10-18 |
DE60130356T2 DE60130356T2 (en) | 2008-05-08 |
Family
ID=89978770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60130356T Expired - Lifetime DE60130356T2 (en) | 2000-11-17 | 2001-11-16 | METHOD AND DEVICE FOR DETERMINING THE POLARIZATION PROPERTIES OF LIGHT THAT IS EMITTED, REFLECTED OR GIVEN BY A MATERIAL THROUGH USING A LASER SCANNING MICROSCOPE |
Country Status (7)
Country | Link |
---|---|
US (1) | US6856391B2 (en) |
EP (1) | EP1334339B8 (en) |
JP (1) | JP2004514129A (en) |
AT (1) | ATE372507T1 (en) |
DE (1) | DE60130356T2 (en) |
HU (1) | HU226937B1 (en) |
WO (1) | WO2002040953A1 (en) |
Families Citing this family (56)
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US7251029B2 (en) * | 2002-07-01 | 2007-07-31 | Canon Kabushiki Kaisha | Birefringence measurement apparatus, strain remover, polarimeter and exposure apparatus |
US7038848B2 (en) * | 2002-12-27 | 2006-05-02 | Olympus Corporation | Confocal microscope |
US7369234B2 (en) * | 2003-02-03 | 2008-05-06 | Rudolph Technologies, Inc. | Method of performing optical measurement on a sample |
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JP2005017282A (en) * | 2003-05-30 | 2005-01-20 | Olympus Corp | Light-receiving unit and measuring apparatus including the same |
US7317517B2 (en) * | 2003-07-31 | 2008-01-08 | Intel Corporation | Birefringence profiler |
FR2872287B1 (en) * | 2004-06-28 | 2007-03-16 | Cis Bio Internat Sa | METHOD FOR IMPROVING THE DETECTION OF FLUORESCENCE SIGNALS DURING NON-RADIATIVE ENERGY TRANSFER |
US7630075B2 (en) * | 2004-09-27 | 2009-12-08 | Honeywell International Inc. | Circular polarization illumination based analyzer system |
US7412175B2 (en) * | 2005-06-20 | 2008-08-12 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Interferometric polarization control |
WO2007088947A1 (en) * | 2006-02-02 | 2007-08-09 | National University Corporation NARA Institute of Science and Technology | Circular dichroism fluorescent microscope |
JP4921090B2 (en) * | 2006-09-25 | 2012-04-18 | 株式会社モリテックス | Optical anisotropy parameter measuring method and measuring apparatus |
JP5189301B2 (en) | 2007-03-12 | 2013-04-24 | オリンパス株式会社 | Laser scanning microscope |
EP1988373A1 (en) * | 2007-05-02 | 2008-11-05 | National University of Ireland Galway | A vectorial polarimetry method and apparatus for analysing the three-dimensional electromagnetic field resulting from an interaction between a focused illuminating field and a sample to be observed |
HUP0700635A2 (en) * | 2007-09-28 | 2009-05-28 | Mta Szegedi Biolog Koezpont | Differential-polarizing accessory measuring block for laser scanning microscopes |
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WO2012014778A1 (en) | 2010-07-26 | 2012-02-02 | オリンパス株式会社 | Method for detecting dilute particles in solution using luminescent probe |
WO2012032981A1 (en) | 2010-09-10 | 2012-03-15 | オリンパス株式会社 | Optical analysis method using optical intensity of single light-emitting particle |
CN103221806B (en) | 2010-09-10 | 2015-11-25 | 奥林巴斯株式会社 | Use the optical analysis method of the measurement of the light of plural wavelength band |
EP2620763A4 (en) * | 2010-10-19 | 2015-05-27 | Olympus Corp | Optical analysis device for observing polarisation characteristics of single light-emitting particle, optical analysis method and optical analysis computer program therefor |
DE102010049751B4 (en) * | 2010-10-29 | 2020-11-05 | "Stiftung Caesar" (Center Of Advanced European Studies And Research) | Optical beam splitter for the simultaneous recording of a Z-stack on a semiconductor chip, kit for the construction of an optical beam splitter and light microscope |
WO2012070414A1 (en) | 2010-11-25 | 2012-05-31 | オリンパス株式会社 | Photometric analysis device and photometric analysis method using wavelength characteristic of light emitted from single illuminant particle |
EP2667183A4 (en) | 2011-01-20 | 2017-05-10 | Olympus Corporation | Photoanalysis method and photoanalysis device using detection of light from single light-emitting particle |
CN103339256B (en) | 2011-01-26 | 2016-03-16 | 奥林巴斯株式会社 | Differentiate the method for polymorphic nucleic acid molecule |
WO2012102260A1 (en) | 2011-01-26 | 2012-08-02 | オリンパス株式会社 | Method for identifying polymorphism of nucleic acid molecule |
WO2012133292A1 (en) | 2011-03-29 | 2012-10-04 | オリンパス株式会社 | Photometric analysis device, photometric analysis method, and computer program for photometric analysis, using single light-emitting particle detection |
JP5885738B2 (en) | 2011-04-13 | 2016-03-15 | オリンパス株式会社 | Optical analysis apparatus using single luminescent particle detection, optical analysis method, and computer program for optical analysis |
WO2012144528A1 (en) | 2011-04-18 | 2012-10-26 | オリンパス株式会社 | Quantitative determination method for target particles, photometric analysis device, and computer program for photometric analysis |
EP2743682B1 (en) | 2011-08-11 | 2017-05-31 | Olympus Corporation | Method for detecting target particles |
JP6013337B2 (en) | 2011-08-15 | 2016-10-25 | オリンパス株式会社 | Optical analysis apparatus using single luminescent particle detection, optical analysis method, and computer program for optical analysis |
EP2749868B1 (en) | 2011-08-26 | 2019-02-27 | Olympus Corporation | Single-particle detector using optical analysis, single-particle detection method using same, and computer program for single-particle detection |
WO2013031439A1 (en) | 2011-08-26 | 2013-03-07 | オリンパス株式会社 | Optical analyzer using single light-emitting particle detection, optical analysis method, and computer program for optical analysis |
JP6010035B2 (en) | 2011-08-30 | 2016-10-19 | オリンパス株式会社 | Optical analysis apparatus using single luminescent particle detection, optical analysis method, and computer program for optical analysis |
WO2013031365A1 (en) | 2011-08-30 | 2013-03-07 | オリンパス株式会社 | Method for detecting target particles |
WO2013069504A1 (en) | 2011-11-10 | 2013-05-16 | オリンパス株式会社 | Spectroscopy device, spectroscopy method, and computer program for spectroscopy, employing individual light-emitting particle detection |
WO2013121905A1 (en) | 2012-02-17 | 2013-08-22 | オリンパス株式会社 | Optical analysis device using single particle detection technique, optical analysis method and computer program for optical analysis |
EP2818850B1 (en) | 2012-02-22 | 2016-08-03 | Olympus Corporation | Method for detecting a target particle |
EP2829614A4 (en) | 2012-03-21 | 2016-03-16 | Olympus Corp | Method for detecting target nucleic acid molecule |
EP2840380A4 (en) | 2012-04-18 | 2015-11-25 | Olympus Corp | Single-particle detection device using photoanalysis, single-particle detection method, and computer program for single-particle detection |
EP2840381B1 (en) | 2012-04-18 | 2017-08-09 | Olympus Corporation | Method for detecting target particles |
JP6087751B2 (en) * | 2013-07-05 | 2017-03-01 | 株式会社モリテックス | Optical anisotropy parameter measuring device, measuring method and measuring program |
JP6360481B2 (en) | 2013-07-31 | 2018-07-18 | オリンパス株式会社 | Optical microscope apparatus using single luminescent particle detection technique, microscope observation method, and computer program for microscope observation |
US9989454B2 (en) * | 2013-10-04 | 2018-06-05 | Axometrics, Inc. | Method and apparatus for measuring parameters of optical anisotropy |
JP6313776B2 (en) | 2013-10-07 | 2018-04-18 | オリンパス株式会社 | Optical analysis apparatus using single luminescent particle detection, optical analysis method, and computer program for optical analysis |
US9689661B2 (en) | 2013-12-03 | 2017-06-27 | The General Hospital Corporation | Apparatus and method to compensate for input polarization mode variation |
CN103940537A (en) * | 2014-04-10 | 2014-07-23 | 中国科学院半导体研究所 | Material microscopic stress testing system |
GB201411478D0 (en) * | 2014-06-27 | 2014-08-13 | Univ Salford Entpr Ltd | Measuring polarisation |
TWI542864B (en) * | 2014-12-30 | 2016-07-21 | 財團法人工業技術研究院 | A system for measuring anisotropy, a method for measuring anisotropy and a calibration method thereof |
US10621454B2 (en) * | 2015-06-29 | 2020-04-14 | Beijing Kuangshi Technology Co., Ltd. | Living body detection method, living body detection system, and computer program product |
GB201515862D0 (en) | 2015-09-08 | 2015-10-21 | Univ Southampton | Polarisation microscope |
JPWO2017098597A1 (en) | 2015-12-09 | 2018-10-11 | オリンパス株式会社 | Optical analysis method and optical analysis apparatus using single luminescent particle detection |
EP3538941A4 (en) | 2016-11-10 | 2020-06-17 | The Trustees of Columbia University in the City of New York | Rapid high-resolution imaging methods for large samples |
