DE60105463D1 - Voreinstellbare modulare Gaslaserentladungseinheit - Google Patents

Voreinstellbare modulare Gaslaserentladungseinheit

Info

Publication number
DE60105463D1
DE60105463D1 DE60105463T DE60105463T DE60105463D1 DE 60105463 D1 DE60105463 D1 DE 60105463D1 DE 60105463 T DE60105463 T DE 60105463T DE 60105463 T DE60105463 T DE 60105463T DE 60105463 D1 DE60105463 D1 DE 60105463D1
Authority
DE
Germany
Prior art keywords
presettable
discharge unit
gas laser
laser discharge
modular gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60105463T
Other languages
English (en)
Other versions
DE60105463T2 (de
Inventor
Hans Kodeda
Claus Strowitzki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TuiLaser AG
Original Assignee
TuiLaser AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/510,539 external-priority patent/US6522679B1/en
Priority claimed from US09/510,538 external-priority patent/US6859482B1/en
Application filed by TuiLaser AG filed Critical TuiLaser AG
Publication of DE60105463D1 publication Critical patent/DE60105463D1/de
Application granted granted Critical
Publication of DE60105463T2 publication Critical patent/DE60105463T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE2001605463 2000-02-22 2001-02-21 Voreinstellbare modulare Gaslaserentladungseinheit Expired - Lifetime DE60105463T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US510539 2000-02-22
US09/510,539 US6522679B1 (en) 2000-02-22 2000-02-22 Gas laser discharge unit
US09/510,538 US6859482B1 (en) 2000-02-22 2000-02-22 Modular gas laser discharge unit
US510538 2000-02-22

Publications (2)

Publication Number Publication Date
DE60105463D1 true DE60105463D1 (de) 2004-10-21
DE60105463T2 DE60105463T2 (de) 2005-11-17

Family

ID=27056941

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2001605463 Expired - Lifetime DE60105463T2 (de) 2000-02-22 2001-02-21 Voreinstellbare modulare Gaslaserentladungseinheit

Country Status (2)

Country Link
EP (1) EP1128500B1 (de)
DE (1) DE60105463T2 (de)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2698496B1 (fr) * 1992-11-24 1995-02-10 Laserdot Tête de laser à gaz, à décharge et circulation transverses, à préionisation corona, et laser la comportant.
WO1999060674A1 (en) * 1998-05-20 1999-11-25 Cymer, Inc. RELIABLE MODULAR PRODUCTION QUALITY NARROW-BAND HIGH REP RATE ArF EXCIMER LASER

Also Published As

Publication number Publication date
EP1128500A3 (de) 2002-08-07
EP1128500A2 (de) 2001-08-29
DE60105463T2 (de) 2005-11-17
EP1128500B1 (de) 2004-09-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition