DE60117286D1 - Prozesssteuerung - Google Patents

Prozesssteuerung

Info

Publication number
DE60117286D1
DE60117286D1 DE60117286T DE60117286T DE60117286D1 DE 60117286 D1 DE60117286 D1 DE 60117286D1 DE 60117286 T DE60117286 T DE 60117286T DE 60117286 T DE60117286 T DE 60117286T DE 60117286 D1 DE60117286 D1 DE 60117286D1
Authority
DE
Germany
Prior art keywords
process control
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60117286T
Other languages
English (en)
Other versions
DE60117286T2 (de
Inventor
Boaz Brill
Yoel Cohen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nova Ltd
Original Assignee
Nova Measuring Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nova Measuring Instruments Ltd filed Critical Nova Measuring Instruments Ltd
Publication of DE60117286D1 publication Critical patent/DE60117286D1/de
Application granted granted Critical
Publication of DE60117286T2 publication Critical patent/DE60117286T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE60117286T 2000-10-30 2001-10-30 Prozesssteuerung Expired - Lifetime DE60117286T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL13936800 2000-10-30
IL139368A IL139368A (en) 2000-10-30 2000-10-30 Process control for microlithography
PCT/IL2001/001007 WO2002037186A1 (en) 2000-10-30 2001-10-30 Process control for micro-lithography

Publications (2)

Publication Number Publication Date
DE60117286D1 true DE60117286D1 (de) 2006-04-20
DE60117286T2 DE60117286T2 (de) 2006-10-12

Family

ID=11074773

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60117286T Expired - Lifetime DE60117286T2 (de) 2000-10-30 2001-10-30 Prozesssteuerung

Country Status (6)

Country Link
US (1) US6704920B2 (de)
EP (1) EP1360554B1 (de)
AU (1) AU2002214225A1 (de)
DE (1) DE60117286T2 (de)
IL (1) IL139368A (de)
WO (1) WO2002037186A1 (de)

