DE59805573D1 - Device for producing a large number of low-temperature plasma jets - Google Patents

Device for producing a large number of low-temperature plasma jets

Info

Publication number
DE59805573D1
DE59805573D1 DE59805573T DE59805573T DE59805573D1 DE 59805573 D1 DE59805573 D1 DE 59805573D1 DE 59805573 T DE59805573 T DE 59805573T DE 59805573 T DE59805573 T DE 59805573T DE 59805573 D1 DE59805573 D1 DE 59805573D1
Authority
DE
Germany
Prior art keywords
producing
low
large number
temperature plasma
plasma jets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59805573T
Other languages
German (de)
Inventor
Prof Dr Dr H C Engemann
Dr Korzec
Mark Mildner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JE PLASMACONSULT GmbH
Original Assignee
JE PLASMACONSULT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JE PLASMACONSULT GmbH filed Critical JE PLASMACONSULT GmbH
Application granted granted Critical
Publication of DE59805573D1 publication Critical patent/DE59805573D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/481—Hollow cathodes
DE59805573T 1997-05-30 1998-05-27 Device for producing a large number of low-temperature plasma jets Expired - Lifetime DE59805573D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722624A DE19722624C2 (en) 1997-05-30 1997-05-30 Device for producing a large number of low-temperature plasma jets

Publications (1)

Publication Number Publication Date
DE59805573D1 true DE59805573D1 (en) 2002-10-24

Family

ID=7830910

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19722624A Expired - Fee Related DE19722624C2 (en) 1997-05-30 1997-05-30 Device for producing a large number of low-temperature plasma jets
DE59805573T Expired - Lifetime DE59805573D1 (en) 1997-05-30 1998-05-27 Device for producing a large number of low-temperature plasma jets

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19722624A Expired - Fee Related DE19722624C2 (en) 1997-05-30 1997-05-30 Device for producing a large number of low-temperature plasma jets

Country Status (2)

Country Link
EP (1) EP0881865B1 (en)
DE (2) DE19722624C2 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE516336C2 (en) * 1999-04-28 2001-12-17 Hana Barankova Apparatus for plasma treatment of surfaces
ATE245310T1 (en) * 2000-03-14 2003-08-15 Fraunhofer Ges Forschung METHOD AND DEVICE FOR PLASMA-ASSISTED SURFACE TREATMENT AND USE OF THE METHOD
DE10120405B4 (en) * 2001-04-25 2008-08-21 Je Plasmaconsult Gmbh Device for generating a low-temperature plasma
DE10203543B4 (en) * 2002-01-29 2008-04-30 Je Plasmaconsult Gmbh Device for generating an APG plasma
DE102004029081A1 (en) * 2004-06-16 2006-01-05 Je Plasmaconsult Gmbh Device for processing a substrate by means of at least one plasma jet
DE102005032890B4 (en) * 2005-07-14 2009-01-29 Je Plasmaconsult Gmbh Apparatus for generating atmospheric pressure plasmas
GB0612814D0 (en) * 2006-06-28 2006-08-09 Boc Group Plc Method of treating a gas stream
TWI318417B (en) 2006-11-03 2009-12-11 Ind Tech Res Inst Hollow-type cathode electricity discharging apparatus
FR2912864B1 (en) * 2007-02-15 2009-07-31 H E F Soc Par Actions Simplifi DEVICE FOR GENERATING A COLD PLASMA IN A VACUUM ENCLOSURE AND USING THE DEVICE FOR THERMOCHEMICAL TREATMENTS
TWI641292B (en) 2008-08-04 2018-11-11 Ａｇｃ北美平面玻璃公司 Plasma source
CN101730374B (en) * 2008-10-30 2012-05-09 财团法人工业技术研究院 Plasma system
DE102010027570B3 (en) * 2010-07-19 2011-11-10 Eagleburgmann Germany Gmbh & Co. Kg Bellows compensator
RU2466514C2 (en) * 2011-02-09 2012-11-10 Государственное образовательное учреждение высшего профессионального образования "Камская государственная инженерно-экономическая академия" (ИНЭКА) Method to produce electric discharge in vapours of electrolyte and device for its realisation
MX2017007356A (en) * 2014-12-05 2018-04-11 Agc Flat Glass Europe S A Hollow cathode plasma source.
JP6508746B2 (en) 2014-12-05 2019-05-08 エージーシー フラット グラス ノース アメリカ，インコーポレイテッドＡｇｃ Ｆｌａｔ Ｇｌａｓｓ Ｎｏｒｔｈ Ａｍｅｒｉｃａ，Ｉｎｃ． Plasma source using macro particle reduction coating and method of using plasma source with macro particle reduction coating for thin film coating and surface modification
US9721765B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US10573499B2 (en) 2015-12-18 2020-02-25 Agc Flat Glass North America, Inc. Method of extracting and accelerating ions
US10242846B2 (en) 2015-12-18 2019-03-26 Agc Flat Glass North America, Inc. Hollow cathode ion source
EP3474635B1 (en) 2017-10-17 2021-08-18 Leibniz-Institut für Plasmaforschung und Technologie e.V. Modular plasma jet treatment system
FR3115180B1 (en) * 2020-10-14 2022-11-04 Peter Choi Plasma generating device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CS246982B1 (en) * 1985-06-17 1986-11-13 Ladislav Bardos Method and apparatus for producing chemically active environment for plasma chemical reactions namely for deposition of thin layers
US4954751A (en) * 1986-03-12 1990-09-04 Kaufman Harold R Radio frequency hollow cathode
IT1246682B (en) * 1991-03-04 1994-11-24 Proel Tecnologie Spa CABLE CATHOD DEVICE NOT HEATED FOR THE DYNAMIC GENERATION OF PLASMA
DE4233895C2 (en) * 1992-10-08 1996-11-28 Juergen Prof Dr Engemann Device for treating web-shaped materials moved by a winding mechanism by means of a reactive or non-reactive, low-pressure plasma generated by high-frequency or pulse discharge
US5464667A (en) * 1994-08-16 1995-11-07 Minnesota Mining And Manufacturing Company Jet plasma process and apparatus
SE9403988L (en) * 1994-11-18 1996-04-01 Ladislav Bardos Apparatus for generating linear arc discharge for plasma processing
DE19505268C2 (en) * 1995-02-16 1999-02-18 Fraunhofer Ges Forschung CVD process for coating substrate surfaces
DE19541236A1 (en) * 1995-11-06 1997-05-07 Leybold Ag Apparatus for coating the surfaces of substrates shaped as bodies of revolution

Also Published As

Publication number Publication date
EP0881865B1 (en) 2002-09-18
DE19722624C2 (en) 2001-08-09
EP0881865A2 (en) 1998-12-02
DE19722624A1 (en) 1998-12-03
EP0881865A3 (en) 2000-06-28

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