DE59605974D1 - Process and device for cleaning pollutant-containing exhaust gases by chemical conversion - Google Patents

Process and device for cleaning pollutant-containing exhaust gases by chemical conversion

Info

Publication number
DE59605974D1
DE59605974D1 DE59605974T DE59605974T DE59605974D1 DE 59605974 D1 DE59605974 D1 DE 59605974D1 DE 59605974 T DE59605974 T DE 59605974T DE 59605974 T DE59605974 T DE 59605974T DE 59605974 D1 DE59605974 D1 DE 59605974D1
Authority
DE
Germany
Prior art keywords
exhaust gases
chemical conversion
containing exhaust
cleaning pollutant
pollutant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59605974T
Other languages
German (de)
Inventor
Dr Reichardt
Dipl-Ing Ritter
Dipl-Ing Firkert
Dipl-Phys Labs
Dipl-Phys Gehmlich
Gerold Hofmann
Dipl-Ing Hentrich
Wido Wiesenberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Das Duennschicht Anlagen Systeme GmbH
Original Assignee
Das Duennschicht Anlagen Systeme GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Das Duennschicht Anlagen Systeme GmbH filed Critical Das Duennschicht Anlagen Systeme GmbH
Application granted granted Critical
Publication of DE59605974D1 publication Critical patent/DE59605974D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M9/00—Baffles or deflectors for air or combustion products; Flame shields
    • F23M9/06—Baffles or deflectors for air or combustion products; Flame shields in fire-boxes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2215/00—Preventing emissions
    • F23J2215/30—Halogen; Compounds thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00—Treatment devices
    • F23J2219/40—Sorption with wet devices, e.g. scrubbers
DE59605974T 1995-03-30 1996-02-14 Process and device for cleaning pollutant-containing exhaust gases by chemical conversion Expired - Fee Related DE59605974D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19511643A DE19511643A1 (en) 1995-03-30 1995-03-30 Process and device for cleaning pollutant-containing exhaust gases by chemical conversion

Publications (1)

Publication Number Publication Date
DE59605974D1 true DE59605974D1 (en) 2000-11-16

Family

ID=7758135

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19511643A Withdrawn DE19511643A1 (en) 1995-03-30 1995-03-30 Process and device for cleaning pollutant-containing exhaust gases by chemical conversion
DE59605974T Expired - Fee Related DE59605974D1 (en) 1995-03-30 1996-02-14 Process and device for cleaning pollutant-containing exhaust gases by chemical conversion

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19511643A Withdrawn DE19511643A1 (en) 1995-03-30 1995-03-30 Process and device for cleaning pollutant-containing exhaust gases by chemical conversion

Country Status (2)

Country Link
EP (1) EP0735320B1 (en)
DE (2) DE19511643A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19600873A1 (en) * 1996-01-12 1997-10-02 Das Duennschicht Anlagen Sys Process and device for cleaning pollutant-containing exhaust gases by burning and chemical conversion using a flame in a combustion chamber
GB2323312B (en) * 1997-03-21 2001-08-08 Korea M A T Co Ltd Gas scrubber and methods of disposing a gas using the same
DE29712026U1 (en) * 1997-07-09 1998-11-12 Ebara Germany Gmbh Burner for the combustion of exhaust gases with at least one condensable component
TW506852B (en) * 2000-08-28 2002-10-21 Promos Technologies Inc Device and method for processing exhaust from process chamber
DE102006052586B4 (en) * 2006-11-08 2008-07-03 Schott Solar Gmbh Method and device for cleaning the exhaust gases of a silicon thin-film production plant

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE431196B (en) * 1980-12-12 1984-01-23 Flemmert Goesta Lennart SET THROUGH HYDROLYSIS OF SILICONE TETRAFLUORIDE IN A LAYER PRODUCING FINALLY DISTRIBUTED SILICO OXIDE
DE3144744C2 (en) * 1981-11-11 1984-04-12 Lafarge Réfractaires, 92542 Montronge Heating boiler
DD221088A1 (en) * 1983-09-12 1985-04-17 Univ Schiller Jena METHOD AND ARRANGEMENT FOR DETOXIFYING F-CARBON CONTAINING EXHAUST GASES
DE3529309A1 (en) * 1985-08-16 1987-03-19 Hoechst Ag DEVICE FOR THE COMBUSTION OF HYDROCARBONS
DD273008A1 (en) * 1988-06-15 1989-11-01 Elektromat Veb DEVICE FOR CLEANING EXHAUST GASES FROM LOW PRESSURE PROCESSES
US4957717A (en) * 1989-01-09 1990-09-18 Nippon Shokubai Kagaku Kogyo Co., Ltd. Method of disposal of organic chlorine compounds by combustion
DE4107595C2 (en) * 1991-03-09 1994-02-17 Forschungszentrum Juelich Gmbh Metallic catalyst for removing hydrogen from a gas mixture containing hydrogen and oxygen, and process for its production
DE4413734C2 (en) * 1993-04-29 1996-02-29 Univ Karlsruhe Catalysts for the combustion of chlorinated hydrocarbons
DE4319118A1 (en) * 1993-06-09 1994-12-15 Breitbarth Friedrich Wilhelm D Process and apparatus for disposing of fluorocarbons and other fluorine-containing compounds

Also Published As

Publication number Publication date
DE19511643A1 (en) 1996-10-02
EP0735320B1 (en) 2000-10-11
EP0735320A3 (en) 1997-03-26
EP0735320A2 (en) 1996-10-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee