DE59907031D1 - METHOD AND ARRANGEMENT FOR CALIBRATING A LASER PROCESSING MACHINE FOR PROCESSING WORKPIECES - Google Patents

METHOD AND ARRANGEMENT FOR CALIBRATING A LASER PROCESSING MACHINE FOR PROCESSING WORKPIECES

Info

Publication number
DE59907031D1
DE59907031D1 DE59907031T DE59907031T DE59907031D1 DE 59907031 D1 DE59907031 D1 DE 59907031D1 DE 59907031 T DE59907031 T DE 59907031T DE 59907031 T DE59907031 T DE 59907031T DE 59907031 D1 DE59907031 D1 DE 59907031D1
Authority
DE
Germany
Prior art keywords
calibrating
arrangement
laser processing
processing machine
workpieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59907031T
Other languages
German (de)
Inventor
Lothar Mueller
Mladen Polgar
Steur Hubert De
Biesen Mark Van
Friedbert Roth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of DE59907031D1 publication Critical patent/DE59907031D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B23K26/043—Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

A method and arrangement for calibrating a laser processing machine for processing workpieces. The present invention ensures a fast and reproducible method and arrangement for calibrating a laser processing machine by measuring a position of a predetermined test pattern on a test plate while taking into account any imaging errors caused by the deflection unit.
DE59907031T 1998-07-13 1999-07-01 METHOD AND ARRANGEMENT FOR CALIBRATING A LASER PROCESSING MACHINE FOR PROCESSING WORKPIECES Expired - Lifetime DE59907031D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19831340A DE19831340C1 (en) 1998-07-13 1998-07-13 Method and arrangement for calibrating a laser processing machine for processing workpieces
PCT/DE1999/001914 WO2000003833A1 (en) 1998-07-13 1999-07-01 Method and device for calibrating a workpiece laser-processing machine

Publications (1)

Publication Number Publication Date
DE59907031D1 true DE59907031D1 (en) 2003-10-23

Family

ID=7873889

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19831340A Expired - Fee Related DE19831340C1 (en) 1998-07-13 1998-07-13 Method and arrangement for calibrating a laser processing machine for processing workpieces
DE59907031T Expired - Lifetime DE59907031D1 (en) 1998-07-13 1999-07-01 METHOD AND ARRANGEMENT FOR CALIBRATING A LASER PROCESSING MACHINE FOR PROCESSING WORKPIECES

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19831340A Expired - Fee Related DE19831340C1 (en) 1998-07-13 1998-07-13 Method and arrangement for calibrating a laser processing machine for processing workpieces

Country Status (9)

Country Link
US (1) US6615099B1 (en)
EP (1) EP1097022B1 (en)
JP (1) JP3605359B2 (en)
KR (1) KR100490932B1 (en)
CN (1) CN1124916C (en)
AT (1) ATE249908T1 (en)
DE (2) DE19831340C1 (en)
TW (1) TW436356B (en)
WO (1) WO2000003833A1 (en)