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US20030229875A1 (en) * 2002-06-07 2003-12-11 Smith Taber H. Use of models in integrated circuit fabrication
US7152215B2 (en) * 2002-06-07 2006-12-19 Praesagus, Inc. Dummy fill for integrated circuits
WO2003104921A2 (en) * 2002-06-07 2003-12-18 Praesagus, Inc. Characterization adn reduction of variation for integrated circuits
US7853904B2 (en) * 2002-06-07 2010-12-14 Cadence Design Systems, Inc. Method and system for handling process related variations for integrated circuits based upon reflections
US7363099B2 (en) 2002-06-07 2008-04-22 Cadence Design Systems, Inc. Integrated circuit metrology
US7124386B2 (en) * 2002-06-07 2006-10-17 Praesagus, Inc. Dummy fill for integrated circuits
US7774726B2 (en) * 2002-06-07 2010-08-10 Cadence Design Systems, Inc. Dummy fill for integrated circuits
US7712056B2 (en) * 2002-06-07 2010-05-04 Cadence Design Systems, Inc. Characterization and verification for integrated circuit designs
US7393755B2 (en) * 2002-06-07 2008-07-01 Cadence Design Systems, Inc. Dummy fill for integrated circuits
US6924088B2 (en) * 2002-06-20 2005-08-02 Applied Materials, Inc. Method and system for realtime CD microloading control
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DE10245621B4 (de) * 2002-09-30 2006-12-28 Infineon Technologies Ag Verfahren zur Übergabe einer Meßposition eines auf einer Maske zu bildenden Strukturelementes
US6915177B2 (en) * 2002-09-30 2005-07-05 Advanced Micro Devices, Inc. Comprehensive integrated lithographic process control system based on product design and yield feedback system
SG120958A1 (en) * 2002-11-01 2006-04-26 Asml Netherlands Bv Inspection method and device manufacturing method
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DE10302868B4 (de) * 2003-01-25 2008-07-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Bestimmung von Strukturparametern einer Oberfläche mit einem lernfähigen System
EP1602015A2 (de) * 2003-02-18 2005-12-07 Tokyo Electron Limited Verfahren zur automatischen konfiguration einer prozessanlage
US7124394B1 (en) * 2003-04-06 2006-10-17 Luminescent Technologies, Inc. Method for time-evolving rectilinear contours representing photo masks
US7698665B2 (en) * 2003-04-06 2010-04-13 Luminescent Technologies, Inc. Systems, masks, and methods for manufacturable masks using a functional representation of polygon pattern
US7480889B2 (en) * 2003-04-06 2009-01-20 Luminescent Technologies, Inc. Optimized photomasks for photolithography
WO2004097528A2 (en) 2003-04-29 2004-11-11 Koninklijke Philips Electronics N.V. System and method for characterizing lithography effects on a wafer
US6911399B2 (en) * 2003-09-19 2005-06-28 Applied Materials, Inc. Method of controlling critical dimension microloading of photoresist trimming process by selective sidewall polymer deposition
US7094613B2 (en) * 2003-10-21 2006-08-22 Applied Materials, Inc. Method for controlling accuracy and repeatability of an etch process
AU2003300005A1 (en) * 2003-12-19 2005-08-03 International Business Machines Corporation Differential critical dimension and overlay metrology apparatus and measurement method
US7289214B1 (en) 2004-11-23 2007-10-30 N&K Technology, Inc. System and method for measuring overlay alignment using diffraction gratings
US7601272B2 (en) * 2005-01-08 2009-10-13 Applied Materials, Inc. Method and apparatus for integrating metrology with etch processing
US20060154388A1 (en) * 2005-01-08 2006-07-13 Richard Lewington Integrated metrology chamber for transparent substrates
JP5405109B2 (ja) * 2005-09-13 2014-02-05 ルミネセント テクノロジーズ インコーポレイテッド フォトリソグラフィのためのシステム、マスク、及び方法
WO2007041602A2 (en) * 2005-10-03 2007-04-12 Luminescent Technologies, Inc. Lithography verification using guard bands
US7921385B2 (en) * 2005-10-03 2011-04-05 Luminescent Technologies Inc. Mask-pattern determination using topology types
WO2007041701A2 (en) * 2005-10-04 2007-04-12 Luminescent Technologies, Inc. Mask-patterns including intentional breaks
WO2007044557A2 (en) 2005-10-06 2007-04-19 Luminescent Technologies, Inc. System, masks, and methods for photomasks optimized with approximate and accurate merit functions
US7962113B2 (en) * 2005-10-31 2011-06-14 Silicon Laboratories Inc. Receiver with multi-tone wideband I/Q mismatch calibration and method therefor
ES2386977T3 (es) 2005-11-29 2012-09-10 Google Inc. Aplicaciones sociales e interactivas para medios masivos
US8072587B2 (en) 2006-01-20 2011-12-06 Newport Corporation Machine and method for measuring a characteristic of an optical signal
US7444196B2 (en) * 2006-04-21 2008-10-28 Timbre Technologies, Inc. Optimized characterization of wafers structures for optical metrology
DE102006023196B3 (de) * 2006-05-17 2007-12-06 Qimonda Ag Verfahren und Vorrichtung zum Einstellen von gerätespezifischen Auswerteparametern
US7831531B1 (en) 2006-06-22 2010-11-09 Google Inc. Approximate hashing functions for finding similar content
US8411977B1 (en) 2006-08-29 2013-04-02 Google Inc. Audio identification using wavelet-based signatures
JP2008122929A (ja) * 2006-10-20 2008-05-29 Toshiba Corp シミュレーションモデルの作成方法
US7460237B1 (en) * 2007-08-02 2008-12-02 Asml Netherlands B.V. Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
US7873585B2 (en) * 2007-08-31 2011-01-18 Kla-Tencor Technologies Corporation Apparatus and methods for predicting a semiconductor parameter across an area of a wafer
US8135485B2 (en) * 2007-09-28 2012-03-13 Lam Research Corporation Offset correction techniques for positioning substrates within a processing chamber
JP2010044101A (ja) * 2008-08-08 2010-02-25 Toshiba Corp パターン予測方法、プログラム及び装置
WO2011001678A1 (ja) * 2009-07-01 2011-01-06 株式会社ニコン 露光条件設定方法および表面検査装置
US8379227B2 (en) 2009-10-28 2013-02-19 Nanometrics Incorporated Optical metrology on textured samples
US8797721B2 (en) 2010-02-02 2014-08-05 Apple Inc. Portable electronic device housing with outer glass surfaces
NL2011276A (en) * 2012-09-06 2014-03-10 Asml Netherlands Bv Inspection method and apparatus and lithographic processing cell.
US9026964B2 (en) * 2013-03-13 2015-05-05 University Of North Texas Intelligent metamodel integrated Verilog-AMS for fast and accurate analog block design exploration
US9070622B2 (en) * 2013-09-13 2015-06-30 Taiwan Semiconductor Manufacturing Company, Ltd. Systems and methods for similarity-based semiconductor process control
US9064741B1 (en) 2013-12-20 2015-06-23 Taiwan Semiconductor Manufacturing Company, Ltd. Uniformity in wafer patterning using feedback control
CN104701212B (zh) * 2015-03-30 2018-04-06 上海华力微电子有限公司 检测刻蚀负载效应的方法
US10866523B2 (en) 2015-06-16 2020-12-15 Asml Netherlands B.V. Process window tracker
JP7041489B2 (ja) * 2017-10-19 2022-03-24 キヤノン株式会社 評価方法、決定方法、リソグラフィ装置、およびプログラム
TWI637448B (zh) * 2017-10-20 2018-10-01 行政院原子能委員會核能硏究所 薄膜厚度量測方法及其系統
DE102018209562B3 (de) 2018-06-14 2019-12-12 Carl Zeiss Smt Gmbh Vorrichtungen und Verfahren zur Untersuchung und/oder Bearbeitung eines Elements für die Photolithographie
EP4261617A1 (de) * 2022-04-14 2023-10-18 ASML Netherlands B.V. Metrologieverfahren und zugehörige vorrichtungen

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Also Published As

Publication number Publication date
WO2002037186A1 (en) 2002-05-10
US20020072003A1 (en) 2002-06-13
AU2002214225A1 (en) 2002-05-15
IL139368A (en) 2006-12-10
IL139368A0 (en) 2001-11-25
DE60117286T2 (de) 2006-10-12
US6704920B2 (en) 2004-03-09
EP1360554A1 (de) 2003-11-12
EP1360554B1 (de) 2006-02-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition