DE60038936D1 - Einkristallziehvorrichtung - Google Patents

Einkristallziehvorrichtung

Info

Publication number
DE60038936D1
DE60038936D1 DE60038936T DE60038936T DE60038936D1 DE 60038936 D1 DE60038936 D1 DE 60038936D1 DE 60038936 T DE60038936 T DE 60038936T DE 60038936 T DE60038936 T DE 60038936T DE 60038936 D1 DE60038936 D1 DE 60038936D1
Authority
DE
Germany
Prior art keywords
single crystal
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60038936T
Other languages
English (en)
Inventor
Yasushi Nakamura
Seiichiro Otsuka
Kouzou Yokota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE60038936D1 publication Critical patent/DE60038936D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE60038936T 1999-04-21 2000-04-18 Einkristallziehvorrichtung Expired - Lifetime DE60038936D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11333599 1999-04-21
PCT/JP2000/002520 WO2000065132A1 (fr) 1999-04-21 2000-04-18 Dispositif de tirage du cristal

Publications (1)

Publication Number Publication Date
DE60038936D1 true DE60038936D1 (de) 2008-07-03

Family

ID=14609646

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60038936T Expired - Lifetime DE60038936D1 (de) 1999-04-21 2000-04-18 Einkristallziehvorrichtung

Country Status (5)

Country Link
EP (1) EP1098016B1 (de)
JP (1) JP3685067B2 (de)
KR (1) KR20010053064A (de)
DE (1) DE60038936D1 (de)
WO (1) WO2000065132A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107562005B (zh) * 2017-08-08 2020-06-05 中曼石油天然气集团股份有限公司 一种石油钻机猫道控制器及其控制方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07515B2 (ja) * 1990-04-11 1995-01-11 信越半導体株式会社 結晶引上装置
US5641354A (en) * 1995-07-10 1997-06-24 Seh America, Inc. Puller cell
JP3671562B2 (ja) * 1996-11-22 2005-07-13 信越半導体株式会社 単結晶の製造装置および製造方法

Also Published As

Publication number Publication date
EP1098016B1 (de) 2008-05-21
JP3685067B2 (ja) 2005-08-17
KR20010053064A (ko) 2001-06-25
EP1098016A4 (de) 2006-04-12
WO2000065132A1 (fr) 2000-11-02
EP1098016A1 (de) 2001-05-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition