DE60039142D1 - Energiefilter - Google Patents

Energiefilter

Info

Publication number
DE60039142D1
DE60039142D1 DE60039142T DE60039142T DE60039142D1 DE 60039142 D1 DE60039142 D1 DE 60039142D1 DE 60039142 T DE60039142 T DE 60039142T DE 60039142 T DE60039142 T DE 60039142T DE 60039142 D1 DE60039142 D1 DE 60039142D1
Authority
DE
Germany
Prior art keywords
energy filter
filter
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60039142T
Other languages
English (en)
Inventor
Toshiktsu Kaneyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Application granted granted Critical
Publication of DE60039142D1 publication Critical patent/DE60039142D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/463—Static spectrometers using static magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
DE60039142T 1999-03-18 2000-03-14 Energiefilter Expired - Lifetime DE60039142D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7345799 1999-03-18

Publications (1)

Publication Number Publication Date
DE60039142D1 true DE60039142D1 (de) 2008-07-24

Family

ID=13518808

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60039142T Expired - Lifetime DE60039142D1 (de) 1999-03-18 2000-03-14 Energiefilter

Country Status (3)

Country Link
US (1) US6483110B1 (de)
EP (1) EP1037252B1 (de)
DE (1) DE60039142D1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1744344B1 (de) * 2005-07-11 2010-08-25 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Vorrichtung zur Erzeugung eines elektrisch-magnetischen Feldes und Aufbaumethode derselben
DE102008064696B4 (de) * 2008-12-23 2022-01-27 Carl Zeiss Microscopy Gmbh Teilchenoptische Vorrichtung mit Magnetanordnung und ihre Verwendung zum Abbilden oder Beleuchten

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4743756A (en) 1987-08-10 1988-05-10 Gatan Inc. Parallel-detection electron energy-loss spectrometer
DE4041495A1 (de) * 1990-12-22 1992-06-25 Zeiss Carl Fa Elektronenenergiefilter, vorzugsweise vom alpha- oder omega-typ
JP3139920B2 (ja) * 1994-07-25 2001-03-05 株式会社日立製作所 エネルギフィルタおよびこれを備えた透過電子顕微鏡
JPH10125267A (ja) * 1996-10-16 1998-05-15 Jeol Ltd エネルギーフィルタ
JPH10199458A (ja) * 1997-01-17 1998-07-31 Hitachi Ltd エネルギーフィルタ及びこれを備えた透過型電子顕微鏡

Also Published As

Publication number Publication date
EP1037252A2 (de) 2000-09-20
EP1037252A3 (de) 2001-05-09
EP1037252B1 (de) 2008-06-11
US6483110B1 (en) 2002-11-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition