DE59803149D1 - MICRO RELAY - Google Patents

MICRO RELAY

Info

Publication number
DE59803149D1
DE59803149D1 DE59803149T DE59803149T DE59803149D1 DE 59803149 D1 DE59803149 D1 DE 59803149D1 DE 59803149 T DE59803149 T DE 59803149T DE 59803149 T DE59803149 T DE 59803149T DE 59803149 D1 DE59803149 D1 DE 59803149D1
Authority
DE
Germany
Prior art keywords
microrelay
magnetic field
homogeneous
conical
coil windings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59803149T
Other languages
German (de)
Inventor
Ralf Schnupp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Application granted granted Critical
Publication of DE59803149D1 publication Critical patent/DE59803149D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/44—Magnetic coils or windings

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Glass Compositions (AREA)

Abstract

A microrelay manufactured by microsystem technology and a process for manufacturing the same are disclosed. In the claimed microrelay, the excitation coil has a conical form. This conical arrangement of the coil windings induces a magnetic field which is substantially more homogeneous than in planar coils. Due to this more homogeneous magnetic field, the relay contact elements are pressed more strongly onto the contact surfaces and an electromagnetic relay with higher wear resistance and longer service life is obtained. The conical arrangement of the coil windings can be obtained by metal deposition and structuring on the walls of a pit anisotropically etched in a silicon chip.
DE59803149T 1997-11-14 1998-11-13 MICRO RELAY Expired - Lifetime DE59803149D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19750559A DE19750559C1 (en) 1997-11-14 1997-11-14 Micro relay
PCT/DE1998/003407 WO1999026264A1 (en) 1997-11-14 1998-11-13 Microrelay

Publications (1)

Publication Number Publication Date
DE59803149D1 true DE59803149D1 (en) 2002-03-28

Family

ID=7848791

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19750559A Expired - Fee Related DE19750559C1 (en) 1997-11-14 1997-11-14 Micro relay
DE59803149T Expired - Lifetime DE59803149D1 (en) 1997-11-14 1998-11-13 MICRO RELAY

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19750559A Expired - Fee Related DE19750559C1 (en) 1997-11-14 1997-11-14 Micro relay

Country Status (4)

Country Link
EP (1) EP1031161B1 (en)
AT (1) ATE213565T1 (en)
DE (2) DE19750559C1 (en)
WO (1) WO1999026264A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10319538B4 (en) * 2003-04-30 2008-01-17 Qimonda Ag Semiconductor device and method for producing a semiconductor device
FR2909831B1 (en) * 2006-12-08 2009-01-16 Schneider Electric Ind Sas VARIABLE LIGHT EMITTING DEVICE WITH LIGHT EMITTING DIODES
IT201900012894A1 (en) * 2019-07-25 2021-01-25 Carlo Gavazzi Automation S P A PILOTING CIRCUIT FOR THE CONTROL OF A SAFETY MODULE PARTICULARLY FOR THE PILOTING OF EQUIPMENT USED IN THE RAILWAY CONTROL AND SIGNALING SYSTEMS AND SAFETY MODULE INCLUDING SAID PILOT CIRCUIT

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB828291A (en) * 1954-10-08 1960-02-17 Burndept Ltd Improvements in and relating to electric inductors
TW362222B (en) * 1995-11-27 1999-06-21 Matsushita Electric Ind Co Ltd Coiled component and its production method
US5778513A (en) * 1996-02-09 1998-07-14 Denny K. Miu Bulk fabricated electromagnetic micro-relays/micro-switches and method of making same

Also Published As

Publication number Publication date
EP1031161B1 (en) 2002-02-20
WO1999026264A1 (en) 1999-05-27
ATE213565T1 (en) 2002-03-15
DE19750559C1 (en) 1999-02-04
EP1031161A1 (en) 2000-08-30

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Legal Events

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