JP6351893B1 (en) * | 2018-02-26 | 2018-07-04 | 日本分光株式会社 | Phase difference control device |
WO2020106972A1 (en) * | 2018-11-21 | 2020-05-28 | The Board Of Trustees Of The Leland Stanford Junior University | Wide-field nanosecond imaging methods using wide-field optical modulators |
CN110261319B (en) * | 2019-06-24 | 2021-11-16 | 西安理工大学 | Device and method for measuring Mueller matrix spectrum based on four times |
EP3907492A1 (en) | 2020-05-08 | 2021-11-10 | ETH Zurich | Optical activity measurements with frequency modulation |
US20240027186A1 (en) * | 2022-07-22 | 2024-01-25 | Onto Innovation Inc. | Apparatus to characterize substrates and films |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4306809A (en) * | 1979-03-26 | 1981-12-22 | The Board Of Regents Of The University Of Nebraska | Polarimeter |
US5257092A (en) * | 1990-06-27 | 1993-10-26 | Asahi Kogaku Kogyo Kabushiki Kaisha | Apparatus for measuring polarization and birefringence |
JPH063594A (en) * | 1992-06-18 | 1994-01-14 | Nikon Corp | Confocal laser scanning differential interference microscope |
US5457536A (en) * | 1994-04-04 | 1995-10-10 | California Institute Of Technology | Polarization modulation laser scanning microscopy |
JPH08160305A (en) * | 1994-12-08 | 1996-06-21 | Nikon Corp | Laser scanning microscope |
WO1997002476A1 (en) * | 1995-06-30 | 1997-01-23 | Furukawa Denki Kogyo Kabushiki Kaisha | Method of evaluating and measuring polarization state, polarization state and polarization mode dispersion and apparatus therefor |
DE19626261A1 (en) * | 1995-06-30 | 1997-01-02 | Nikon Corp | IC pattern and metal surface test object observation differential interference microscope |
US6025917A (en) * | 1996-09-24 | 2000-02-15 | Laboratory Of Molecular Biophotonics | Polarization characteristic measuring method and apparatus |
FR2755254B1 (en) * | 1996-10-25 | 1999-01-15 | Centre Nat Rech Scient | OPTICAL MODULATION COMPONENT, POLARIMETER AND ELLIPSOMETER FROM MUELLER INCLUDING SUCH AN OPTICAL COMPONENT, METHOD FOR CALIBRATION OF THIS ELLIPSOMETER AND METHOD FOR ELLIPSOMETRIC MEASUREMENT |
US6134011A (en) * | 1997-09-22 | 2000-10-17 | Hdi Instrumentation | Optical measurement system using polarized light |
JPH1195114A (en) * | 1997-09-24 | 1999-04-09 | Olympus Optical Co Ltd | Scanning optical microscope device |
US6097488A (en) * | 1998-06-22 | 2000-08-01 | Princeton University | Method and apparatus for measuring micro structures, anisotropy and birefringence in polymers using laser scattered light |
CA2380492A1 (en) * | 1999-07-27 | 2001-02-01 | Thomas E. Furtak | Parallel detecting, spectroscopic ellipsometers/polarimeters |
US6356036B1 (en) * | 2000-12-01 | 2002-03-12 | Laser Diagnostic Technologies, Inc. | System and method for determining birefringence of anterior segment of a patient's eye |
-
2000
- 2000-11-17 HU HU0004571A patent/HU226937B1/en not_active IP Right Cessation
-
2001
- 2001-11-16 AT AT01996722T patent/ATE372507T1/en not_active IP Right Cessation
- 2001-11-16 EP EP01996722A patent/EP1334339B8/en not_active Expired - Lifetime
- 2001-11-16 DE DE60130356T patent/DE60130356T2/en not_active Expired - Lifetime
- 2001-11-16 JP JP2002542833A patent/JP2004514129A/en active Pending
- 2001-11-16 WO PCT/HU2001/000116 patent/WO2002040953A1/en active IP Right Grant
-
2002
- 2002-07-17 US US10/196,593 patent/US6856391B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2002040953A1 (en) | 2002-05-23 |
EP1334339B1 (en) | 2007-09-05 |
EP1334339B8 (en) | 2007-12-26 |
HU0004571D0 (en) | 2001-02-28 |
ATE372507T1 (en) | 2007-09-15 |
DE60130356T2 (en) | 2008-05-08 |
US6856391B2 (en) | 2005-02-15 |
HUP0004571A2 (en) | 2002-07-29 |
EP1334339A1 (en) | 2003-08-13 |
HU226937B1 (en) | 2010-03-29 |
US20030058442A1 (en) | 2003-03-27 |
JP2004514129A (en) | 2004-05-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: MAGYAR TUDOMANYOS AKADEMIA SZEGEDI BIOLOGIAI K, HU |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: MAGYARTUDOMANYOS AKADEMIA SZEGEDI BIOLOGIAI KO, HU |
|
8380 | Miscellaneous part iii |
Free format text: DIE INHABERAENDERUNG VOM 28.11.2007, PUBLIZIERT AM 28.02.2008, WURDE GELOESCHT. |
|
8364 | No opposition during term of opposition | ||
R082 | Change of representative |
Ref document number: 1334339 Country of ref document: EP Representative=s name: MUELLER - HOFFMANN & PARTNER PATENTANWAELTE, 81667 |