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DE10131610C1 (en) * 2001-06-29 2003-02-20 Siemens Dematic Ag Method for calibrating the optical system of a laser machine for processing electrical circuit substrates
DE10157983C5 (en) * 2001-11-27 2008-05-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Positioning and / or laser processing method and apparatus
US6873880B2 (en) * 2001-12-26 2005-03-29 Lockheed Martin Corporation Machine for performing machining operations on a workpiece and method of controlling same
JP3880964B2 (en) 2002-02-06 2007-02-14 サムスン エレクトロニクス カンパニー リミテッド Interleaver and interleaving method in communication system
DE10206183A1 (en) * 2002-02-14 2003-08-28 Siemens Ag Process for determining the accuracy of machine tools
US7663073B2 (en) * 2003-05-13 2010-02-16 Panasonic Corporation Optical processing apparatus
US6977356B2 (en) * 2003-09-30 2005-12-20 United Technologies Corporation Stereovision guided laser drilling system
CN100351608C (en) * 2005-04-12 2007-11-28 鸿富锦精密工业（深圳）有限公司 Scanning precision verifying method for laser measurement equipment
JP2007175744A (en) * 2005-12-28 2007-07-12 Yamazaki Mazak Corp Apparatus for adjusting axis of optical path in laser machine
US7945087B2 (en) * 2006-06-26 2011-05-17 Orbotech Ltd. Alignment of printed circuit board targets
KR100788438B1 (en) 2006-10-18 2007-12-24 박재현 Laser beam machining method and laserbeam machine
WO2009018857A1 (en) * 2007-08-06 2009-02-12 Stephen Hastings Method for reactive optical correction of galvano motor scanning heads
JP5443390B2 (en) * 2008-01-10 2014-03-19 オルボテック リミテッド Multi-mirror calibration system
GB0809003D0 (en) * 2008-05-17 2008-06-25 Rumsby Philip T Method and apparatus for laser process improvement
TWI460722B (en) * 2009-01-11 2014-11-11 Orbotech Ltd Optical system and method for calibrating a plurality of selectably directable mirrors
WO2011127601A1 (en) * 2010-04-13 2011-10-20 National Research Council Of Canada Laser processing control method
DE102010020732B4 (en) * 2010-05-17 2013-10-10 Rena Gmbh Device and method for aligning a laser head and multi-laser block for a production plant
KR101245804B1 (en) * 2011-02-14 2013-03-21 (주)와이티에스 Laser marking system
US8938317B2 (en) * 2012-01-10 2015-01-20 Mitsubishi Electronic Research Laboratories, Inc. System and method for calibrating laser cutting machines
US20130259403A1 (en) * 2012-04-03 2013-10-03 Oluwatosin Osinusi Flexible easy-to-use system and method of automatically inserting a photorealistic view of a two or three dimensional object into an image using a cd,dvd or blu-ray disc
DE102012106156B4 (en) * 2012-07-09 2019-09-12 Acsys Lasertechnik Gmbh Method for controlling a tool
TWI543830B (en) 2013-05-10 2016-08-01 財團法人工業技術研究院 Visual error correction method
KR20150006954A (en) * 2013-07-09 2015-01-20 삼성디스플레이 주식회사 Method for forming a mask pattern using a laser
GB201317974D0 (en) 2013-09-19 2013-11-27 Materialise Nv System and method for calibrating a laser scanning system
EP2902148B1 (en) 2013-11-25 2019-08-28 Preco, Inc. High density galvo housing for use with multiple laser beams ; galvo system and laser beam processing system with such housing
JP6190707B2 (en) * 2013-11-29 2017-08-30 株式会社アマダホールディングス Reference member for sensor calibration and sensor calibration method
TW201544222A (en) * 2014-02-21 2015-12-01 Panasonic Ip Man Co Ltd Laser beam machine
CN104191094A (en) * 2014-06-12 2014-12-10 上海功源自动化技术有限公司 High-precision wafer back etching centering system groove alignment method
JP6217603B2 (en) * 2014-11-21 2017-10-25 ブラザー工業株式会社 Laser marker data creation device
DE102016218360B4 (en) * 2016-09-23 2019-08-29 Carl Zeiss Industrielle Messtechnik Gmbh Calibration structure and calibration procedure for calibrating optical measuring instruments
DE102016222186B3 (en) * 2016-11-11 2018-04-12 Trumpf Laser- Und Systemtechnik Gmbh Method for calibrating two scanner devices each for positioning a laser beam in an operating field and processing machine for producing three-dimensional components by irradiation of powder layers
EP3527319B1 (en) 2018-02-19 2020-07-15 IAI Industrial systems B.V. Laser engraver with calibration system
TWI778205B (en) * 2018-03-13 2022-09-21 日商住友重機械工業股份有限公司 Laser power control device, laser processing device, and laser power control method
US10919111B2 (en) 2018-12-05 2021-02-16 Robert Bosch Tool Corporation Laser engraver mirror adjustment system
EP3795336B1 (en) * 2019-09-19 2022-07-13 LayerWise NV Calibration method for powder fusion system
AT526197A1 (en) 2022-06-09 2023-12-15 Trotec Laser Gmbh Method for determining, in particular static, geometric errors of a laser machine for cutting, engraving, marking and/or labeling a workpiece and a method for determining the location or position of the center of a detector on the detector element as well as a calibration segment and laser machine for this

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Also Published As

Publication number Publication date
CN1124916C (en) 2003-10-22
DE19831340C1 (en) 2000-03-02
CN1333713A (en) 2002-01-30
ATE249908T1 (en) 2003-10-15
EP1097022B1 (en) 2003-09-17
JP2002520165A (en) 2002-07-09
KR100490932B1 (en) 2005-05-24
EP1097022A1 (en) 2001-05-09
TW436356B (en) 2001-05-28
KR20010053500A (en) 2001-06-25
US6615099B1 (en) 2003-09-02
JP3605359B2 (en) 2004-12-22
WO2000003833A1 (en) 2000-01-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HITACHI VIA MECHANICS,LTD., EBINA, KANAGAWA, JP

8328 Change in the person/name/address of the agent

Representative=s name: BEETZ & PARTNER PATENTANWAELTE, 80538 MUENCHEN